Inspection method for inspecting defects of wafer surface
    1.
    发明授权
    Inspection method for inspecting defects of wafer surface 有权
    检查晶圆表面缺陷的检查方法

    公开(公告)号:US08643836B1

    公开(公告)日:2014-02-04

    申请号:US13599479

    申请日:2012-08-30

    IPC分类号: G01N21/00

    CPC分类号: G01N21/47 G01N21/9501

    摘要: The present invention provides an inspection method for inspecting defects of wafer surface. The method includes: encircling peripheral region of the wafer surface by a first light source set and a second light source set; using a control module to control the first light source set and the second light source set to irradiate the light alternately from different directions; using an image pick-up module to receive a scattered light image during each time when the first light source set or the second light source set irradiates the light on the wafer surface; and then using a process module to obtain an enhanced and clear defect image of wafer surface by processing each of the scattered light images.

    摘要翻译: 本发明提供了一种用于检查晶片表面缺陷的检查方法。 该方法包括:通过第一光源组和第二光源组环绕晶片表面的周边区域; 使用控制模块来控制第一光源组和第二光源组,以从不同方向交替地照射光; 使用图像拾取模块在第一光源组或第二光源组照射晶片表面上的光的每个时间期间接收散射光图像; 然后使用处理模块通过处理每个散射光图像来获得晶片表面的增强和清晰的缺陷图像。

    System for inspecting surface defects of a specimen and a method thereof
    2.
    发明授权
    System for inspecting surface defects of a specimen and a method thereof 有权
    用于检查试样的表面缺陷的系统及其方法

    公开(公告)号:US08643833B1

    公开(公告)日:2014-02-04

    申请号:US13600726

    申请日:2012-08-31

    IPC分类号: G01N21/00

    CPC分类号: G01N21/9501

    摘要: An inspection system and method for inspecting the surface defects of the specimen is provided. The inspection system includes a laser focus module, a microscope objective module, an image pick-up module, and a process module. The laser focus module configured to emit laser beam on the specimen by a predetermined angle relative to a surface of the specimen, and to generate scattered light and reflected light when the laser beam irradiates on the surface defects of the specimen. The process module can calculate the real size of the defects by using the intensity information obtained from the image pick-up module and the microscope objective module or using the diameter information obtained from the reflected light image while the reflected light projects on a screen.

    摘要翻译: 提供了一种用于检查样品表面缺陷的检查系统和方法。 检查系统包括激光聚焦模块,显微镜物镜模块,图像拾取模块和处理模块。 所述激光聚焦模块被配置为相对于所述检体的表面在所述试样上发射预定角度的激光束,并且当所述激光束照射在所述试样的表面缺陷上时产生散射光和反射光。 处理模块可以通过使用从图像拾取模块和显微镜物镜模块获得的强度信息或使用从反射光图像获得的直径信息来计算缺陷的实际大小,同时反射光投射在屏幕上。

    DYNAMIC STORAGE DEVICE AND DYNAMIC ACCESS MANAGEMENT METHOD

    公开(公告)号:US20210331868A1

    公开(公告)日:2021-10-28

    申请号:US16608845

    申请日:2018-10-25

    申请人: Kuo-Cheng Huang

    发明人: Kuo-Cheng Huang

    IPC分类号: B65G1/137 G06K7/10

    摘要: A dynamic storage device includes a storage area, a power carrying and moving device, a carrier group, a carrier detection device, a power transmission device, a gate, a gate detection device, a temporary storage area and a temporary storage area detection device. The storage device further includes a central control system for commanding, controlling, instructing and managing the aforementioned components and managing the information returned from each component. A Radio Frequency IDentification (RFID) technology is used to implement the dynamic storage device and the dynamic access management method. Basically, the RFID tag is labelled to the carrier instead of the object, and the targets managed by the storage device and dynamic access management method are the carrier and carrier group. Each carrier forming the carrier group records the detailed object information contained in the carrier by the RFID tag, so as to achieve the effects of managing the object, improving the space utilization of the storage device, and recording the storage locations of all objects correctly and completely by the central control system.

