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公开(公告)号：US07653095B2
公开(公告)日：2010-01-26
申请号：US11173988
申请日：2005-06-30
IPC分类号： H01S3/10
CPC分类号： G03F7/70575 , G03F7/70025 , H01S3/005 , H01S3/08036 , H01S3/106 , H01S3/137 , H01S3/225
摘要： In a first aspect, a lithography apparatus may comprise a mask designed using optical proximity correction (OPC), a pulsed laser source, and an active bandwidth control system configured to increase the bandwidth of a subsequent pulse in response to a measured pulse bandwidth that is below a predetermined bandwidth range and increase a bandwidth of a subsequent pulse in response to a measured pulse bandwidth that is above the predetermined bandwidth range. In another aspect an active bandwidth control system may include an optic for altering a wavefront of a laser beam in a laser cavity of the laser source to selectively adjust an output laser bandwidth in response to the control signal. In yet another aspect, the bandwidth of a laser having a wavelength variation across an aperture may be actively controlled by an aperture blocking element that is moveable to adjust a size of the aperture.
摘要翻译： 在第一方面，光刻设备可以包括使用光学邻近校正（OPC），脉冲激光源和有源带宽控制系统设计的掩模，该有源带宽控制系统被配置为响应于测量的脉冲带宽来增加后续脉冲的带宽， 低于预定带宽范围，并且响应于高于预定带宽范围的测量脉冲带宽增加随后脉冲的带宽。 在另一方面，有源带宽控制系统可以包括用于改变激光源的激光腔中的激光束的波前的光学器件，用于响应于控制信号选择性地调节输出激光器带宽。 在另一方面，具有穿过孔的波长变化的激光器的带宽可以由可移动以调节孔径的孔径阻挡元件主动地控制。
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公开(公告)号：US5519493A
公开(公告)日：1996-05-21
申请号：US219964
申请日：1994-03-30
申请人： Daniel J. Reiley
发明人： Daniel J. Reiley
CPC分类号： G01J4/04
摘要： A polarimeter with a polarization state generator and a polarization state analyzer mounted together on a single rotary mount. This novel structure allows built-in alignment and synchronization of the polarization state analyzer and the polarization state generator. Because of this built-in alignment and synchronization, polarization properties of samples can be measured quickly, accurately, inexpensively, and reliably. The instrument can measure polarization properties of remote samples, without placing the sample inside the instrument. The surrounding lenses and mirrors are designed in such a way that light leaving the instrument will pass through the polarization state generator and light returning into the instrument will pass through the polarization state analyzer and onto a photodetector. Samples can be measured directly in reflection or in small-angle backscatter; or they can be measured in double-pass transmission with the addition of a mirror or retroreflector.
摘要翻译： 具有极化状态发生器和偏振状态分析仪的偏振计安装在单个旋转底座上。 这种新颖的结构允许偏振状态分析仪和偏振状态发生器的内置对准和同步。 由于这种内置的对准和同步，可以快速，准确，低成本，可靠地测量样品的极化特性。 仪器可以测量远程样品的极化特性，而不会将样品置于仪器内部。 周围的镜头和镜子被设计成使得离开仪器的光将通过偏振状态发生器，并且返回到仪器中的光将通过偏振状态分析器并到达光电检测器。 样品可以直接在反射或小角度后向散射中测量; 或者可以通过添加反射镜或后向反射器在双通传输中测量。
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公开(公告)号：US08259764B2
公开(公告)日：2012-09-04
申请号：US11472088
申请日：2006-06-21
IPC分类号： H01S3/136
CPC分类号： H01S3/225 , H01S3/03 , H01S3/034 , H01S3/08009 , H01S3/137 , H01S3/2256
摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
摘要翻译： 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。
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公开(公告)号：US07564888B2
公开(公告)日：2009-07-21
申请号：US11805583
申请日：2007-05-23
申请人： Alexander I. Ershov , James J. Ferrell , Thomas Hofmann , Daniel J. Reiley , Christopher R. Remen , Richard L. Sandstrom
发明人： Alexander I. Ershov , James J. Ferrell , Thomas Hofmann , Daniel J. Reiley , Christopher R. Remen , Richard L. Sandstrom
CPC分类号： H01S3/225 , H01S3/0057 , H01S3/03 , H01S3/034
摘要： An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may comprise: an optical delay path mirror, an optical delay path mirror gas purging assembly which may comprise: a purging gas supply system directing purging gas across a face of the optical delay line mirror. The optical delay path mirror may comprise a plurality of optical delay path mirrors; the purging gas supply system may direct purging gas across a face of each of the plurality of optical delay line mirrors. The purging gas supply system may comprise: a purging gas supply line; a purging gas distributing and directing mechanism which may direct purging gas across the face of the respective optical delay path mirror.
