公开(公告)号：US20170250625A1

公开(公告)日：2017-08-31

申请号：US15509782

申请日：2015-09-09

Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

Inventor： Donglei Fan ,  Kwanoh Kim ,  Jianhe Guo

IPC: H02N1/00 ,  C23C14/16 ,  C23C14/58 ,  H01F41/02 ,  C23C14/30 ,  H01F7/02 ,  H01F1/01 ,  C23C14/04 ,  C23C14/02

CPC classification number: H02N1/006 ,  B81B2201/034 ,  B81B2201/038 ,  B81B2203/0118 ,  B81B2203/0181 ,  B81B2203/04 ,  B81C3/004 ,  C23C14/00 ,  C23C14/022 ,  C23C14/025 ,  C23C14/027 ,  C23C14/042 ,  C23C14/16 ,  C23C14/30 ,  C23C14/5873 ,  H01F1/01 ,  H01F7/02 ,  H01F41/0253

Abstract: The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.

公开(公告)号：US10944339B2

公开(公告)日：2021-03-09

申请号：US15509782

申请日：2015-09-09

Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

Inventor： Donglei Fan ,  Kwanoh Kim ,  Jianhe Guo

IPC: H02N1/00 ,  C23C14/16 ,  C23C14/58 ,  H01F41/02 ,  C23C14/30 ,  C23C14/04 ,  B81B5/00 ,  B82B1/00 ,  C23C14/00 ,  C23C14/02 ,  H01F1/01 ,  H01F7/02

Abstract: The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.