USE OF COMPOSITIONS COMPRISING A SURFACTANT AND A HYDROPHOBIZER FOR AVOIDING ANTI PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW
    6.
    发明申请
    USE OF COMPOSITIONS COMPRISING A SURFACTANT AND A HYDROPHOBIZER FOR AVOIDING ANTI PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 有权
    使用包含表面活性剂和疏水剂的组合物,用于避免在50nm或以下的线空间处理图案的材料时避免图案皱褶

    公开(公告)号:US20150323871A1

    公开(公告)日:2015-11-12

    申请号:US14652120

    申请日:2013-12-04

    Applicant: BASF SE

    Abstract: In a method of treating a substrate including patterns having line-space dimensions of 50 nm or below, the substrate is rinsed by an aqueous composition including at least one non-ionic surfactant A and at least one hydrophobizer B. The at least one surfactant A has an equilibrium surface tension of 10 mN/m to 35 mN/m, determined from a solution of the at least one surfactant A in water at the critical micelle concentration. The hydrophobizer B is selected so that the contact angle of water to the substrate is increased by contacting the substrate with a solution of the hydrophobizer B in water by 5-95° compared to the contact angle of water to the substrate before such contacting.

    Abstract translation: 在处理包括线空间尺寸为50nm或更小的图案的基材的方法中,通过包含至少一种非离子表面活性剂A和至少一种疏水化剂B的水性组合物漂洗基材。至少一种表面活性剂A 具有10mN / m至35mN / m的平衡表面张力,其由临界胶束浓度的至少一种表面活性剂A在水中的溶液测定。 疏水化剂B被选择为使得水与基底的接触角通过使接触基底与水分散体B在水中的溶液相比在接触之前与水接触角相接触而增加5-95°。

    Method of mineral oil production
    9.
    发明授权

    公开(公告)号:US10961432B2

    公开(公告)日:2021-03-30

    申请号:US16296904

    申请日:2019-03-08

    Applicant: BASF SE

    Abstract: The present invention relates to a method for producing mineral oil from underground mineral oil deposits, in which an aqueous formulation comprising at least a mixture of alkyl ether carboxylate and corresponding alkyl ether alcohol, where the alkyl ether carboxylate has been prepared from the alkyl ether alcohol and the molar ratio in the mixture of alkyl ether carboxylate:alkyl ether alcohol is from 51:49 to 92:8, is injected through at least one injection well into a mineral oil deposit, where the deposit has a deposit temperature of 55° C. to 150° C., a crude oil having more than 20° API and a deposit water having more than 100 ppm of divalent cations, and crude oil is withdrawn through at least one production well from the deposit. The invention further relates to the preparation of the mixture and to a concentrate comprising the mixture.

    Method of mineral oil production
    10.
    发明授权

    公开(公告)号:US10266751B2

    公开(公告)日:2019-04-23

    申请号:US15527249

    申请日:2015-11-17

    Applicant: BASF SE

    Abstract: The present invention relates to a method for producing mineral oil from underground mineral oil deposits, in which an aqueous formulation comprising at least a mixture of alkyl ether carboxylate and corresponding alkyl ether alcohol, where the alkyl ether carboxylate has been prepared from the alkyl ether alcohol and the molar ratio in the mixture of alkyl ether carboxylate:alkyl ether alcohol is from 51:49 to 92:8, is injected through at least one injection well into a mineral oil deposit, where the deposit has a deposit temperature of 55° C. to 150° C., a crude oil having more than 20° API and a deposit water having more than 100 ppm of divalent cations, and crude oil is withdrawn through at least one production well from the deposit. The invention further relates to the preparation of the mixture and to a concentrate comprising the mixture.

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