公开(公告)号：US11249057B2

公开(公告)日：2022-02-15

申请号：US17174622

申请日：2021-02-12

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  Charles Derrick Quarles, Jr. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/14 ,  G01N30/74 ,  G01N30/72 ,  G01N30/88 ,  G01N30/02 ,  G01N35/10 ,  G01N30/20 ,  G01N1/20

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US10935473B2

公开(公告)日：2021-03-02

申请号：US16271085

申请日：2019-02-08

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Charles D. Quarles, Jr. ,  Patrick Sullivan ,  Scott Smith

IPC: G01N1/38 ,  H01J49/10 ,  H01J49/04 ,  G01N30/72 ,  G01N30/04 ,  G01N30/24 ,  G01N30/06 ,  G01N30/20

Abstract: Systems and methods for speciation of chemicals of interest with inline and automatic dilution or addition of other fluids prior to or following speciation with subsequent analysis by ICP instruments are described. A system embodiment includes, but is not limited to, a first valve having a first valve configuration to receive a sample into a holding loop coupled to the first valve and a second valve configuration to transfer the sample from the holding loop; and a second valve having a first valve configuration configured to receive the sample from the first valve and direct the sample to a speciation column to separate one or more species of the sample, the second valve further including a fluid addition port configured to receive a fluid into the second valve to mix with the sample after the sample exits the speciation column.

公开(公告)号：US20200066537A1

公开(公告)日：2020-02-27

申请号：US16532408

申请日：2019-08-05

Applicant: Elemental Scientific, Inc.

Inventor： Kyle W. Uhlmeyer ,  Jae Seok Lee ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: H01L21/306 ,  G01N35/10 ,  G01N1/20

Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.

公开(公告)号：US20190285521A1

公开(公告)日：2019-09-19

申请号：US16364300

申请日：2019-03-26

Applicant: Elemental Scientific, Inc.

Inventor： Michael Paul Field ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: G01N1/38 ,  G01N30/20 ,  G01N30/34 ,  G01N30/72 ,  G01N30/00 ,  G01N35/10 ,  G01N30/04

Abstract: Systems and methods for inline and automatic dilution of chemicals of interest for speciation and subsequent analysis by ICP spectrometry are described. A system embodiment includes a first valve to receive a sample into a holding loop; a plurality of syringe pumps coupled to the first valve to deliver an inline diluted sample from the first valve; and a second valve coupled to the first valve to receive the inline diluted sample from the first valve into a sample holding loop coupled to the second valve, the second valve configured to couple to at least one of an eluent source or a carrier fluid source to receive at least one of an eluent fluid or a carrier fluid to transfer the inline diluted sample from the sample holding loop to a speciation column to separate one or more species from the inline diluted sample.

公开(公告)号：US10241013B2

公开(公告)日：2019-03-26

申请号：US15368803

申请日：2016-12-05

Applicant: Elemental Scientific, Inc.

Inventor： Paul Field ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: G01N1/38 ,  G01N30/04 ,  G01N35/10 ,  G01N30/00 ,  H01J49/10

Abstract: Systems and methods for inline and automatic dilution of chemicals of interest for speciation and subsequent analysis by ICP spectrometry are described. A system embodiment includes a first valve to receive a sample into a holding loop; a plurality of syringe pumps coupled to the first valve to deliver an inline diluted sample from the first valve; and a second valve coupled to the first valve to receive the inline diluted sample from the first valve into a sample holding loop coupled to the second valve, the second valve configured to couple to at least one of an eluent source or a carrier fluid source to receive at least one of an eluent fluid or a carrier fluid to transfer the inline diluted sample from the sample holding loop to a speciation column to separate one or more species from the inline diluted sample.

公开(公告)号：US10921295B2

公开(公告)日：2021-02-16

申请号：US16119286

申请日：2018-08-31

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  C. Derrick Quarles, Jr. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/14 ,  G01N30/74 ,  G01N30/72 ,  G01N30/88

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US20210262991A1

公开(公告)日：2021-08-26

申请号：US17174622

申请日：2021-02-12

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  Charles Derrick Quaries, JR. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/14 ,  G01N30/74 ,  G01N30/72 ,  G01N30/88

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US11710640B2

公开(公告)日：2023-07-25

申请号：US16532408

申请日：2019-08-05

Applicant: Elemental Scientific, Inc.

Inventor： Kyle W. Uhlmeyer ,  Jae Seok Lee ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: H01L21/306 ,  G01N35/10 ,  G01N1/20 ,  G01N1/10 ,  H01L21/311

CPC classification number: H01L21/30604 ,  G01N1/2035 ,  G01N35/1097 ,  G01N2001/1062 ,  G01N2001/2057 ,  H01L21/31111

Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.

公开(公告)号：US10788405B2

公开(公告)日：2020-09-29

申请号：US16364300

申请日：2019-03-26

Applicant: Elemental Scientific, Inc.

Inventor： Michael Paul Field ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: G01N1/38 ,  G01N30/04 ,  G01N35/10 ,  G01N30/00 ,  G01N30/20 ,  H01J49/10

Abstract: Systems and methods for inline and automatic dilution of chemicals of interest for speciation and subsequent analysis by ICP spectrometry are described. A system embodiment includes a first valve to receive a sample into a holding loop; a plurality of syringe pumps coupled to the first valve to deliver an inline diluted sample from the first valve; and a second valve coupled to the first valve to receive the inline diluted sample from the first valve into a sample holding loop coupled to the second valve, the second valve configured to couple to at least one of an eluent source or a carrier fluid source to receive at least one of an eluent fluid or a carrier fluid to transfer the inline diluted sample from the sample holding loop to a speciation column to separate one or more species from the inline diluted sample.

公开(公告)号：US10373838B2

公开(公告)日：2019-08-06

申请号：US15366250

申请日：2016-12-01

Applicant: Elemental Scientific, Inc.

Inventor： Kyle W. Uhlmeyer ,  Jae Seok Lee ,  Daniel R. Wiederin ,  Patrick Sullivan

IPC: G01N1/10 ,  H01L21/306 ,  G01N35/10 ,  G01N1/20 ,  H01L21/311

Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.