摘要翻译： 公开了一种装置和方法，其可以包括高功率准分子或分子氟气体放电激光DUV光源系统，其可以包括：脉冲展宽器，其可以包括：光学延迟路径反射镜，光学延迟路径镜气体清洗组件，其可以 包括：吹扫气体供应系统，其引导净化气体穿过光学延迟线反射镜的表面。 光学延迟路径镜可以包括多个光学延迟路径镜; 净化气体供应系统可以引导净化气体穿过多个光学延迟线反射镜中的每一个的表面。 净化气体供应系统可以包括：净化气体供应管线; 吹扫气体分配和引导机构，其可以将吹扫气体引导通过相应的光学延迟路径反射镜的表面。
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公开(公告)号：US20070297467A1
公开(公告)日：2007-12-27
申请号：US11472088
申请日：2006-06-21
IPC分类号： H01S3/10
CPC分类号： H01S3/225 , H01S3/03 , H01S3/034 , H01S3/08009 , H01S3/137 , H01S3/2256
摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
摘要翻译： 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。
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公开(公告)号：US06567574B1
公开(公告)日：2003-05-20
申请号：US09680648
申请日：2000-10-06
申请人： Jian Ma , Ezekiel John Joseph Kruglick , Daniel J. Reiley , Philippe Jean Marchand , Steffen Gloeckner
发明人： Jian Ma , Ezekiel John Joseph Kruglick , Daniel J. Reiley , Philippe Jean Marchand , Steffen Gloeckner
IPC分类号： G02B626
CPC分类号： G02B6/359 , G02B6/3512 , G02B6/3556 , H04Q11/0005 , H04Q2011/0024 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0043 , H04Q2011/0083
摘要： A modular three-dimensional (3D) optical switch that is scalable and that provides monitor and control of MEMS mirror arrays. A first switch module includes an array of input channels. Light beams received from the input channels are directed toward a first wavelength selective mirror. The light beams are reflected off of the first wavelength selective mirror and onto a first array of moveable micromirrors. The moveable micromirrors are adjusted so that the light beams reflect therefrom and enter a second switch module where they impinge upon a second array of moveable micromirrors. The light beams reflect off of the second array of moveable micromirrors and impinge upon a second wavelength selective mirror. The light beams reflect off of the second wavelength selective mirror and into an array of output channels. The alignment or misalignment of a data path through the switch is detected by directing two monitor beams through the data path, one in the forward direction and one in the reverse direction. The position of each of the monitor beams is detected after its reflection from the second moveable micromirror that it hits. The position data is used to determine the angles of the moveable micromirrors in the data path.
摘要翻译： 模块化三维（3D）光学开关，可扩展，并提供MEMS反射镜阵列的监视和控制。 第一开关模块包括输入通道阵列。 从输入通道接收的光束被引向第一波长选择镜。 光束从第一波长选择镜反射到第一阵列的可移动微镜上。 调整可移动的微镜，使得光束从其反射并进入第二开关模块，在该第二开关模块中它们撞击到可移动微镜的第二阵列上。 光束反射离开第二阵列的可移动微镜并撞击在第二波长选择镜上。 光束反射离开第二波长选择镜并进入输出通道阵列。 通过将两个监视器光束通过数据路径，一个在正向方向和一个反向方向上来检测通过开关的数据路径的对准或未对准。 每个监视器光束的位置在其从其所击中的第二可移动微镜的反射之后被检测。 位置数据用于确定数据路径中的可移动微镜的角度。
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