公开(公告)号：US20110047662A1

公开(公告)日：2011-02-24

申请号：US12666745

申请日：2008-06-26

申请人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna

发明人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna

IPC分类号： G01Q60/24

CPC分类号： G01Q20/04 ,  G01Q10/045 ,  G01Q10/065 ,  G01Q60/26 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/12

摘要： The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.

摘要翻译： 本发明涉及一种用于研究不同材料的表面性质的装置和方法，其使得可以以简化和更快的剪切力方法进行原子力显微镜。 根据本发明的装置的特征在于相对于样品的表面垂直定向自动致动悬臂的测量头。 压阻传感器和双压电晶片致动器优选地被直流隔离。 测量头是特别是碳纳米管的形式。 多个悬臂可以以悬臂阵列的形式布置，其特征在于单独的预弯曲悬臂的梳状布置。 根据本发明的方法通过快速反馈信号来区分，因为使用供应致动器的DC信号的变化来调节测量尖端和待研究表面之间的距离。

公开(公告)号：US08689359B2

公开(公告)日：2014-04-01

申请号：US12666745

申请日：2008-06-26

申请人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna ,  Jerzy Mielczarski ,  Yanko Sarov

发明人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna ,  Jerzy Mielczarski ,  Yanko Sarov

IPC分类号： G01Q20/04 ,  G01Q70/10 ,  G01Q60/26 ,  G01Q70/06 ,  G01Q70/12

CPC分类号： G01Q20/04 ,  G01Q10/045 ,  G01Q10/065 ,  G01Q60/26 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/12

摘要： The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.

摘要翻译： 本发明涉及一种用于研究不同材料的表面性质的装置和方法，其使得可以以简化和更快的剪切力方法进行原子力显微镜。 根据本发明的装置的特征在于相对于样品的表面垂直定向自动致动悬臂的测量头。 压阻传感器和双压电晶片致动器优选地被直流隔离。 测量头是特别是碳纳米管的形式。 多个悬臂可以以悬臂阵列的形式布置，其特征在于单独的预弯曲悬臂的梳状布置。 根据本发明的方法通过快速反馈信号来区分，因为使用供应致动器的DC信号的变化来调节测量尖端和待研究表面之间的距离。

公开(公告)号：US20100017921A1

公开(公告)日：2010-01-21

申请号：US12524936

申请日：2008-01-28

申请人： Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

发明人： Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

IPC分类号： G01Q10/00 ,  G01Q20/04

CPC分类号： H02N2/028 ,  G01Q10/04 ,  H02N2/0095

摘要： The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.

摘要翻译： 本发明涉及用于微机械定位和处理物体的装置和方法。 本发明的目的是提供一种用于微机械定位和处理物体的装置和相关方法，通过该方法可以增加扫描速度并提高位置精度，使得实时图像或视频速率图像（约。 可以实现在纳米范围内具有横向和垂直分辨率的每秒25个图像。 根据本发明，优选由硅制成的整体部件包括支撑元件，物体载体，用于传递运动的多个引导元件和元件，优选压阻驱动元件和优选的压阻位置检测器，其被整合到所述 整体成分; 所述微机械定位装置可用于例如扫描探针显微镜和纳米定位和纳米操纵技术。

公开(公告)号：US08312561B2

公开(公告)日：2012-11-13

申请号：US12524936

申请日：2008-01-28

申请人： Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

发明人： Ivo W. Rangelow ,  Stefan Klett ,  Eishad Guliyev ,  Tzvetan Ivanov ,  Burkhard Volland

IPC分类号： G01Q30/20

CPC分类号： H02N2/028 ,  G01Q10/04 ,  H02N2/0095

摘要： The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.

