公开(公告)号：US10197916B2

公开(公告)日：2019-02-05

申请号：US15517806

申请日：2015-10-06

Applicant: DIC Corporation

Inventor： Takeshi Ibe ,  Naoto Yagi ,  Hisashi Tanimoto ,  Makoto Yada

IPC: G03F7/075 ,  C07F7/18 ,  C08F30/08 ,  C08F290/00 ,  C08F299/08 ,  H01L21/027 ,  C08F290/08 ,  C07F7/21 ,  C08G77/38 ,  G03F7/00 ,  G03F7/027 ,  C08G77/20 ,  C08G77/22 ,  C08G77/26

Abstract: A problem of The present invention is to provide a curable composition capable of forming a resist which can be easily washed after curing and which has high dry etching resistance and excellent precision of fine pattern transfer, also provide a resist film and a laminate each containing the curable composition, and further provide a pattern forming method using the resist film. The problem of the present invention can be solved by providing a curable composition containing a multifunctional polymerizable monomer (A) which has two or more groups having a polymerizable group and has at least one group Q having a polymerizable group represented by formula (1) below, the amount of silicon atoms in an nonvolatile content being 10 wt % or more.

公开(公告)号：US20160122578A1

公开(公告)日：2016-05-05

申请号：US14896157

申请日：2014-05-23

Applicant: DIC CORPORATION

Inventor： Junji Yamaguchi ,  Hisashi Tanimoto ,  Takeshi Ibe ,  Makoto Yada ,  Naoto Yagi

IPC: C09D141/00 ,  C09D133/08 ,  C09D4/00 ,  C09D133/14

CPC classification number: C09D141/00 ,  C08F222/1006 ,  C08L2312/00 ,  C09D4/00 ,  C09D133/08 ,  C09D133/14 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/033 ,  Y10T428/24802

Abstract: There is provided a curable composition for imprinting containing a polymerizable compound, in which (a) the concentration of a polymerizable group in the polymerizable compound is in the range of 4.3 mmol/g to 7.5 mmol/g, (b) a polymerizable compound X whose Ohnishi parameter is 3.5 or less and ring parameter is 0.35 or greater is contained in the range of 40% by mass to 95% by mass with respect to all the polymerizable compounds, (c) a polymerizable compound C having three or more polymerizable groups is further contained in the range of 5% by mass to 20% by mass with respect to all the polymerizable compounds, and (d) the viscosity of the composition being at 25° C. and in a state of not containing a solvent is in the range of 3 mPa·s to 8,000 mPa·s.

Abstract translation: 提供了含有可聚合化合物的可印刷的可固化组合物，其中（a）可聚合化合物中的可聚合基团的浓度在4.3mmol / g至7.5mmol / g的范围内，（b）可聚合化合物X 相对于所有聚合性化合物，其Ohnishi参数为3.5以下，环参数为0.35以上，为40质量％〜95质量％的范围，（c）具有3个以上聚合性基团的聚合性化合物C 相对于所有可聚合化合物，其含量为5质量％〜20质量％，（d）组合物的粘度为25℃，不含溶剂的状态为 范围为3 mPa·s至8,000 mPa·s。

公开(公告)号：US10295901B2

公开(公告)日：2019-05-21

申请号：US14896157

申请日：2014-05-23

Applicant: DIC Corporation

Inventor： Junji Yamaguchi ,  Hisashi Tanimoto ,  Takeshi Ibe ,  Makoto Yada ,  Naoto Yagi

IPC: G03F7/00 ,  C09D4/00 ,  G03F7/027 ,  G03F7/033 ,  C09D133/08 ,  C09D133/14 ,  C09D141/00 ,  C08F222/10

Abstract: There is provided a curable composition for imprinting containing a polymerizable compound, in which (a) the concentration of a polymerizable group in the polymerizable compound is in the range of 4.3 mmol/g to 7.5 mmol/g, (b) a polymerizable compound X whose Ohnishi parameter is 3.5 or less and ring parameter is 0.35 or greater is contained in the range of 40% by mass to 95% by mass with respect to all the polymerizable compounds, (c) a polymerizable compound C having three or more polymerizable groups is further contained in the range of 5% by mass to 20% by mass with respect to all the polymerizable compounds, and (d) the viscosity of the composition being at 25° C. and in a state of not containing a solvent is in the range of 3 mPa·s to 8,000 mPa·s.