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公开(公告)号：US20090181532A1
公开(公告)日：2009-07-16
申请号：US11971996
申请日：2008-01-10
申请人： David P. Colon , Bradley P. Jones , Ramona Kei , Raymond G. Knauss , Richard P. Volant , Yun-Yu Wang
发明人： David P. Colon , Bradley P. Jones , Ramona Kei , Raymond G. Knauss , Richard P. Volant , Yun-Yu Wang
IPC分类号： H01L21/44
CPC分类号： H01L24/03 , H01L2224/05073 , H01L2224/05093 , H01L2224/05166 , H01L2224/05187 , H01L2224/05624 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01073 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/00014
摘要： An interconnect structure having an incomplete via opening is processed to deepen a via opening and to expose a metal line. In case the interconnect structure comprises a metal pad or a blanket metal layer, the metal pad or the metal layer is removed selective to an underlying dielectric layer to expose the incomplete via opening. Another dielectric layer is formed within the incomplete via opening to compensated for differences in the total dielectric thickness above the metal line relative to an optimal dielectric stack. A photoresist is applied thereupon and patterned. An anisotropic etch process for formation of a normal via opening may be employed with no or minimal modification to form a proper via opening and to expose the metal line. A metal pad is formed upon the metal line so that electrical contact is provided between the metal pad and the metal line.
摘要翻译： 处理具有不完全通孔的互连结构以加深通孔开口并露出金属线。 在互连结构包括金属焊盘或覆盖金属层的情况下，金属焊盘或金属层被选择性地移除到下面的电介质层以暴露不完全通孔。 在不完全通孔内部形成另一个介电层，以补偿相对于最佳电介质叠层的金属线上方的总电介质厚度的差异。 在其上施加光致抗蚀剂并图案化。 可以采用用于形成正常通孔的各向异性蚀刻工艺，没有或最小的修改以形成适当的通孔开口并露出金属线。 在金属线上形成金属焊盘，使得金属焊盘和金属线之间提供电接触。
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公开(公告)号：US20080319565A1
公开(公告)日：2008-12-25
申请号：US11767686
申请日：2007-06-25
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A computer program product for performing automated error checking in an automated production line, includes instructions for: receiving change information for changing a production process; comparing the change information to standard information for the production process; and reporting information from the comparing. Manufacturing execution software and a system for employing the manufacturing execution software are provided.
摘要翻译： 一种用于在自动化生产线中执行自动错误检查的计算机程序产品，包括：用于接收改变生产过程的变更信息的指令; 将变更信息与生产过程的标准信息进行比较; 并从比较报告信息。 提供制造执行软件和采用制造执行软件的系统。
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3.发明申请PROTECTING A MOLD HAVING A SUBSTANTIALLY PLANAR SURFACE PROVIDED WITH A PLURALITY OF MOLD CAVITIES 失效保护拥有大量模具CAE的大型平面表面的模具公开(公告)号：US20120207920A1
公开(公告)日：2012-08-16
申请号：US13453371
申请日：2012-04-23
IPC分类号： B28B7/34
CPC分类号： H01L24/742 , H01L24/11 , H01L24/13 , H01L2224/11003 , H01L2224/131 , H01L2924/1431 , H01L2924/15788 , H01L2924/181 , H05K3/3478 , H01L2924/014 , H01L2924/00
摘要： A method of protecting a mold having at least one substantially planar surface provided with a plurality of mold cavities includes inserting a plurality of mandrels into respective ones of the plurality of mold cavities, depositing a layer of mold protection material onto the at least one substantially planar surface and the plurality of mandrels, and removing the plurality of mandrels from the mold substrate.
摘要翻译： 一种保护模具的方法，该模具具有设置有多个模腔的至少一个基本平坦的表面，包括将多个心轴插入到多个模腔中的相应的模腔中，将一层模具保护材料沉积在至少一个基本平面 表面和多个心轴，并且从模具基板移除多个心轴。
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4.发明申请公开(公告)号：US20110079702A1
公开(公告)日：2011-04-07
申请号：US12573904
申请日：2009-10-06
CPC分类号： H01L24/742 , H01L24/11 , H01L24/13 , H01L2224/11003 , H01L2224/131 , H01L2924/1431 , H01L2924/15788 , H01L2924/181 , H05K3/3478 , H01L2924/014 , H01L2924/00
摘要： A method of forming a mold having a protective layer includes forming a mold substrate having at least one substantially planar surface, depositing a layer of mold protection material onto the at least one substantially planar surface, and etching a plurality of cavities into the at least one substantially planar surface through the mold protection layer.
