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公开(公告)号：US20240342749A1
公开(公告)日：2024-10-17
申请号：US18383486
申请日：2023-10-25
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： Ming-Hung Tsai , Chi-Wei Lin
CPC classification number: B05C21/005 , G03F1/38 , G03F1/80
Abstract: A mask includes a first surface and a second surface opposite to the first surface, and has a total etching area and clearance areas. The mask has vias in the total etching area, and each via communicates the first surface with the second surface. The clearance areas are arranged in the total etching area, and the vias surround each clearance area. Each clearance area further has a through hole therein communicating the first surface with the second surface. Each clearance area is in a shape of a circle or a polygon. When each interior angle of the polygon is less than 120 degrees, the clearance area further comprises a first clearance region and a second clearance region surrounded by the first clearance region, and the mask has a plurality of etched grooves in the first clearance region. The disclosure further provides a manufacturing method of a mask.
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公开(公告)号：US20240192600A1
公开(公告)日：2024-06-13
申请号：US18198854
申请日：2023-05-18
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： Cheng-Wei Lin , Chi-Wei Lin
Abstract: A manufacturing method of a metal mask comprises: providing a metal plate having a first surface and a second surface opposite to each other, and the first surface has preset opening regions; forming a first photoresist layer on the first surface which has first apertures corresponding to the preset opening regions respectively, and each preset opening region is partially exposed to each first aperture, and an area of the first aperture is 75%-100% of an area of the preset opening region; forming a second photoresist layer on the second surface which has second apertures, and the second surface is exposed to the second apertures; forming first etching parts on the first surface and corresponding to the first apertures respectively, and each first etching part has a first opening located in each preset opening region; forming second etching parts on the second surface and corresponding to the second apertures respectively.
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公开(公告)号：US20240229219A9
公开(公告)日：2024-07-11
申请号：US18125137
申请日：2023-03-23
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： YunPei Yang , Chi-Wei Lin
CPC classification number: C23C14/042 , C23C14/24
Abstract: A metal mask includes: a mask body having two opposite first side edges along a first direction and two opposite second side edges along a second direction, and each of the first side edges having a first length. The mask body includes an open slot region, two first fixing regions, and two first clamping regions, where the two first fixing regions are positioned on two opposite sides of the open slot region, respectively, and each of the first clamping regions is positioned between each of the first fixing regions and each of the first side edges. A first gap is formed in each of the first side edges, the first gap has a first opening length in the first direction, and a ratio of the first opening length to the first length being between 0.2 and 0.8. The metal mask may improve the problem of wrinkles.
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公开(公告)号：US20240191335A1
公开(公告)日：2024-06-13
申请号：US18132439
申请日：2023-04-10
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： KANG-HSIANG LIU , Chi-Wei Lin
CPC classification number: C23C14/042 , C23C14/24
Abstract: A metal mask includes a metal panel, provided with an evaporation surface and a back surface opposite to each other and a plurality of through holes extending from the evaporation surface to the back surface. A size of each through hole decreases gradually from the evaporation surface towards the back surface. A first opening is formed by each through hole in the evaporation surface. The first opening includes a primary opening part and a plurality of secondary opening parts. The primary opening part is provided with two long edges opposite to each other and two short edges opposite to each other. The two short edges are connected between the two long edges, and the secondary opening parts are connected at two ends of the long edges. Each secondary opening part has a width perpendicular to the length. A method to produce the metal mask is also provided.
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Patent Agency Ranking
公开(公告)号：US20250011915A1
公开(公告)日：2025-01-09
申请号：US18416909
申请日：2024-01-19
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： KANG-HSIANG LIU , Chi-Wei Lin
Abstract: A metal mask includes a metal plate having an evaporation surface and a back surface and a plurality of through-holes. Each through-hole forms a first opening on the evaporation surface and a neck opening between the evaporation surface and the back surface. The first opening has two first long edges and two opposite first short edges. The neck opening has two second long edges and two second short edges. A ratio of a length of the second long edge to a length of the second short edge is equal to or greater than 2.5. A first angle is formed between a connecting line between the first long edge and the second long edge and the back surface, a second angle is formed between a connecting line between the adjacent first short edge and second short edge and the back surface, and the second angle is less than the first angle.