    Method for Measuring Propagation Loss in a Plane Light Guide Plate
    5.
    发明申请
    Method for Measuring Propagation Loss in a Plane Light Guide Plate 有权
    测量平面导光板传播损耗的方法

    公开(公告)号:US20140002811A1

    公开(公告)日:2014-01-02

    申请号:US13603033

    申请日:2012-09-04

    IPC分类号: G01N21/59

    CPC分类号: G01M11/30

    摘要: A method for measuring propagation loss in a plane light guide plate, which includes the following steps of making an input light generated by an input light generator pass through an optical coupler, an optical reflection device individually or pass through the optical coupler first and then the optical reflection device, and finally propagate toward an optical measurement device to obtain at least one optical parameter according to the optical coupler, the optical reflection device or the combination thereof; and making the input light pass through the optical coupler and then the plane light guide plate, and further pass through the plane light guide plate from one side thereof toward the optical reflection device in order to reflect the input light toward the optical measurement device, so as to obtain a propagation loss of the plane light guide plate according to the at least one optical parameter.

    摘要翻译: 一种用于测量平面导光板中的传播损耗的方法,包括以下步骤:使由输入光发生器产生的输入光通过光耦合器,光反射装置,或者首先通过光耦合器, 光反射装置,最后向光学测量装置传播,以获得根据光耦合器,光学反射装置或其组合的至少一个光学参数; 并使输入光通过光耦合器,然后通过平面导光板,并从平面导光板的一侧进一步通过平面导光板朝向光学反射装置,以将输入光反射到光学测量装置,因此 以获得根据该至少一个光学参数的平面导光板的传播损耗。

    Image inspection method by polarized compensation for deformation of lens
    6.
    发明授权
    Image inspection method by polarized compensation for deformation of lens 有权
    镜片变形偏振补偿的图像检测方法

    公开(公告)号:US07580122B2

    公开(公告)日:2009-08-25

    申请号:US11519477

    申请日:2006-09-12

    IPC分类号: G01B9/00 G01B21/00 G01J4/00

    CPC分类号: G01B11/168 G01M11/0257

    摘要: A lens inspection device and method are provided. The lens inspection method includes the steps of providing a collimating light beam, polarizing the collimating light beam by a polarizer to produce a polarized light beam, deflecting the polarized light beam by a lens to be measured to produce a deflected light beam, providing a phase retardation plate through which a polarized compensation image is generated, and comparing the polarized compensation image with a lookup table having standard color values of a plurality of standard polarization compensated images recorded therein, so as to determine whether a deformation is presented on the lens.

    摘要翻译: 提供了一种镜片检查装置和方法。 透镜检查方法包括以下步骤:提供准直光束,通过偏振器使准直光束偏振以产生偏振光束,使偏振光束被待测透镜产生偏转光束,从而提供相位 通过其产生偏振补偿图像,并将偏振补偿图像与其中记录的多个标准偏振补偿图像的标准色值的查找表进行比较,以便确定是否在透镜上呈现变形。

    Soft zoom lens system
    7.
    发明申请
    Soft zoom lens system 有权
    软变焦镜头系统

    公开(公告)号:US20070014029A1

    公开(公告)日:2007-01-18

    申请号:US11217323

    申请日:2005-09-02

    IPC分类号: G02B15/14

    CPC分类号: G02B15/02 G02B26/0875

    摘要: A soft zoom lens system includes an axially expandable or shrinkable holding portion, a supporting portion, a first lens and a second lens. This holding portion has an inner space, a first end and a second end. The supporting portion is made by a soft material. The first lens is disposed between the first end and the supporting portion. The second lens is disposed between the second end and the supporting portion. When this holding portion is applied by predetermined electricity, it will expand or to shrink axially. So, the curvatures of the first lens and the second lens will be changed. The zooming is performed. The invention's structure is simple. The adjusting of focal length is easy. The production is easy with low cost.

    摘要翻译: 软变焦透镜系统包括可轴向膨胀或收缩的保持部分,支撑部分,第一透镜和第二透镜。 该保持部具有内部空间,第一端部和第二端部。 支撑部分由软材料制成。 第一透镜设置在第一端和支撑部之间。 第二透镜设置在第二端和支撑部之间。 当该保持部分通过预定的电力施加时,其将膨胀或轴向收缩。 因此,第一透镜和第二透镜的曲率将被改变。 执行缩放。 本发明的结构简单。 调焦焦距很容易。 生产成本低廉。

    Polishing apparatus and method
    8.
    发明申请
    Polishing apparatus and method 审中-公开
    抛光设备和方法

    公开(公告)号:US20060205327A1

    公开(公告)日:2006-09-14

    申请号:US11369652

    申请日:2006-03-07

    IPC分类号: B24B7/30 B24B29/00

    CPC分类号: B24B13/01 B24B29/02

    摘要: The present invention provides a polishing apparatus and a polishing method, which are particular for the non-spherical lens. The polishing apparatus includes a base for carrying an object; and a polishing head, wherein the polishing head has a polishing layer made of a resin, a diamond and a graphite for polishing the object; a buffer layer connected to the polishing layer for the polishing head to tilt and shift; and a shaft connected to the buffer layer.