摘要翻译： 一种形成具有保护层的模具的方法包括形成具有至少一个基本平坦的表面的模具基底，将一层模具保护材料沉积在所述至少一个基本平坦的表面上，以及将多个模腔蚀刻成至少一个 基本平坦的表面通过模具保护层。
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5.发明授权Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment 失效用于管理自动化制造环境中工件在线材料的移动的方法，系统和计算机程序产品公开(公告)号：US07369911B1
公开(公告)日：2008-05-06
申请号：US11621693
申请日：2007-01-10
IPC分类号： G06F19/00
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译： 提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。 系统包括与工件在制品（WIP）材料批次通信的主机系统。 该系统还包括在主机上执行的应用程序。 应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。 该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动 材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。
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6.发明授权Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment 失效用于管理自动化制造环境中工件在线材料的移动的方法，系统和计算机程序产品公开(公告)号：US07480538B2
公开(公告)日：2009-01-20
申请号：US11939792
申请日：2007-11-14
IPC分类号： G06F19/00
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译： 提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。 系统包括与工件在制品（WIP）材料批次通信的主机系统。 该系统还包括在主机上执行的应用程序。 应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。 该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动 材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。
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7.发明授权Protecting a mold having a substantially planar surface provided with a plurality of mold cavities 失效保护具有设置有多个模腔的基本平坦的表面的模具公开(公告)号：US08668834B2
公开(公告)日：2014-03-11
申请号：US13453371
申请日：2012-04-23
CPC分类号： H01L24/742 , H01L24/11 , H01L24/13 , H01L2224/11003 , H01L2224/131 , H01L2924/1431 , H01L2924/15788 , H01L2924/181 , H05K3/3478 , H01L2924/014 , H01L2924/00
摘要： A method of protecting a mold having at least one substantially planar surface provided with a plurality of mold cavities includes inserting a plurality of mandrels into respective ones of the plurality of mold cavities, depositing a layer of mold protection material onto the at least one substantially planar surface and the plurality of mandrels, and removing the plurality of mandrels from the mold substrate.
摘要翻译： 一种保护模具的方法，该模具具有设置有多个模腔的至少一个基本平坦的表面，包括将多个心轴插入到多个模腔中的相应的模腔中，将一层模具保护材料沉积在至少一个基本平面 表面和多个心轴，并且从模具基板移除多个心轴。
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公开(公告)号：US20080306797A1
公开(公告)日：2008-12-11
申请号：US11761081
申请日：2007-06-11
IPC分类号： G05B19/00
CPC分类号： G06Q10/109 , G06Q10/02 , G06Q10/06312 , G06Q10/06315 , G06Q10/06393
摘要： A method for automated resource management and optimization, the method includes: monitoring one or more of the following: resource usage, level of resource utilization, and resource amenities; receiving a request for reserving a resource; determining whether the request for the resource is granted as originally requested; wherein the determining of whether to grant the request for resources as originally requested is based one or more thresholds and conditions; wherein the one or more thresholds and conditions are based on the monitoring of at least one of the following: resource usage, the level of resource utilization; and resource amenities; and wherein if the request for reserving a resource fails to meet the one or more thresholds and conditions the request is either denied or modified.
摘要翻译： 一种自动资源管理和优化的方法，所述方法包括：监视以下一个或多个：资源使用，资源利用水平和资源设施; 接收保留资源的请求; 确定资源请求是否按原始请求被授予; 其中确定是否基于一个或多个阈值和条件基于原始请求来准许资源请求; 其中所述一个或多个阈值和条件基于以下至少一个的监视：资源使用，资源利用水平; 资源设施; 并且其中如果所述预留资源的请求不能满足所述一个或多个阈值并且所述请求被拒绝或修改。
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9.发明申请METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT 审中-公开用于管理自动化制造环境中工艺过程材料运动的方法，系统和计算机程序产品公开(公告)号：US20080167743A1
公开(公告)日：2008-07-10
申请号：US11868739
申请日：2007-10-08
IPC分类号： G06F19/00
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials (WIPs) between processing units are provided. A system includes a host system and an application executing thereon. The application implements a method that includes receiving a list of WIP lots, and indexing a list of routes with raw process time by process steps and with safe holding points. The method also includes indexing a scheduled start time of shutdown for the process units and calculating transport time for moving each of the lots to the next nearest safe holding point in the route. For each lot, the method includes determining whether the lot is at a safe holding point, and assigning a dispatch priority to the lot if it is not at the safe holding point. The method further includes sending a list of assigned dispatch priorities to a dispatcher for transporting the lots to corresponding safe holding points prior to initiating the shutdown.
摘要翻译： 提供了用于管理处理单元之间的在制品（WIP）的移动的方法，系统和计算机程序产品。 系统包括主机系统和在其上执行的应用。 应用程序实现了一种方法，包括接收WIP批次的列表，并通过流程步骤和安全的保留点对原始进程时间的路由索引进行索引。 该方法还包括为处理单元索引预定的关闭开始时间，并计算将每个批次移动到路线中的下一个最近的安全保持点的运输时间。 对于每个批次，该方法包括确定批次是否处于安全的保持点，以及如果批次不在安全保存点，则向批次分配调度优先级。 该方法还包括将发送分配优先级的列表发送到调度器，用于在开始关闭之前将批量传送到相应的安全保持点。
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10.发明申请METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT 失效用于管理自动化制造环境中工艺过程材料运动的方法，系统和计算机程序产品公开(公告)号：US20080167733A1
公开(公告)日：2008-07-10
申请号：US11939792
申请日：2007-11-14
IPC分类号： G05B13/02
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译： 提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。 系统包括与工件在制品（WIP）材料批次通信的主机系统。 该系统还包括在主机上执行的应用程序。 应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。 该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动 材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。
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