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公开(公告)号：US4635282A
公开(公告)日：1987-01-06
申请号：US699402
申请日：1985-02-07
申请人： Ikuo Okada , Yasunao Saitoh , Hideo Yoshihara , Satoshi Nakayama
发明人： Ikuo Okada , Yasunao Saitoh , Hideo Yoshihara , Satoshi Nakayama
IPC分类号： H01J35/22 , G03F7/20 , H01L21/027 , H05G2/00 , G21K5/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70808
摘要： A gas injection type plasma X-ray source has a gas plenum for storing a discharging gas at a pressure in the range of 150 Torr and 1000 Torr, the stored gas being injected between a pair of electrodes through a gas valve. The electrodes are opposed to each other in a vacuum vessel, so that a gas jet for the production of a plasma is formed. A voltage is applied between the electrodes, so that a discharge plasma is produced between said electrodes. A linear plasma with a high temperature and a high density is produced by the pinch of the plasma due to its own magnetic field produced by the current flowing through the plasma, so that X-rays are emitted from the linear plasma. The X-ray source has a high conversion efficiency and a high discharge timing margin, and accordingly the stability and reproducibility of discharges are improved and the X-ray output is increased.
摘要翻译： 气体注入型等离子体X射线源具有用于储存在150乇和1000乇范围内的压力下的放电气体的气体增压室，所述储存气体通过气阀注入一对电极之间。 电极在真空容器中彼此相对，从而形成用于产生等离子体的气体射流。 在电极之间施加电压，使得在所述电极之间产生放电等离子体。 由于其自身通过流过等离子体的电流产生的磁场，由于等离子体的夹紧而产生具有高温和高密度的线性等离子体，从而从线性等离子体发射X射线。 X射线源具有高转换效率和高放电时间裕度，因此放电的稳定性和再现性得到改善，并且X射线输出增加。
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公开(公告)号：US4771447A
公开(公告)日：1988-09-13
申请号：US857112
申请日：1986-04-29
申请人： Yasunao Saitoh , Ikuo Okada , Hideo Yoshihara
发明人： Yasunao Saitoh , Ikuo Okada , Hideo Yoshihara
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70808
摘要： In a gas injection type plasma X-ray source, a through hole communicated with vacuum is provided in each one of a pair of plasma-forming electrodes. This leads to a decrease in the dose of charged particles, a high temperature gas, etc. reflected from the upper electrode and inflicting damage on an X-ray extraction window. Accordingly, the thickness of the X-ray extraction window can be so decreased as to raise the X-ray extraction efficiency. Besides, evacuation of a space between the electrodes can be quickened. Accordingly, X-ray emission can be effected at a high repetition frequency. When the normal line direction of the electrode is inclined relative to the direction of the X-ray extraction, the effects mentioned above are enhanced.
摘要翻译： 在气体注入型等离子体X射线源中，在一对等离子体形成电极中的每一个中设置有与真空连通的通孔。 这导致从上电极反射的带电粒子，高温气体等的剂量下降，并在X射线提取窗口上造成损伤。 因此，为了提高X射线提取效率，可以使X射线提取窗口的厚度减小。 此外，可以加快电极之间的空间的抽真空。 因此，可以以高重复频率进行X射线发射。 当电极的法线方向相对于X射线提取的方向倾斜时，上述效果增强。
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公开(公告)号：US4238706A
公开(公告)日：1980-12-09
申请号：US966621
申请日：1978-12-05
申请人： Hideo Yoshihara , Mikiho Kiuchi , Satoshi Nakayama , Toa Hayasaka , Junji Matsui
发明人： Hideo Yoshihara , Mikiho Kiuchi , Satoshi Nakayama , Toa Hayasaka , Junji Matsui
IPC分类号： H01J9/14 , H01J35/10 , H01L21/027 , H01J35/08
CPC分类号： H01J35/106
摘要： There is disclosed a soft x-ray source comprising (a) a substrate formed of a thermally conductive material, such as copper or a copper alloy, which tends to generate predominantly hard x-rays upon the collision of an electron beam, (b) an intermediate layer formed on the substrate, the intermediate layer being at least one of rhodium, silver, palladium, and molybdenum, and (c) a silicon film formed on the intermediate layer. There is also disclosed an x-ray lithographic apparatus comprising (a) an electron beam source, (b) the soft x-ray source described above, and (c) means for irradiating an object with the emitted soft x-rays. The method for manufacturing the soft x-ray source comprises (a) preparing a substrate, (b) setting the substrate in a vacuum chamber, (c) introducing a gas or vapor-containing silicon in a vacuum chamber, and (d) forming a silicon film on the intermediate layer by generating a plasma within the vacuum chamber.
