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公开(公告)号：US09905393B2
公开(公告)日：2018-02-27
申请号：US15075572
申请日：2016-03-21
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/20221 , H01J2237/20285
摘要： A stage apparatus is provided including a base, a table that is movable relative to the base, a drive mechanism that moves the table, a pressing mechanism that presses the table, a position detection device that detects a location of the table, and a control device that controls the pressing mechanism. The table is moved in a predetermined moving direction relative to the base by the drive mechanism. The table is pressed by the pressing mechanism in a direction different from the moving direction. The control device, which is connected to the position detection device, controls the pressing mechanism to press the table at a stop position of the table. The control device controls the pressing mechanism based on locations of the table before and after being pressed, a correction amount indicating a difference between the locations, and a target location of the table.
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公开(公告)号：US11049687B2
公开(公告)日：2021-06-29
申请号：US16683340
申请日：2019-11-14
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Tomotaka Shibazaki , Naruo Watanabe , Hironori Ogawa , Takanori Kato , Akira Nishioka
摘要： A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.
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公开(公告)号：US10804067B2
公开(公告)日：2020-10-13
申请号：US16240898
申请日：2019-01-07
发明人： Takanori Kato , Motohiro Takahashi , Naruo Watanabe , Akira Nishioka , Masaki Mizuochi , Shuichi Nakagawa , Hironori Ogawa
IPC分类号： H01J37/244 , H01J37/04 , H01J37/304 , H01J37/30
摘要： Provided is a charged particle beam apparatus including: an XY stage on which a sample is placed; a charged particle beam source which irradiates the sample with a charged particle beam; a detector which detects charged particles emitted from the sample upon the irradiation with the charged particle beam; an image generator which generates an SEM image of the sample based on a detection signal output by the detector; and a controller configured to set control parameters based on a movement starting point and a movement ending point of the XY stage and control a driving unit for moving the XY stage according to the control parameters.
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公开(公告)号：US10658151B2
公开(公告)日：2020-05-19
申请号：US16240885
申请日：2019-01-07
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Tomotaka Shibazaki , Naruo Watanabe , Akira Nishioka , Takanori Kato , Hironori Ogawa
IPC分类号： H01J37/20 , H01J37/285 , H01J37/29
摘要： To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.
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公开(公告)号：US10586676B2
公开(公告)日：2020-03-10
申请号：US16099494
申请日：2017-06-14
IPC分类号： H01J37/00 , H01J37/147 , H01J37/20 , H01J37/22 , H01J37/28
摘要： An object of the present invention is to provide a charged particle beam device capable of correcting an image drift caused by stage deformation or the like during imaging immediately after stage movement. In order to achieve the above object, proposed is a charged particle beam device including: a sample chamber; a sample stage arranged in the sample chamber; a charged particle beam source which releases a charged particle beam; a deflector which deflects the charged particle beam released from the charged particle beam source; a focusing lens which focuses the charged particle beam; and a control device that controls the sample stage and the deflector, in which the control device calculates a deflection signal to be supplied to the deflector based on a thrust information when driving of the sample stage and a coefficient assigned for each position of the sample stage.
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公开(公告)号：US10366912B2
公开(公告)日：2019-07-30
申请号：US15902639
申请日：2018-02-22
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Naruo Watanabe , Hironori Ogawa , Takanori Kato , Akira Nishioka
IPC分类号： H01J37/20 , H01J37/26 , H01L21/687 , H01L21/68
摘要： An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.
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公开(公告)号：US10770259B2
公开(公告)日：2020-09-08
申请号：US16315700
申请日：2017-07-12
摘要： The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.
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公开(公告)号：US10600614B2
公开(公告)日：2020-03-24
申请号：US16122189
申请日：2018-09-05
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Tomotaka Shibazaki , Hironori Ogawa , Naruo Watanabe , Takanori Kato
摘要： The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table that moves a sample in a first direction, a second driving mechanism that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis that measures the position of the first table, in the second direction.
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