摘要翻译： 本发明涉及用于微机械定位和处理物体的装置和方法。 本发明的目的是提供一种用于微机械定位和处理物体的装置和相关方法，通过该方法可以增加扫描速度并提高位置精度，使得实时图像或视频速率图像（约。 可以实现在纳米范围内具有横向和垂直分辨率的每秒25个图像。 根据本发明，优选由硅制成的整体部件包括支撑元件，物体载体，用于传递运动的多个引导元件和元件，优选压阻驱动元件和优选的压阻位置检测器，其被整合到所述 整体成分; 所述微机械定位装置可用于例如扫描探针显微镜和纳米定位和纳米操纵技术。

公开(公告)号：US07126139B2

公开(公告)日：2006-10-24

申请号：US10683488

申请日：2003-10-09

申请人： Thomas Schenkel ,  Ivo W. Rangelow ,  Jan Meijer

发明人： Thomas Schenkel ,  Ivo W. Rangelow ,  Jan Meijer

IPC分类号： G02B6/26 ,  H01J37/00

CPC分类号： H01J37/3172 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J37/3174 ,  H01J2237/30438 ,  H01J2237/30488 ,  H01J2237/3171 ,  H01J2237/31737

摘要： A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.

摘要翻译： 描述了用于将单个颗粒定位在衬底表面（1a）中的位置精确植入的装置和方法。 用于将粒子束引导到衬底表面（1a）上的膜片和以pn结形式设置在其上的检测器，用于确定在颗粒撞击到衬底表面（1a）上产生的二次电子流时， 设置在安装在一侧的柔性臂（2）的自由端部上的尖端（4）上。 该设备是根据AFM方法操作的扫描设备的一部分。

公开(公告)号：US08479311B2

公开(公告)日：2013-07-02

申请号：US12747617

申请日：2008-12-10

申请人： Stefan Kubsky ,  Deirdre Olynick ,  Peter Schuck ,  Jan Meijer ,  Ivo W. Rangelow

发明人： Stefan Kubsky ,  Deirdre Olynick ,  Peter Schuck ,  Jan Meijer ,  Ivo W. Rangelow

IPC分类号： G01Q60/24

CPC分类号： G01Q60/06 ,  G01Q10/045 ,  G01Q20/04 ,  G01Q30/02

摘要： The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.

摘要翻译： 本发明涉及一种用于研究和/或修饰表面性质的原子力显微镜（AFM）装置。 该装置包括具有集成的压阻传感器的悬臂（柔性条），集成双模致动器和测量尖端。 测量头带有至少两个金属电极，可通过电气端子激活。 测量头和/或悬臂具有至少一个纳米孔，同步加速器辐射或激光通过该孔被引导到待研究的材料表面上。 此外，本发明涉及一种用于研究和改进表面性质和表面近端性质的方法，其可以使用这种装置来执行。 为此，依次执行原子力显微镜（AFM），表面增强拉曼散射（SERS），光发射光谱（XPS，XAS）和局部曝光的材料修饰，或同时使用相同的器件。

公开(公告)号：US20110055985A1

公开(公告)日：2011-03-03

申请号：US12747617

申请日：2008-12-10

申请人： Stefan Kubsky ,  Deirdre Olynick ,  Peter Schuck ,  Jan Meijer ,  Ivo W. Rangelow

发明人： Stefan Kubsky ,  Deirdre Olynick ,  Peter Schuck ,  Jan Meijer ,  Ivo W. Rangelow

IPC分类号： G01Q60/24 ,  G01J3/44 ,  G01B11/30

CPC分类号： G01Q60/06 ,  G01Q10/045 ,  G01Q20/04 ,  G01Q30/02

摘要： The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.

摘要翻译： 本发明涉及一种用于研究和/或修饰表面性质的原子力显微镜（AFM）装置。 该装置包括具有集成的压阻传感器的悬臂（柔性条），集成双模致动器和测量尖端。 测量头带有至少两个金属电极，可通过电气端子激活。 测量头和/或悬臂具有至少一个纳米孔，同步加速器辐射或激光通过该孔被引导到待研究的材料表面上。 此外，本发明涉及一种用于研究和改进表面性质和表面近端性质的方法，其可以使用这种装置来执行。 为此，依次执行原子力显微镜（AFM），表面增强拉曼散射（SERS），光发射光谱（XPS，XAS）和局部曝光的材料修饰，或同时使用相同的器件。