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1.发明申请公开(公告)号：US20130288578A1
公开(公告)日：2013-10-31
申请号：US13459177
申请日：2012-04-28
申请人： Hui Chen , Allen L. D'Ambra , Jim K. Atkinson , Hung Chen
发明人： Hui Chen , Allen L. D'Ambra , Jim K. Atkinson , Hung Chen
CPC分类号： B24B37/107 , B24B41/068
摘要： The present invention provides methods and apparatus for a pre-CMP semiconductor substrate buffing module. The invention includes a polishing pad assembly adapted to be rotated against a major surface of a substrate; a chuck adapted to hold the substrate and to rotate the substrate against the polishing pad assembly as the polishing pad assembly is rotated; and a lateral motion motor adapted to oscillate the polishing pad assembly laterally across the major surface of the substrate while the polishing pad assembly is rotated against the rotating substrate. Numerous additional features are disclosed.
摘要翻译： 本发明提供了用于CMP前半导体衬底抛光模块的方法和装置。 本发明包括适于相对于基底的主表面旋转的抛光垫组件; 当所述抛光垫组件旋转时，卡盘适于保持所述基底并且将所述基底旋转抵靠所述抛光垫组件; 以及横向运动电动机，其适于在抛光垫组件相对于旋转衬底旋转的同时横向穿过衬底的主表面振荡抛光垫组件。 公开了许多附加特征。
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公开(公告)号：US20130283553A1
公开(公告)日：2013-10-31
申请号：US13456779
申请日：2012-04-26
CPC分类号： A46B13/001 , A46B3/005
摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush including exterior molded surfaces and a mounting passage having interior molded surfaces, the interior molded surfaces having molded foam, raised rotation-restraining features, and a mandrel including recesses directly coupled to the molded foam, raised rotation-restraining features of the scrubber brush to prevent slippage. Scrubber brushes and methods of assembly are provided, as are numerous other aspects.
摘要翻译： 在一个方面，提供了洗涤器刷组件。 洗涤器刷组件包括洗涤器刷，其包括外部模制表面和具有内部模制表面的安装通道，内部模制表面具有模制泡沫，升高的旋转抑制特征以及包括直接联接到模制泡沫的凹部的心轴， 洗涤刷的限制功能，防止滑动。 提供了洗涤刷和组装方法，以及许多其它方面。
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公开(公告)号：US20050176349A1
公开(公告)日：2005-08-11
申请号：US10988647
申请日：2004-11-15
申请人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David Lischka , Hung Chen
发明人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David Lischka , Hung Chen
CPC分类号： B24B37/345
摘要： Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.
摘要翻译： 提供了用于转移衬底的负载杯的实施例。 负载杯包括具有基板支撑件和去夹紧喷嘴的基座组件。 在将基板从抛光头转移到基板支撑件的过程中，去夹紧喷嘴定位成使流体在基板的抛光头和背面之间流动。
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4.发明授权High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods 有权高刚度，防滑洗刷器刷组件，高刚度心轴，子组件和装配方法公开(公告)号：US09119461B2
公开(公告)日：2015-09-01
申请号：US13456796
申请日：2012-04-26
申请人： Hui Chen , Hung Chen , Jim Atkinson , David D. Huo
发明人： Hui Chen , Hung Chen , Jim Atkinson , David D. Huo
CPC分类号： A46B3/005 , A46B13/001 , H01L21/02096
摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a body of open-cell foam including an interior surface, a sleeve received in contact with the scrubber brush, the sleeve including peripherally-spaced, longitudinal walls and reinforcing segments interconnecting adjacent ones of the longitudinal walls and forming elongated pockets along the length, the sleeve having raised ribs extending along the length, and a mandrel having recesses formed on an outer surface, the mandrel being coupled to the sleeve by receiving the raised ribs within the recesses. Scrubber brush subassemblies, high stiffness mandrels, and methods of assembly are provided, as are numerous other aspects.
