摘要:
A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.
摘要:
A large-format solid state imaging device which can detect optical images without loss of sharpness or resolution is provided and includes a solid state imaging device supported by and secured to a frame. To ensure that the imaging device does not deviate from its desired surface configuration, the device is pressed between an optical coupling plate and a support plate each having at least one matching surface whose curvature matches the other with a precision which permits the solid state imaging device to detect optical images without loss of sharpness or resolution and which conforms the imaging device into a desired configuration. Preferably, the frame is annular and the edges of the imaging device are secured to the frame by at least two spaced bonds.
摘要:
A method and apparatus are provided for CTD imaging device multiple read-out speeds with optimized operation at all of the available speeds. Image signals from a CTD imaging device are digitally sampled at a defined frequency with the read-out electronics being matched to the defined frequency for optimum operation at that frequency. Digital samples taken during both a first (reset reference) portion of each image signal and a second (image voltage) portion of each image signal are then discarded if taken during a noisy/unstable part of the image signal or accumulated and averaged if taken during a stable part of the image signal. The accumulated and averaged digital samples are then algebraically combined to produce signals representative of an image generated by the CTD imaging device. The read-out speed of the CTD imaging device is a fraction of the sampling speed and can be selected by setting an integer divisor for the defined sampling frequency. Selected ones of the samples are retained based on the selected read-out speed. For the fastest read-out speed, the number of samples taken per imaging signal is one and the divisor is equal to one. Selected slower speeds determine which samples are discarded and which samples are accumulated, averaged and combined to produce signals representative of an image generated by the CTD imaging device.