公开(公告)号：US20090222958A1

公开(公告)日：2009-09-03

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G12B21/08

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定触点的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。

公开(公告)号：US20090032706A1

公开(公告)日：2009-02-05

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20080277582A1

公开(公告)日：2008-11-13

申请号：US11800679

申请日：2007-05-07

申请人： Jian Shi ,  Chanmin Su ,  Craig Prater ,  Ji Ma

发明人： Jian Shi ,  Chanmin Su ,  Craig Prater ,  Ji Ma

IPC分类号： G21K7/00 ,  G01B5/28

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q10/04 ,  G01Q10/065

摘要： A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor over the scan bandwidth. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.

摘要翻译： 操作测量仪器的方法包括使用致动器在扫描频率下产生探针和样品之间的相对运动。 该方法还包括使用在检测到的运动中呈现噪声的位置传感器来检测致动器的运动，以及使用反馈回路和前馈算法来控制致动器的位置。 在该实施例中，与位置传感器在扫描带宽上显示的噪声相比，控制步骤衰减了致动器位置的噪声。 扫描频率高达第一扫描仪共振频率的三分之一或大于300 Hz是可能的。

公开(公告)号：US20080127722A1

公开(公告)日：2008-06-05

申请号：US11606695

申请日：2006-11-30

申请人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

发明人： Chanmin Su ,  Craig Prater ,  Gregory F. Meyers ,  Bryant R. LaFreniere

IPC分类号： G01B5/28

CPC分类号： G01Q60/32 ,  G01Q30/04

摘要： A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e.g., pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.

摘要翻译： 提供了一种用于其实践的方法和装置，其使用谐波共振成像将异质样品的至少一个组分与其他组分区分开，并且从差异化获得关于样品的信息。 在优选实施例中，产生具有谐波特性或谐波的组合的图像，产生具有样品组成成分之间的对比度因子的响应。 可以在样品的初步数据采集程序中识别所需的谐波，或者如果样品的组成成分预先已知，则预先确定。 期望的哈密顿可以由用户直接识别或通过例如模式识别自动识别。 然后可以生成和显示组成图，和/或可以获得关于样本的附加信息。

公开(公告)号：US20050121615A1

公开(公告)日：2005-06-09

申请号：US10975792

申请日：2004-10-28

申请人： Craig Prater ,  Charles Meyer ,  Chanmin Su ,  James Massie ,  Kenneth Babcock ,  Mary Turner

发明人： Craig Prater ,  Charles Meyer ,  Chanmin Su ,  James Massie ,  Kenneth Babcock ,  Mary Turner

IPC分类号： G01N9/00 ,  G01Q70/00 ,  G02B7/182 ,  G01N21/35

CPC分类号： G02B7/1821 ,  G01N9/002 ,  G01N2291/0427

摘要： An integrated cantilever sensor array system that accurately detects and measures the presence of target substances in various environmental conditions. The integrated cantilever sensor array system comprises a cantilever sensor measurement head, a cantilever sensor system for measuring the oscillatory properties of the cantilevers and a measurement chamber. The measurement head includes a cantilever array having at least one cantilever, a light source and a detector positioned to detect incoming light reflected by the cantilevers within the cantilever array. The cantilever sensor system measures the oscillatory properties generated by the cantilevers within the cantilever array. The system includes the cantilever array and a detection system that measures a signal related to the bending of the cantilever. In addition, optional components such as a high frequency clock, Q-Control, may be added to more accurately measure the oscillation of the cantilevers within the cantilever array. The measurement chamber includes a flow cell, a cantilever sensor array mounted within the flow cell. The flow cell is designed to minimize dead volume and unwanted air bubbles within the cell, which may reduce accuracy of measurement.

摘要翻译： 集成的悬臂传感器阵列系统，能够准确地检测和测量各种环境条件下目标物质的存在。 集成的悬臂传感器阵列系统包括悬臂传感器测量头，用于测量悬臂的振荡特性的悬臂传感器系统和测量室。 测量头包括悬臂阵列，其具有至少一个悬臂，光源和检测器，定位成检测由悬臂阵列内的悬臂反射的入射光。 悬臂传感器系统测量由悬臂阵列内的悬臂产生的振荡特性。 该系统包括悬臂阵列和测量与悬臂弯曲有关的信号的检测系统。 此外，可以添加诸如高频时钟Q-Control等可选组件以更准确地测量悬臂阵列内的悬臂的振荡。 测量室包括流动池，安装在流动池内的悬臂传感器阵列。 流动池被设计成使细胞内的死体积和不需要的气泡最小化，这可能降低测量精度。

公开(公告)号：US07770231B2

公开(公告)日：2010-08-03

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20080011065A1

公开(公告)日：2008-01-17

申请号：US11457079

申请日：2006-07-12

申请人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

发明人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/045

摘要： A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

摘要翻译： 一种用于具有探针的测量仪器的驱动致动器，所述驱动致动器包括与所述探针具有导热关系的加热元件，使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针，其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂，以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。

公开(公告)号：US20060000263A1

公开(公告)日：2006-01-05

申请号：US11106366

申请日：2005-04-14

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.

公开(公告)号：US08322220B2

公开(公告)日：2012-12-04

申请号：US12119382

申请日：2008-05-12

申请人： Craig Prater ,  Chanmin Su

发明人： Craig Prater ,  Chanmin Su

IPC分类号： G01N29/06

CPC分类号： G01Q60/06 ,  G01N29/0681 ,  G01Q60/32

摘要： A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.

摘要翻译： 在样本上的多个位置成像子表面特征的方法和相应的装置包括在第一横向位置将超声波耦合到样本中。 然后该方法用原子力显微镜的尖端测量样品附近的超声波能量的振幅和相位。 接下来，该方法在第二横向位置将超声波耦合到样品中，并且对于第二横向位置重复测量步骤。 总体而言，本系统和方法实现了广泛范围样品的高分辨率子表面映射，包括硅晶片。 值得注意的是，当成像晶片时，背面污染被最小化。

公开(公告)号：US08161805B2

公开(公告)日：2012-04-24

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28 ,  G01Q90/00

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定接触的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。