摘要翻译： 公开了一种软X射线源，其包括（a）由诸如铜或铜合金的导热材料形成的基底，其在电子束的碰撞时主要产生硬的x射线，（b） 形成在所述基板上的中间层，所述中间层是铑，银，钯和钼中的至少一种，以及（c）在所述中间层上形成的硅膜。 还公开了一种x射线光刻设备，其包括（a）电子束源，（b）上述软x射线源，和（c）用于用发射的软X射线照射物体的装置。 用于制造软X射线源的方法包括（a）制备基底，（b）将基底设置在真空室中，（c）在真空室中引入气体或含蒸汽的硅，和（d）形成 通过在真空室内产生等离子体，在中间层上形成硅膜。
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公开(公告)号：US07189019B2
公开(公告)日：2007-03-13
申请号：US11149167
申请日：2005-06-10
申请人： Hideo Yoshihara
发明人： Hideo Yoshihara
IPC分类号： B41J3/39
CPC分类号： B41J29/38 , B41J29/02 , B41J29/13 , G03G21/1609 , G03G2221/18
摘要： An image forming apparatus having a housing that includes a front face, a rear wall, a pair of side walls, a bottom surface, and a top surface with a discharge surface formed therein. A cover, having a planar upper surface, is mounted on protrusions extending along each side of the top surface. The discharge surface is formed between the protrusions and has a depth proximate the rear wall that is greater than a depth proximate the front face. A cutout is formed between the cover and the front face, the cutout being in either the cover or the front face which allows discharge of the printed material. The printed material when discharged onto the discharge surface extends beyond the front face.
摘要翻译： 一种具有壳体的图像形成装置，该壳体包括前表面，后壁，一对侧壁，底表面和形成有排出表面的顶表面。 具有平坦的上表面的盖安装在沿着顶表面的每一侧延伸的突起上。 放电表面形成在突起之间并且具有靠近后壁的深度大于靠近前表面的深度。 在盖和前表面之间形成切口，切口位于盖或前表面中，从而允许印刷材料的排出。 当排出到排放表面上时，印刷材料延伸超出正面。
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5.发明授权
公开(公告)号：US5933688A
公开(公告)日：1999-08-03
申请号：US89519
申请日：1998-06-03
申请人： Tsutomu Suzuki , Hideo Yoshihara
发明人： Tsutomu Suzuki , Hideo Yoshihara
CPC分类号： G03G15/0813
摘要： A photosensitive drum 25 is rotated counterclockwise by a predetermined angle upon completion of printing. A release belt 44 is caused to rotate in the same direction by surface friction between a nip release belt 49 and a surface of the photosensitive drum 25. At this time, a pitch roller 47 provided at both ends of a developing roller 27 is rotated clockwise while guided along a roller guide hole 61 of the release belt 44, runs onto an upper plane of the nip release belt 49, and releases the developing roller 27 from the photosensitive drum 25 with a clearance which is substantially equal to the thickness of the nip release belt 49.
摘要翻译： 感光鼓25在完成打印时逆时针旋转预定的角度。 释放带44通过辊隙释放带49和感光鼓25的表面之间的表面摩擦沿同一方向旋转。此时，设置在显影辊27的两端的俯仰辊47顺时针旋转 同时沿着释放带44的滚子引导孔61引导，延伸到压区释放带49的上平面上，并且以与间隙厚度基本相等的间隙从感光鼓25释放显影辊27 释放带49。
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公开(公告)号：US20080187349A1
公开(公告)日：2008-08-07
申请号：US12078279
申请日：2008-03-28
IPC分类号： G03G21/00
CPC分类号： H05K7/20145 , G03G15/2039 , G03G15/80
摘要： A low-voltage power source circuit board is provided downstream in relation to the flow of air introduced through an intake hole and exhausted by a power source fan. Heat sinks are provided on the low-voltage power source circuit board on electronic parts that generate a large amount of heat, the plate surfaces of the heat sinks being arranged along the direction of airflow, thereby minimizing their resistance to the airflow. Air including heat generated from these electronic parts is exhausted by the power source fan without the air heating the high-voltage power source circuit board or engine circuit board that are disposed upstream in relation to the direction of airflow.
