摘要:
An apparatus polishes an object material such as a film on a substrate. This apparatus includes a polishing table for holding a polishing pad having a polishing surface, a motor configured to drive the polishing table, a holding mechanism configured to hold a substrate having an object material to be polished and to press the substrate against the polishing surface, a dresser configured to dress the polishing surface, and a monitoring unit configured to monitor a removal amount of the object material. The monitoring unit is operable to calculate the removal amount of the object material using a model equation containing a variable representing an integrated value of a torque current of the motor when polishing the object material and a variable representing a cumulative operating time of the dresser.
摘要:
The present invention provides a apparatus for polishing an object material such as a film on a substrate. This apparatus includes a polishing table for holding a polishing pad having a polishing surface, a motor configured to drive the polishing table, a holding mechanism configured to hold a substrate having an object material to be polished and to press the substrate against the polishing surface, a dresser configured to dress the polishing surface, and a monitoring unit configured to monitor a removal amount of the object material. The monitoring unit is operable to calculate the removal amount of the object material using a model equation containing a variable representing an integrated value of a torque current of the motor when polishing the object material and a variable representing a cumulative operating time of the dresser.
摘要:
A process for producing a food material having a high concentration of eriocitrin, which comprises extracting a juice, a peel and a squeezed juice refuse of a citrus fruit with a polar solvent, applying the extract to a synthetic adsorption resin, and separating and recovering the food material having the high concentration of eriocitrin using an organic solvent such as hydrous alcohol. A food material having a high concentration eriocitrin as an antioxidant ingredient can industrially be produced quite efficiently without entraining an ingredient of a bitter taste, and drink and food having a high antioxidant effect can be produced.
摘要:
A gas turbine system composed of a gas turbine engine and a controller. The gas turbine engine includes an annular combustor, and a turbine driven by combustion gas from the annular combustor to rotate on a longitudinal centerline axis of the gas turbine engine. The annular combustor is comprised of an outer casing, a liner disposed in the outer casing, and a plurality of dilution air regulators introducing dilution air into the liner. The plurality of dilution air regulators are circumscribed about the longitudinal centerline axis and spaced apart at substantially equal intervals. The controller controls the plurality of dilution air regulators to individually adjust dilution air flows through the plurality of dilution air regulators into the liner.
摘要:
A gas turbine in which a centrifugal compressor which is driven by a high-pressure turbine and a variable inlet guide vane located at the inlet of the centrifugal compressor are provided, but an axial-flow compressor is not provided between the centrifugal compressor and the variable inlet guide vane, and an operating method of a gas turbine in which the output is varied by moving the variable inlet guide vane while keeping the speed of engine rotation at a high level near its rated value. It is possible to vary the output in a short period of time and durability of an engine is improve.
摘要:
A base plate is more effectively cooled, and the efficiency of cooling the base plate is further improved. In a heat exchange bulkhead 1 that includes a base plate 20 and a plurality of pin-fins 21 provided upright on the surface 20a of the base plate 20, a cooling medium 18 flows in the length direction of the base plate 20 along the surface 20a of the base plate 20, and each of the pin-fins 21 is entirely or partially inclined backward to the downstream side such that the top face thereof is located at the downstream side of the bottom face thereof.
摘要:
A preparation process is provided for preparing a novel flavonoid compound having a high level of antioxidative action. The flavonoid compound is obtained by subjecting hesperidin to microbial fermentation treatment with Aspergillus saitoi.
摘要:
A flow control valve favorably employable for sprinkler is composed of a cylindrical housing and control means comprising an upper spring, a floating cover disc, a lower spring, a floating hollow cylinder valve, and a valve seat arranged within the cylindrical housing, in which the cover disc is composed of a disc body and plural legs attached to a side face of the disc body and extending downwardly; the cylindrical housing is composed of a bottom fluid inlet, a top fluid outlet and a fluid passage and has plural guides for vertical movement of the legs of the cover disc on its inner surface; the cylinder valve is detachably placed on the valve seat and has an upper opening, a bottom cap, a flange formed in a lower portion of the valve and a side opening formed in a portion lower than the flange; the upper spring is in contact with the top outlet of the housing at its upper end and with an upper surface of the disc body of the cover disc at its lower end; the lower spring is arranged around the cylinder valve, in contact with lower ends of the plural legs of the cover disc at its upper end, and is in contact with the flange of the cylinder valve at its lower end; and the valve seat fixed to the housing in a lower portion.
摘要:
There are provided a fuel nozzle apparatus, a gas turbine, and a method of controlling a fuel nozzle apparatus, that prevent an occurrence of caulking while meeting the requirements of exhaust gas regulations. There are provided: a fuel pump that feeds fuel; a fuel flow passage formed with a circulation flow passage through which the fuel flows; a flow controller that controls a flow rate of the fuel flowing from the fuel pump into the circulation flow passage; a circulation pump that circulates the fuel within the circulation flow passage; a nozzle section formed with an injection nozzle that injects the fuel from the circulation flow passage to the outside; and an injection controller that controls an injection amount of the fuel to be injected from the injection nozzle.
摘要:
There are provided a fuel nozzle apparatus, a gas turbine, and a method of controlling a fuel nozzle apparatus, that prevent an occurrence of caulking while meeting the requirements of exhaust gas regulations. There are provided: a fuel pump that feeds fuel; a fuel flow passage formed with a circulation flow passage through which the fuel flows; a flow controller that controls a flow rate of the fuel flowing from the fuel pump into the circulation flow passage; a circulation pump that circulates the fuel within the circulation flow passage; a nozzle section formed with an injection nozzle that injects the fuel from the circulation flow passage to the outside; and an injection controller that controls an injection amount of the fuel to be injected from the injection nozzle.