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公开(公告)号：US20240240303A1
公开(公告)日：2024-07-18
申请号：US18402784
申请日：2024-01-03
Applicant: Darwin Precisions Corporation
Inventor： CHIAO-LING HUANG , Chi-Wei Lin
CPC classification number: C23C14/042 , G03F1/38
Abstract: The invention provides a metal mask structure, a photomask for preparing a shielding layer, and a method for preparing a metal mask structure by using a photomask. The metal mask structure includes a plate, and the plate at least includes: a pattern area formed with at least one slot; a non-pattern area arranged on one side of the pattern area; and a cutting groove extending along an extending direction between the pattern area and the non-pattern area. The cutting groove has an opening formed on a first surface of the plate, and an inner groove surface concave with respect to the first surface. The plate further includes at least one rib structure extending along the extending direction formed on the inner groove surface, and the at least one rib structure does not protrude from the opening.
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公开(公告)号：US20240240301A1
公开(公告)日：2024-07-18
申请号：US18221909
申请日：2023-07-14
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： Chi-Wei LIN , Chi-Wei Lin
CPC classification number: C23C14/042 , C23C14/24
Abstract: A metal mask includes a metal body and a plurality of through-holes. The metal body has a first surface and a second surface, and the plurality of through-holes penetrate the metal body and respectively have openings on the first surface and the second surface, where each of the through-holes has a first opening, a second opening, and a third opening. The first opening is formed on the first surface; the second opening is formed on the second surface and is smaller than the first opening; the third opening is located within the through-hole and between the first opening and the second opening, and the third opening is smaller than the second opening. Each of the through-holes further has a first length and a second length, and the first length is greater than the second length.
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公开(公告)号：US12024780B2
公开(公告)日：2024-07-02
申请号：US17524076
申请日：2021-11-11
Applicant: Darwin Precisions Corporation
Inventor： Chi-Wei Lin , Wen-Yi Lin
IPC: C23F1/00 , C23C14/02 , C23F1/02 , C23F1/04 , C23F1/14 , C23F1/16 , C25F3/16 , G01N21/57 , G03F1/60 , C23C14/04
CPC classification number: C23F1/00 , C23C14/028 , C23F1/02 , C23F1/04 , C23F1/14 , C23F1/16 , C25F3/16 , G01N21/57 , G03F1/60 , C23C14/042
Abstract: A method of preparing a metal mask substrate includes providing a metal substrate. Next, a gloss is measured and obtained from the surface of the metal substrate. Next, the gloss is determined whether to be within a predetermined range. When the gloss is determined within the predetermined range, a photolithography process is performed to the metal substrate, where the predetermined range is between 90 GU and 400 GU.
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公开(公告)号：US20240133018A1
公开(公告)日：2024-04-25
申请号：US18125137
申请日：2023-03-22
Applicant: DARWIN PRECISIONS CORPORATION
Inventor： YunPei Yang , Chi-Wei Lin
CPC classification number: C23C14/042 , C23C14/24
Abstract: A metal mask includes: a mask body having two opposite first side edges along a first direction and two opposite second side edges along a second direction, and each of the first side edges having a first length. The mask body includes an open slot region, two first fixing regions, and two first clamping regions, where the two first fixing regions are positioned on two opposite sides of the open slot region, respectively, and each of the first clamping regions is positioned between each of the first fixing regions and each of the first side edges. A first gap is formed in each of the first side edges, the first gap has a first opening length in the first direction, and a ratio of the first opening length to the first length being between 0.2 and 0.8. The metal mask may improve the problem of wrinkles.
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