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公开(公告)号：US10804067B2
公开(公告)日：2020-10-13
申请号：US16240898
申请日：2019-01-07
发明人： Takanori Kato , Motohiro Takahashi , Naruo Watanabe , Akira Nishioka , Masaki Mizuochi , Shuichi Nakagawa , Hironori Ogawa
IPC分类号： H01J37/244 , H01J37/04 , H01J37/304 , H01J37/30
摘要： Provided is a charged particle beam apparatus including: an XY stage on which a sample is placed; a charged particle beam source which irradiates the sample with a charged particle beam; a detector which detects charged particles emitted from the sample upon the irradiation with the charged particle beam; an image generator which generates an SEM image of the sample based on a detection signal output by the detector; and a controller configured to set control parameters based on a movement starting point and a movement ending point of the XY stage and control a driving unit for moving the XY stage according to the control parameters.
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公开(公告)号：US10658151B2
公开(公告)日：2020-05-19
申请号：US16240885
申请日：2019-01-07
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Tomotaka Shibazaki , Naruo Watanabe , Akira Nishioka , Takanori Kato , Hironori Ogawa
IPC分类号： H01J37/20 , H01J37/285 , H01J37/29
摘要： To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.
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公开(公告)号：US09887064B2
公开(公告)日：2018-02-06
申请号：US15120919
申请日：2015-01-07
CPC分类号： H01J37/20 , H01J2237/2002 , H01J2237/20221 , H01J2237/20271 , H01J2237/20278 , H01J2237/2801 , H01J2237/2817 , H01L21/67253 , H01L21/68 , H01L21/68785 , H02K9/22 , H02K16/00 , H02K41/02
摘要： To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.
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公开(公告)号：US10770259B2
公开(公告)日：2020-09-08
申请号：US16315700
申请日：2017-07-12
摘要： The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.
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公开(公告)号：US10600614B2
公开(公告)日：2020-03-24
申请号：US16122189
申请日：2018-09-05
发明人： Motohiro Takahashi , Masaki Mizuochi , Shuichi Nakagawa , Tomotaka Shibazaki , Hironori Ogawa , Naruo Watanabe , Takanori Kato
摘要： The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table that moves a sample in a first direction, a second driving mechanism that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis that measures the position of the first table, in the second direction.
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公开(公告)号：US09627173B2
公开(公告)日：2017-04-18
申请号：US14626041
申请日：2015-02-19
CPC分类号： H01J37/20 , G01B9/02021 , G01B9/02027 , G01B15/00 , G01N23/2204 , H01J2237/20292 , H01J2237/2817
摘要： To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sample stage, a second position detection device that detects a position of the sample stage when the sample stage is positioned in a part of a stage movement range that the first position detection device is capable of detecting, and a control device that adjusts an offset amount of the first position detection device on the basis of a position detection result obtained by the second position detection device, and a charged particle beam apparatus using the stage apparatus.
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公开(公告)号：US09368320B2
公开(公告)日：2016-06-14
申请号：US14463263
申请日：2014-08-19
CPC分类号： H01J37/20 , H01J37/18 , H01J37/28 , H01J2237/2001 , H01J2237/2002 , H01J2237/202 , H01J2237/20221 , H01J2237/20278 , H01J2237/2801
摘要： The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.
摘要翻译： 本发明的目的是提供一种能够有效地抑制由驱动机构对样品产生的热的传递的阶段装置，以及使用其的带电粒子束装置。 为了达到上述目的，提出了一种舞台装置和带电粒子束装置。 舞台装置包括桌子; 驱动源，其沿预定方向驱动所述工作台; 设置在工作台和驱动源之间的第一连接构件; 第二连接构件，设置在所述工作台和所述驱动源之间并且比所述第一构件更靠近所述驱动源; 由所述第二连接构件支撑的滑动单元; 以及沿预定方向引导所述滑动单元的轨道，所述第一连接构件包括相对于所述第二连接构件具有相对低的导热性的构件。
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公开(公告)号：US09905393B2
公开(公告)日：2018-02-27
申请号：US15075572
申请日：2016-03-21
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/20221 , H01J2237/20285
摘要： A stage apparatus is provided including a base, a table that is movable relative to the base, a drive mechanism that moves the table, a pressing mechanism that presses the table, a position detection device that detects a location of the table, and a control device that controls the pressing mechanism. The table is moved in a predetermined moving direction relative to the base by the drive mechanism. The table is pressed by the pressing mechanism in a direction different from the moving direction. The control device, which is connected to the position detection device, controls the pressing mechanism to press the table at a stop position of the table. The control device controls the pressing mechanism based on locations of the table before and after being pressed, a correction amount indicating a difference between the locations, and a target location of the table.
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9.发明授权公开(公告)号：US09502208B2
公开(公告)日：2016-11-22
申请号：US14747364
申请日：2015-06-23
CPC分类号： H01J37/20 , H01J2237/20221 , H01J2237/20278
摘要： A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.
摘要翻译： 舞台系统包括保持物体的平台，通过由流过线圈的电流产生的推力而移动舞台的线性电机机构，以及控制流过线圈的电流的控制部。 在台阶保持在静止状态的状态下流过线圈的电流大于产生大于相对于导轨的台的最大静摩擦力的推力所需的最小电流量。
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公开(公告)号：US11418101B2
公开(公告)日：2022-08-16
申请号：US16600010
申请日：2019-10-11
摘要： Since wires connected to a linear motor are routed in a vacuum sample chamber, outgassing is generated from wire coating and efficiency of assembly operations is reduced. Further, there is a problem that thrust generation efficiency of the linear motor is reduced when a gap between a coil and a permanent magnet of the linear motor cannot be small. In order to solve the above problems, a linear motor for vacuum is provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.
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