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公开(公告)号：US06767149B2
公开(公告)日：2004-07-27
申请号：US10379684
申请日：2003-03-06
申请人： Hideo Yoshihara
发明人： Hideo Yoshihara
IPC分类号： B41J2902
CPC分类号： B41J29/38 , B41J29/02 , B41J29/13 , G03G21/1609 , G03G2221/18
摘要： A laser beam printer including a front face. The front face defines an opening for allowing attaching/detaching a paper feed cassette, an opening for allowing attaching/detaching a process unit, and an opening allowing manual paper feed. Accordingly, the laser beam printer has excellent operability since it allows the user to perform any operation from its side. At the same time, valuable space at the lateral and upper sides of the laser beam printer is available for effective use.
摘要翻译： 一种包括正面的激光束打印机。 前表面限定用于允许连接/拆卸供纸盒的开口，用于允许附接/拆卸处理单元的开口，以及允许手动进纸的开口。 因此，激光束打印机具有优异的可操作性，因为它允许用户从其侧面执行任何操作。 同时，激光束打印机的横向和上侧的宝贵空间可供有效使用。
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公开(公告)号：US4984012A
公开(公告)日：1991-01-08
申请号：US260034
申请日：1988-10-20
申请人： Akihiro Sawada , Hideo Yoshihara
发明人： Akihiro Sawada , Hideo Yoshihara
CPC分类号： G03F7/0022 , G03B27/32 , G03B27/73 , G03B2227/325
摘要： In a color image copying apparatus, a light-path change-over reflector is movable into and out of a light path extending from a light source to an exposing station where a color latent image is to be formed on a photosensitive recording medium according to color image information of an original image. When the change-over reflector is disposed in the light path, the light from the light source is oriented or shifted so as to display the color image information of the original on a monitoring screen. Filters are used for color correction. When monitoring the original image on the screen, the filters are moved away from the light path. Further, the filters can be superposed together for minute color control with respect to the photosensitive sheet.
摘要翻译： 在彩色图像复印设备中，光路转换反射器可以移动到从光源延伸到根据颜色在感光记录介质上形成彩色潜像的曝光站的光路中 原始图像的图像信息。 当转换反射器设置在光路中时，来自光源的光被定向或偏移，以便在监视屏幕上显示原稿的彩色图像信息。 过滤器用于颜色校正。 当监视屏幕上的原始图像时，滤光片将从光路移开。 此外，可以将滤光片叠加在一起，以便相对于感光片进行微小的颜色控制。
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公开(公告)号：US4401054A
公开(公告)日：1983-08-30
申请号：US257616
申请日：1981-04-27
IPC分类号： C23C16/511 , H01J37/32 , H01L21/00 , C23C13/08
CPC分类号： H01L21/67069 , C23C16/511 , H01J37/32357 , Y10S505/826
摘要： A plasma deposition apparatus having a plasma formation chamber and a specimen chamber which are arranged separately. Gaseous material and microwave power are introduced to the plasma formation chamber to generate plasma by a microwave discharge through electron cyclotron resonance. The plasma is extracted to the specimen chamber from the plasma extracting orifice. In the specimen chamber, the plasma is accelerated by the effect of divergent magnetic field to irradiate the surface of the specimen so as to deposit a thin film on the specimen substrate. A high-quality thin film is formed with a high efficiency at a low temperature. Accordingly, a thin film can be deposited on a specimen substrate having a low heat resistivity. The plasma deposition apparatus is useful for manufacturing various kinds of electronic devices.
摘要翻译： 具有分别配置的等离子体形成室和试样室的等离子体沉积装置。 将气体材料和微波功率引入等离子体形成室，以通过电子回旋共振通过微波放电产生等离子体。 等离子体从等离子体提取孔提取到样品室。 在样品室中，通过发散磁场的作用加速等离子体照射样品的表面，以便在样品基底上沉积薄膜。 在低温下高效率地形成高质量的薄膜。 因此，可以在具有低热阻的试样基板上沉积薄膜。 等离子体沉积设备可用于制造各种电子设备。
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公开(公告)号：US20070147941A1
公开(公告)日：2007-06-28
申请号：US11707064
申请日：2007-02-16
申请人： Hideo Yoshihara
发明人： Hideo Yoshihara
IPC分类号： B41J29/02
CPC分类号： B41J29/38 , B41J29/02 , B41J29/13 , G03G21/1609 , G03G2221/18
摘要： An image forming apparatus having a housing that includes a front face, a rear wall, a pair of side walls, a bottom surface, and a top surface with a discharge surface formed therein. A cover, having a planar upper surface, is mounted on protrusions extending along each side of the top surface. The discharge surface is formed between the protrusions and has a depth proximate the rear wall that is greater than a depth proximate the front face. A cutout is formed between the cover and the front face, the cutout being in either the cover or the front face which allows discharge of the printed material. The printed material when discharged onto the discharge surface extends beyond the front face.
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