摘要翻译： 在一个方面，提供了洗涤器刷组件。 洗涤器刷组件包括洗涤器刷，其具有包括内表面的开孔泡沫体，与洗涤器刷接触的套筒，套筒包括周向间隔开的纵向壁和将邻近的纵向壁相互连接的加强段 以及沿所述长度形成细长的袋，所述套筒具有沿所述长度延伸的凸肋，以及具有形成在外表面上的凹部的心轴，所述心轴通过容纳所述凹部内的所述凸肋而联接到所述套筒。 提供了洗涤刷组件，高刚度心轴和组装方法，以及许多其它方面。
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5.发明授权公开(公告)号：US08968055B2
公开(公告)日：2015-03-03
申请号：US13459177
申请日：2012-04-28
申请人： Hui Chen , Allen L. D'Ambra , Jim Atkinson , Hung Chen
发明人： Hui Chen , Allen L. D'Ambra , Jim Atkinson , Hung Chen
IPC分类号： B24B1/00
CPC分类号： B24B37/107 , B24B41/068
摘要： The present invention provides methods and apparatus for a pre-CMP semiconductor substrate buffing module. The invention includes a polishing pad assembly adapted to be rotated against a major surface of a substrate; a chuck adapted to hold the substrate and to rotate the substrate against the polishing pad assembly as the polishing pad assembly is rotated; and a lateral motion motor adapted to oscillate the polishing pad assembly laterally across the major surface of the substrate while the polishing pad assembly is rotated against the rotating substrate. Numerous additional features are disclosed.
摘要翻译： 本发明提供了用于CMP前半导体衬底抛光模块的方法和装置。 本发明包括适于相对于基底的主表面旋转的抛光垫组件; 当所述抛光垫组件旋转时，卡盘适于保持所述基底并且将所述基底旋转抵靠所述抛光垫组件; 以及横向运动电动机，其适于在抛光垫组件相对于旋转衬底旋转的同时横向穿过衬底的主表面振荡抛光垫组件。 公开了许多附加特征。
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6.发明申请HIGH STIFFNESS, ANTI-SLIP SCRUBBER BRUSH ASSEMBLY, HIGH-STIFFNESS MANDREL, SUBASSEMBLIES, AND ASSEMBLY METHODS 有权高刚度，防滑玻璃刷组件，高强度人造板，底座和组装方法公开(公告)号：US20130283556A1
公开(公告)日：2013-10-31
申请号：US13456796
申请日：2012-04-26
申请人： Hui Chen , Hung Chen , Jim Atkinson , David D. Huo
发明人： Hui Chen , Hung Chen , Jim Atkinson , David D. Huo
CPC分类号： A46B3/005 , A46B13/001 , H01L21/02096
摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a body of open-cell foam including an interior surface, a sleeve received in contact with the scrubber brush, the sleeve including peripherally-spaced, longitudinal walls and reinforcing segments interconnecting adjacent ones of the longitudinal walls and forming elongated pockets along the length, the sleeve having raised ribs extending along the length, and a mandrel having recesses formed on an outer surface, the mandrel being coupled to the sleeve by receiving the raised ribs within the recesses. Scrubber brush subassemblies, high stiffness mandrels, and methods of assembly are provided, as are numerous other aspects.
摘要翻译： 在一个方面，提供了洗涤器刷组件。 洗涤器刷组件包括洗涤器刷，其具有包括内表面的开孔泡沫体，与洗涤器刷接触的套筒，套筒包括周向间隔开的纵向壁和将邻近的纵向壁相互连接的加强段 以及沿所述长度形成细长的袋，所述套筒具有沿所述长度延伸的凸肋，以及具有形成在外表面上的凹部的心轴，所述心轴通过容纳所述凹部内的所述凸肋而联接到所述套筒。 提供了洗涤刷组件，高刚度心轴和组装方法，以及许多其它方面。
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公开(公告)号：US20160147526A1
公开(公告)日：2016-05-26
申请号：US14950012
申请日：2015-11-24
CPC分类号： G06F8/65 , G06F8/60 , G06F9/44505 , H04L67/34 , H04W4/50
摘要： Systems and methods for centralized client application management are provided. In an example embodiment, device data is received from a user device. The user device is identified according to an identification rule. A client state is received from the user device. A match between the client state and a specified state is determined. Based on the client state matching the specified state, an instruction to be performed on the user device is generated. The instruction is caused to be performed on the user device. The instruction causes a change to the client state stored on the user device.
摘要翻译： 提供了集中式客户端应用程序管理的系统和方法。 在示例实施例中，从用户设备接收设备数据。 根据识别规则识别用户设备。 从用户设备接收到客户端状态。 确定客户端状态和指定状态之间的匹配。 基于与指定状态匹配的客户端状态，生成在用户装置上执行的指令。 导致在用户设备上执行指令。 该指令改变存储在用户设备上的客户端状态。
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