    摘要翻译: 本发明提供一种特别用于非球面透镜的抛光装置和抛光方法。 抛光装置包括用于承载物体的基座; 以及研磨头,其中所述抛光头具有由树脂制成的抛光层,用于抛光所述物体的金刚石和石墨; 连接到用于抛光头的抛光层倾斜和移位的缓冲层; 和连接到缓冲层的轴。

    Electric fan apparatus capable of blowing air in a desired orientation
    9.
    发明授权
    Electric fan apparatus capable of blowing air in a desired orientation 失效
    能够以期望的方向吹送空气的电风扇装置

    公开(公告)号:US6015262A

    公开(公告)日:2000-01-18

    申请号:US955129

    申请日:1997-10-21

    申请人: Kuo-Cheng Huang

    发明人: Kuo-Cheng Huang

    IPC分类号: F04D25/10 F01D25/00

    CPC分类号: F04D25/105 Y10T403/69

    摘要: A fan apparatus includes a housing with front and rear parts and two swivel joints, a driving motor disposed in the housing, inner and outer annular members, a transmission member, and an anchoring member. The motor has a rear portion provided with a worm section extending toward the rear part. The inner annular member is sleeved on the front part and is connected to the joints so as to swivel relative to the latter. The outer annular member is sleeved retainingly on the inner annular member and is angularly adjustable relative to the same. A swing rod has a first proximate end relative to the worm section and mounted pivotally on the rear part, and a first distal end which extends toward the front part. The transmission member is disposed in the rear part to transmit an axial rotation of the worm section to swing the first distal end of the swing rod relative to the first proximate end in a plane parallel to the worm section. The anchoring member has a second proximate end mounted pivotally on the inner annular member and a second distal end fixedly anchored on the first distal end of the swing rod to arrest movement of the second distal end, thereby driving the first proximate end as well as the rear part to swing around the swivel joints.

    摘要翻译: 风扇装置包括具有前部和后部的壳体和两个旋转接头,设置在壳体中的驱动电机,内部和外部环形构件,传动构件和锚定构件。 马达具有设置有向后部延伸的蜗杆部的后部。 内环形构件套在前部上并且连接到接头以相对于接头旋转。 外部环形构件保持套在内部环形构件上并且相对于内部环形构件成角度地可调节。 摆杆具有相对于蜗杆部分的第一近端,并且枢转地安装在后部上,第一远端朝向前部延伸。 传动构件设置在后部中以传递蜗杆部分的轴向旋转,以在与蜗杆部分平行的平面中相对于第一近端摆动摆杆的第一远端。 锚固构件具有枢转地安装在内环形构件上的第二近端,以及固定地锚定在摆杆的第一远端上的第二远端,以阻止第二远端的运动,从而驱动第一近端以及 后部围绕旋转接头摆动。

    Method for measuring propagation loss in a plane light guide plate
    10.
    发明授权
    Method for measuring propagation loss in a plane light guide plate 有权
    测量平面导光板传播损耗的方法

    公开(公告)号:US08767196B2

    公开(公告)日:2014-07-01

    申请号:US13603033

    申请日:2012-09-04

    IPC分类号: G01N21/00

    CPC分类号: G01M11/30

    摘要: A method for measuring propagation loss in a plane light guide plate, which includes the following steps of making an input light generated by an input light generator pass through an optical coupler, an optical reflection device individually or pass through the optical coupler first and then the optical reflection device, and finally propagate toward an optical measurement device to obtain at least one optical parameter according to the optical coupler, the optical reflection device or the combination thereof; and making the input light pass through the optical coupler and then the plane light guide plate, and further pass through the plane light guide plate from one side thereof toward the optical reflection device in order to reflect the input light toward the optical measurement device, so as to obtain a propagation loss of the plane light guide plate according to the at least one optical parameter.

    摘要翻译: 一种用于测量平面导光板中的传播损耗的方法,包括以下步骤:使由输入光发生器产生的输入光通过光耦合器,光反射装置,或者首先通过光耦合器, 光反射装置,最后向光学测量装置传播,以获得根据光耦合器,光学反射装置或其组合的至少一个光学参数; 并使输入光通过光耦合器,然后通过平面导光板,并从平面导光板的一侧进一步通过平面导光板朝向光学反射装置,以将输入光反射到光学测量装置,因此 以获得根据该至少一个光学参数的平面导光板的传播损耗。