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公开(公告)号:US20230416078A1
公开(公告)日:2023-12-28
申请号:US18337176
申请日:2023-06-19
Applicant: Infineon Technologies AG
Inventor: Andreas Bogner , Christian Bretthauer , Abhiraj Basavanna
IPC: B81B3/00
CPC classification number: B81B3/0078 , B81B3/0021 , B81B2203/0127 , B81B2201/0242 , B81B2201/0285 , B81B2201/0235
Abstract: A semiconductor device has a deformable membrane, e.g., for the measurement of at least one of an acceleration, a vibration, or a pressure. The membrane has a supporting connection with a support structure which includes at least one elastic supporting connection. Also disclosed are a sensor device including the semiconductor device along with methods for manufacturing the semiconductor device and the sensor device.
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公开(公告)号:US11693021B2
公开(公告)日:2023-07-04
申请号:US17354412
申请日:2021-06-22
Applicant: Infineon Technologies AG
Inventor: Somu Goswami , Christian Bretthauer , Matthias Friedrich Herrmann , Gunar Lorenz , Pradyumna Mishra , Daniel Neumaier , David Tumpold
IPC: G01P15/08 , G01P15/09 , G01P15/18 , G01H11/08 , H10N30/30 , B81B3/00 , H04R17/02 , H04R1/28 , H04R1/04 , H04R7/18 , H04R17/10
CPC classification number: G01P15/0802 , G01H11/08 , G01P15/09 , G01P15/18 , H04R1/28 , H04R17/02 , H10N30/302 , H10N30/308 , B81B3/0021 , B81B2201/0235 , B81B2201/0257 , B81B2203/0127 , G01P2015/084 , H04R1/04 , H04R7/18 , H04R17/10 , H04R2201/003
Abstract: A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.
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公开(公告)号:US11691871B2
公开(公告)日:2023-07-04
申请号:US17351865
申请日:2021-06-18
Applicant: Infineon Technologies AG
Inventor: Somu Goswami , Christian Bretthauer , Matthias Friedrich Herrmann , Gunar Lorenz
CPC classification number: B81B7/008 , H04R3/002 , B81B2201/0257 , B81B2201/0285 , H04R2201/003
Abstract: A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.
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公开(公告)号:US20210242891A1
公开(公告)日:2021-08-05
申请号:US17144913
申请日:2021-01-08
Applicant: Infineon Technologies AG
Inventor: Alessandra Fusco , Christian Bretthauer
IPC: H04B1/10
Abstract: An apparatus for correcting an input signal is configured for receiving the input signal, the received input signal comprising a series of input values. The apparatus is configured for matching a series of template values to the series of input values by warping the series of template values and the series of input values relatively to each other so as to assign one or more template values to one or more input values, wherein the series of template values represents an approximation of a noise signal that is expected to be comprised in the input signal. The apparatus is configured for obtaining a series of corrected input values based on a mismatch between the input values and their respective assigned template values. The apparatus is configured for providing a corrected signal based on the series of corrected input values.
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公开(公告)号:US10926999B2
公开(公告)日:2021-02-23
申请号:US16540625
申请日:2019-08-14
Applicant: Infineon Technologies AG
Inventor: Christian Bretthauer , Alfons Dehe , Alfred Sigi
IPC: H01L41/18 , B81B3/00 , H04R19/00 , H04R17/02 , H04R19/02 , H04R19/04 , B81B7/02 , B81C1/00 , H01L41/113 , B81B7/00 , H01L41/09 , H04R7/06 , H04R31/00 , H04R7/04
Abstract: In accordance with an embodiment, a microelectromechanical transducer includes a displaceable membrane having an undulated section comprising at least one undulation trough and at least one undulation peak and a plurality of piezoelectric unit cells. At least one piezoelectric unit cell is provided in each case in at least one undulation trough and at least one undulation peak, where each piezoelectric unit cell has a piezoelectric layer and at least one electrode in electrical contact with the piezoelectric layer. The membrane may be formed as a planar component having a substantially larger extent in a first and a second spatial direction, which are orthogonal to one another, than in a third spatial direction, which is orthogonal to the first and the second spatial direction and defines an axial direction of the membrane.
