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公开(公告)号：US20210396520A1
公开(公告)日：2021-12-23
申请号：US16906484
申请日：2020-06-19
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Laura Cornelia Popa
IPC: G01C19/5769 , G01C19/5733
Abstract: Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.
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公开(公告)号：US20220057210A1
公开(公告)日：2022-02-24
申请号：US17515271
申请日：2021-10-29
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号：US11193771B1
公开(公告)日：2021-12-07
申请号：US16894717
申请日：2020-06-05
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号：US20240253979A1
公开(公告)日：2024-08-01
申请号：US18632802
申请日：2024-04-11
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Christopher Needham , Andrew Proudman , Nikolay Pokrovskiy , George M. Molnar, II , Laura Cornelia Popa
CPC classification number: B81C1/00325 , B81B7/0048 , B81C1/00063 , B81B2203/01
Abstract: A stress-isolated microelectromechanical systems (MEMS) device and a method of manufacture of the stress-isolated MEMS device are provided. MEMS devices may be sensitive to stress and may provide lower performance when subjected to stress. A stress-isolated MEMS device may be manufactured by etching a trench and/or a cavity in a first side of a substrate and subsequently forming a MEMS device on a surface of a platform opposite the first side of the substrate. Such a stress-isolated MEMS device may exhibit better performance than a MEMS device that is not stress-isolated. Moreover, manufacturing the MEMS device by first forming a trench and cavity on a backside of a wafer, before forming the MEMS device on a suspended platform, provides increased yield and allows for fabrication of smaller parts, in at least some embodiments.
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Patent Agency Ranking
公开(公告)号：US11519726B2
公开(公告)日：2022-12-06
申请号：US16906484
申请日：2020-06-19
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Laura Cornelia Popa
IPC: G01C19/5769 , G01C19/5733
Abstract: Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.
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公开(公告)号：US11981560B2
公开(公告)日：2024-05-14
申请号：US17342442
申请日：2021-06-08
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Christopher Needham , Andrew Proudman , Nikolay Pokrovskiy , George M. Molnar, II , Laura Cornelia Popa , Michael Judy
CPC classification number: B81C1/00325 , B81B7/0048 , B81C1/00063 , B81B2203/01
Abstract: A stress-isolated microelectromechanical systems (MEMS) device and a method of manufacture of the stress-isolated MEMS device are provided. MEMS devices may be sensitive to stress and may provide lower performance when subjected to stress. A stress-isolated MEMS device may be manufactured by etching a trench and/or a cavity in a first side of a substrate and subsequently forming a MEMS device on a surface of a platform opposite the first side of the substrate. Such a stress-isolated MEMS device may exhibit better performance than a MEMS device that is not stress-isolated. Moreover, manufacturing the MEMS device by first forming a trench and cavity on a backside of a wafer, before forming the MEMS device on a suspended platform, provides increased yield and allows for fabrication of smaller parts, in at least some embodiments.
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公开(公告)号：US11774244B2
公开(公告)日：2023-10-03
申请号：US17515271
申请日：2021-10-29
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
CPC classification number: G01C19/5747 , G01C19/574 , G01C19/5712 , G01C19/5719
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号：US20210381834A1
公开(公告)日：2021-12-09
申请号：US16894717
申请日：2020-06-05
Applicant: Analog Devices, Inc.
Inventor： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号：US20210380403A1
公开(公告)日：2021-12-09
申请号：US17342442
申请日：2021-06-08
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Christopher Needham , Andrew Proudman , Nikolay Pokrovskiy , George M. Molnar, II , Laura Cornelia Popa , Michael Judy
Abstract: A stress-isolated microelectromechanical systems (MEMS) device and a method of manufacture of the stress-isolated MEMS device are provided. MEMS devices may be sensitive to stress and may provide lower performance when subjected to stress. A stress-isolated MEMS device may be manufactured by etching a trench and/or a cavity in a first side of a substrate and subsequently forming a MEMS device on a surface of a platform opposite the first side of the substrate. Such a stress-isolated MEMS device may exhibit better performance than a MEMS device that is not stress-isolated. Moreover, manufacturing the MEMS device by first forming a trench and cavity on a backside of a wafer, before forming the MEMS device on a suspended platform, provides increased yield and allows for fabrication of smaller parts, in at least some embodiments.
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