公开(公告)号：US20250076160A1

公开(公告)日：2025-03-06

申请号：US18816564

申请日：2024-08-27

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Brianna Dufek ,  Daniel R. Wiederin ,  Suhas Ketkar ,  Austin Schultz ,  Kyle W. Uhlmeyer ,  Beau A. Marth

IPC: G01N1/28 ,  B01F23/40

Abstract: Systems and methods are described for generating organic solvent scan solutions and calibration standards inline for semiconductor wafer analysis. A method embodiment includes, but is not limited to, drawing, via a pump system, a first organic solvent from a first organic chemical source; drawing, via the pump system, a second organic solvent from a second organic chemical source; mixing, inline, the first organic solvent and the second organic solvent to form an organic scan solution; and introducing the organic scan solution to a scan nozzle for introduction to one or more surfaces of a semiconducting wafer to remove one or more organic contaminants from the semiconducting wafer.

公开(公告)号：US11499895B2

公开(公告)日：2022-11-15

申请号：US17046567

申请日：2019-04-09

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Kyle W. Uhlmeyer ,  Austin Schultz ,  Jacob Unnerstall ,  Kevin Wiederin

IPC: G01N1/14 ,  H01J49/40

Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system, embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

公开(公告)号：US20250079198A1

公开(公告)日：2025-03-06

申请号：US18816488

申请日：2024-08-27

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Brianna Dufek ,  Daniel R. Wiederin ,  Suhas Ketkar ,  Austin Schultz ,  Kyle W. Uhlmeyer ,  Beau A. Marth

IPC: H01L21/67 ,  H01L21/02

Abstract: Systems and methods are described for systems and methods for integrated decomposition and scanning of a semiconducting wafer for organic and inorganic impurities. In an aspect, a method includes, but is not limited to, positioning a nozzle above a surface of a semiconducting wafer, the semiconducting wafer supported adjacent to or within an interior of a chamber body; introducing a first scan fluid including one or more organic fluids to an inlet port of the nozzle; directing a portion of the first scan fluid onto the surface of the semiconducting wafer to permit interaction between the scan fluid and one or more organic contaminants present on the surface of the semiconducting wafer; and removing the first scan fluid containing at least a portion of the one or more organic contaminants from the surface of the semiconducting wafer via the nozzle.

公开(公告)号：US11761860B2

公开(公告)日：2023-09-19

申请号：US17956229

申请日：2022-09-29

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Kyle W. Uhlmeyer ,  Austin Schultz ,  Jacob Unnerstall ,  Kevin Wiederin

IPC: G01N1/14 ,  H01J49/40

CPC classification number: G01N1/14 ,  H01J49/40 ,  G01N2001/1445

Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

公开(公告)号：US11249057B2

公开(公告)日：2022-02-15

申请号：US17174622

申请日：2021-02-12

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  Charles Derrick Quarles, Jr. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/14 ,  G01N30/74 ,  G01N30/72 ,  G01N30/88 ,  G01N30/02 ,  G01N35/10 ,  G01N30/20 ,  G01N1/20

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US20230087861A1

公开(公告)日：2023-03-23

申请号：US17956229

申请日：2022-09-29

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Kyle W. Uhlmeyer ,  Austin Schultz ,  Jacob Unnerstall ,  Kevin Wiederin

IPC: G01N1/14 ,  H01J49/40

Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

公开(公告)号：US20190079061A1

公开(公告)日：2019-03-14

申请号：US16119286

申请日：2018-08-31

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  C. Derrick Quarles, JR. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/72 ,  G01N30/74 ,  G01N30/14

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US11264222B2

公开(公告)日：2022-03-01

申请号：US16993832

申请日：2020-08-14

Applicant: Elemental Scientific, Inc.

Inventor： Kyle W. Uhlmeyer ,  Tyler Yost ,  Jacob Unnerstall ,  Aaron Williams

IPC: H01J49/04 ,  H01J49/10 ,  G01N1/44

Abstract: Systems and methods are described for heating sample transfer lines between a source of a sample and a detection system to detect analytes of interest in the sample, where the sample is maintained in a heated state to maintain dissolved analytes of interest in solution.

公开(公告)号：US20210262991A1

公开(公告)日：2021-08-26

申请号：US17174622

申请日：2021-02-12

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Patrick Sullivan ,  Daniel R. Wiederin ,  Brad Prucha ,  Charles Derrick Quaries, JR. ,  Jae Seok Lee

IPC: G01N30/38 ,  H01J49/10 ,  G01N30/14 ,  G01N30/74 ,  G01N30/72 ,  G01N30/88

Abstract: Systems and methods are described to provide speciation of silicon species present in a remote sample for analysis. A method embodiment includes, but is not limited to, receiving a fluid sample containing inorganic silicon in the presence of bound silicon from a remote sampling system via a fluid transfer line; transferring the fluid sample to an inline chromatographic separation system; separating the inorganic silicon from the bound silicon via the inline chromatographic separation system; transferring the separated inorganic silicon and bound silicon to a silicon detector in fluid communication with the inline chromatographic separation system; and determining an amount of one or more of the inorganic silicon or the bound silicon in the fluid sample via the silicon detector.

公开(公告)号：US20250079145A1

公开(公告)日：2025-03-06

申请号：US18816531

申请日：2024-08-27

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Brianna Dufek ,  Daniel R. Wiederin ,  Suhas Ketkar ,  Austin Schultz ,  Kyle W. Uhlmeyer ,  Beau A. Marth

IPC: H01J49/04 ,  H01J49/10 ,  H01J49/40 ,  H01J49/42

Abstract: Systems and methods are described for collecting and combining multiple scan samples from a surface of a semiconducting wafer. A system embodiment includes, but is not limited to, a scan nozzle configured to introduce a first scan solution to a surface of a semiconducting wafer to remove impurities from the surface to provide a first scan sample and retrieve the first scan sample, the scan nozzle further configured to introduce a second scan solution to the surface of the semiconducting wafer to remove residual impurities from the surface to provide a second scan sample and retrieve the second scan sample; and a collection vessel in fluid communication with the scan nozzle, the collection vessel configured to receive each of the first scan sample and the second scan sample from the nozzle and to mix the first scan sample with the second scan sample to provide a combined scan sample.