公开(公告)号：US20250087523A1

公开(公告)日：2025-03-13

申请号：US18824927

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Ryosuke WATANABE

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  B25J21/00 ,  H01L21/677

Abstract: Provided is a robot arranged in a housing having a front wall having a plurality of openings and a back wall facing the front wall and having an opening, the robot including: a first movable portion; a second movable portion which has a third arm and a hand; an information storage unit which stores cooperative operation-related information; a cooperative operation selection unit selects, based on a position of an access target of access by the hand and the cooperative operation-related information stored in the information storage unit, whether to cause the hand to access the access target by an cooperative operation of the third arm and the hand or to cause the hand to access the access target by an cooperative operation of the third arm, the hand, and the first movable portion; and a control unit which controls the first movable portion and the second movable portion.

公开(公告)号：US20200051846A1

公开(公告)日：2020-02-13

申请号：US16451009

申请日：2019-06-25

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Osamu KOMIYAJI ,  Hiroki SANEMASA

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687 ,  B65G47/90 ,  B25J9/00

Abstract: A transfer system includes a transfer chamber having transfer positions, a first robot provided in the transfer chamber to transfer articles between the transfer positions, a second robot provided in the transfer chamber to transfer articles between the transfer positions, and a retreat unit configured to move one robot among the first robot and the second robot to a retreat position by changing a height of the one robot such that the one robot does not interfere with an operating range of another robot among the first robot and the second robot.

公开(公告)号：US20250083332A1

公开(公告)日：2025-03-13

申请号：US18824931

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE ,  Teppei MATSUO

IPC: B25J11/00 ,  B25J9/04 ,  B25J9/16

Abstract: Provided is a robot including: a first movable portion which has a first arm having a proximal end side connected to a first base and a second arm having a proximal end side connected to a distal end side of the first arm; a second movable portion which has a second base having a proximal end side connected to a distal end side of the second arm, a third arm having a proximal end side connected to a distal end side of the second base, and a hand having a proximal end side connected to a distal end side of the third arm and holding a wafer; and a control unit, and a width, in a direction perpendicular to the vertical plane, of a trajectory of the first movable portion falls within a width, in the direction perpendicular to the vertical plane, of a trajectory of the wafer.

公开(公告)号：US20240383157A1

公开(公告)日：2024-11-21

申请号：US18647509

申请日：2024-04-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Makoto TARUNO ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J15/06 ,  B25J11/00 ,  B25J13/08 ,  B25J15/00

Abstract: A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.

公开(公告)号：US20250011106A1

公开(公告)日：2025-01-09

申请号：US18762654

申请日：2024-07-03

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Ryosuke WATANABE ,  Norihisa IWASAKI ,  Go YAMAGUCHI

IPC: B65G47/90 ,  B25J9/10 ,  B25J9/12 ,  B25J18/00

Abstract: A robot includes: an articulated arm and a plurality of motors. The articulated arm includes a plurality of links connected by a plurality of joints. The plurality of links include: a hand configured to support the electronic substrate; a base; and one or more arm links connecting the hand to the base. The plurality of motors are configured to drive the plurality of joints respectively around rotational axes each of which is along a vertical orientation orthogonal to the electronic substrate supported by the hand, to change a position and a posture of the hand with respect to the base while the hand supporting the electronic substrate. Each of the plurality of motors is a direct drive motor and is disposed at a corresponding joint of the plurality of joints.

公开(公告)号：US20240278433A1

公开(公告)日：2024-08-22

申请号：US18440146

申请日：2024-02-13

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J9/16

CPC classification number: B25J9/1692

Abstract: A robot system includes a robot that supports and transfers a substrate W using a hand, a target capable of being placed instead of the substrate, a sensor provided on the hand to detect the target in a non-contact manner while facing the target a first detector that detects a position of the target in the first direction based on a detection result of the sensor facing the target long the first direction and a position of the sensor, and a second detector that controls the robot to move the sensor along a second direction perpendicular to the first direction, and detects a position of the target in the second direction based on a change in the detection result of the sensor due to movement along the second direction and the position of the sensor.

公开(公告)号：US20240178043A1

公开(公告)日：2024-05-30

申请号：US18510341

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Koji NAGAFUCHI ,  Takashi MINAMI

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/02 ,  H01L21/68

Abstract: A substrate transfer robot system teaches a transfer position of a substrate to a substrate transfer robot that transfers the substrate. The substrate transfer robot includes: a hand that transfers the substrate; a movement mechanism that moves the hand in horizontal and vertical directions; and first and second sensors that are provided on the hand and radiates a scanning line in the horizontal and vertical directions, respectively. The substrate transfer robot system includes: a controller that controls the hand and the movement mechanism; and a first portion to be detected and a second portion to be detected. The controller operates the hand to detect the first portion by the first and second sensors and detect the second portion by the second sensor, and calculates and stores the transfer position based on position information of the hand when the first and second portions are detected.

公开(公告)号：US20250087522A1

公开(公告)日：2025-03-13

申请号：US18824918

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  B25J21/00 ,  H01L21/677

Abstract: Provided is a robot arranged in a housing, the robot including: a first movable portion; a second movable portion having a hand holding a wafer; and a control unit which controls the first movable portion and the second movable portion so as to convey the wafer in a state where the wafer held by the hand is located inside an operation region defined in a space between a front wall and a back wall so as not to overlap an open/close region for a cassette opener, which is provided at a position corresponding to an opening of the front wall, to open and close a cassette, and to cause the hand to access the opening of the front wall in a state where the hand is parallel to a horizontal plane.

公开(公告)号：US20250083303A1

公开(公告)日：2025-03-13

申请号：US18824911

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE ,  Teppei MATSUO

IPC: B25J9/04 ,  B25J9/16 ,  B25J11/00 ,  B25J13/08

Abstract: Provided is a system including: a housing having a front wall including a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall; and a robot arranged in the housing, in which the robot has a first base, a first movable portion, a second movable portion having a hand holding the wafer, and a control unit which controls the first movable portion and the second movable portion, and the plurality of openings are positioned in a maximum accessible region of the hand determined based on a position where the robot is arranged in the housing, a length of the first movable portion in a state where the first movable portion is maximally extended, and a length of the second movable portion in a state where the second movable portion is maximally extended.

公开(公告)号：US20170294334A1

公开(公告)日：2017-10-12

申请号：US15479215

申请日：2017-04-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Daisuke SHIN ,  Hisaya INOUE ,  Ryosuke WATANABE

IPC: H01L21/687 ,  H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/67715 ,  H01L21/6773 ,  H01L21/67766

Abstract: A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.