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公开(公告)号:US20240323591A1
公开(公告)日:2024-09-26
申请号:US18609732
申请日:2024-03-19
Applicant: Infineon Technologies AG
Inventor: Christian Bretthauer
CPC classification number: H04R1/2811 , H04R1/025 , H04R3/04 , H04R17/00 , H04R2201/003
Abstract: A speaker device comprises a housing having an acoustic aperture, a transducer element in the housing configured to receive a first actuation signal and to generate an acoustic output signal. The speaker device comprises a shutter element in the housing configured to receive a second actuation signal and arranged laterally offset to the transducer in the housing. The shutter element is arranged in an acoustic path between the transducer element and the acoustic aperture and comprises a shutter portion movable in opposite directions in response to the second actuation signal. A controller provides the first actuation signal to the transducer element, while the first actuation signal has an ultrasonic signal component modulated with an audio signal component. The controller provides the second actuation signal to the shutter element that has half the frequency of the ultrasonic signal component.
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公开(公告)号:US20230160732A1
公开(公告)日:2023-05-25
申请号:US18065394
申请日:2022-12-13
Applicant: Infineon Technologies AG
Inventor: Martin Seidl , Christian Bretthauer , Wolfgang Klein , Ulrich Krumbein , David Tumpold
CPC classification number: G01F1/6888 , G01F1/86
Abstract: A thermoresistive micro sensor device includes a semiconductor chip; a through hole, which runs through the semiconductor chip from an upper side to a lower side; electrically conductive structures, wherein the middle section of each of the electrically conductive structures spans over the through hole at the upper side of the semiconductor chip; an electrically insulating arrangement for electrically insulating the electrically conductive structures and the semiconductor chip from each other, wherein the through hole runs through the electrically insulating arrangement; and a contact arrangement including contacts, wherein each of the contacts is electrically connected to one of the first end sections or one of the second end sections, so that electrical energy is fed to at least one of the electrically conductive structures to heat the respective electrically conductive structure, and so that an electrical resistance of one of the electrically conductive structures is measured at the contact arrangement.
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公开(公告)号:US20220402752A1
公开(公告)日:2022-12-22
申请号:US17351865
申请日:2021-06-18
Applicant: Infineon Technologies AG
Inventor: Somu Goswami , Christian Bretthauer , Matthias Friedrich Herrmann , Gunar Lorenz
Abstract: A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.
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公开(公告)号:US11530968B2
公开(公告)日:2022-12-20
申请号:US16926790
申请日:2020-07-13
Applicant: INFINEON TECHNOLOGIES AG
Inventor: Alfons Dehe , Christian Bretthauer
IPC: G01N15/06 , G01N29/032 , G01N15/02 , G01N15/00
Abstract: An apparatus for analyzing the particulate matter content of an aerosol includes an aerosol chamber configured to receive an aerosol, the particulate matter content of which should be analyzed, at least one ultrasonic generator configured to produce ultrasonic waves in the aerosol received in the aerosol chamber, an ultrasonic detector configured to detect ultrasonic waves produced by the at least one ultrasonic generator in the aerosol, and an evaluator having a data exchange communication link with the ultrasonic detector and configured to ascertain the matter content on the basis of signals output by the ultrasonic detector. The ultrasonic generator and the ultrasonic detector are positioned relative to one another such that a path length to be traversed by ultrasonic waves between the ultrasonic generator and the ultrasonic detector is less than 1 cm.
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公开(公告)号:US10766769B2
公开(公告)日:2020-09-08
申请号:US15928275
申请日:2018-03-22
Applicant: Infineon Technologies AG
Inventor: Christian Bretthauer , Dirk Meinhold
Abstract: A semiconductor element includes a processed substrate arrangement including a processed semiconductor substrate and a metallization layer arrangement on a main surface of the processed semiconductor substrate. The semiconductor element further includes a passivation layer arranged at an outer border of the processed substrate arrangement.
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