END EFFECTOR AND ROBOT
    2.
    发明申请
    END EFFECTOR AND ROBOT 审中-公开
    终端效应器和机器人

    公开(公告)号:US20140125080A1

    公开(公告)日:2014-05-08

    申请号:US14148732

    申请日:2014-01-07

    Abstract: An end effector includes a holding unit that holds a screw member to be rotatable around the axis line of the screw member, and a rotary unit that is provided on the axis line, moves linearly along the axis line in a condition of being in contact with the head portion of the screw member held by the holding unit, and rotates the screw member around the axis line by rotation accompanying the linear motion.

    Abstract translation: 端部执行器包括保持单元,该保持单元保持可围绕螺钉构件的轴线旋转的螺钉构件,并且设置在轴线上的旋转单元在与轴线接触的状态下沿着轴线线性移动 螺钉构件的头部由保持单元保持,并且通过伴随线性运动的旋转使螺纹构件绕轴线旋转。

    FORCE SENSOR AND ROBOT
    4.
    发明申请
    FORCE SENSOR AND ROBOT 审中-公开
    力传感器和机器人

    公开(公告)号:US20140174239A1

    公开(公告)日:2014-06-26

    申请号:US14193369

    申请日:2014-02-28

    Abstract: A force sensor and a robot that can suppress a load applied to load sensor elements are provided.A force sensor includes: a first base member one surface of which is fixed on a fixed member; a plurality of load sensor elements that is provided on another surface of the first base member to detect a load; a second base member that is disposed facing the other surface of the first base member to generate a preload to be applied to each of the load sensor elements toward the first base member; a preload adjusting unit that adjusts the magnitude of the preload generated by the second base member; and buffer bodies that receive a part of an external load to be applied to each of the load sensor elements from the outside.

    Abstract translation: 提供能够抑制施加到负载传感器元件的负载的力传感器和机器人。 力传感器包括:一个第一基体,其一个表面固定在固定构件上; 多个负载传感器元件,设置在所述第一基座部件的另一个表面上以检测负载; 第二基座构件,其面对所述第一基座构件的另一表面设置,以产生将被施加到每个所述负载传感器元件的预载荷朝向所述第一基座构件; 预压调节单元,其调节由所述第二基座构件产生的所述预载荷的大小; 以及从外部接收要施加到每个负载传感器元件的外部负载的一部分的缓冲体。

    THETA Z DRIVE APPARATUS AND STAGE APPARATUS
    5.
    发明申请
    THETA Z DRIVE APPARATUS AND STAGE APPARATUS 审中-公开
    THETA Z驱动装置和舞台装置

    公开(公告)号:US20130033123A1

    公开(公告)日:2013-02-07

    申请号:US13645796

    申请日:2012-10-05

    CPC classification number: G03F7/70758

    Abstract: In this θZ drive apparatus, at least three coil portions are arranged to be capable of driving a stage in a direction Z, a direction θx which is a rotation direction employing a direction X in a horizontal plane as a center line of rotation, and a direction θy which is a rotation direction employing a direction Y in the horizontal plane orthogonal to the direction X as a center line of rotation.

    Abstract translation: 在该驱动装置中,至少三个线圈部分被布置成能够沿Z方向驱动舞台; x是以水平面中的方向X作为中心线的旋转方向的x 旋转方向和y方向,y是在与X方向垂直的水平面中的方向Y作为旋转中心线的旋转方向。

    LEVITATING TRANSPORT SYSTEM
    7.
    发明公开

    公开(公告)号:US20230400057A1

    公开(公告)日:2023-12-14

    申请号:US18331939

    申请日:2023-06-09

    CPC classification number: F16C32/0451 B25J19/00 B25J11/0095 F16C2326/58

    Abstract: A transport system include: a workpiece holder configured to hold a workpiece; a moving body facing the workpiece holder at least in a gravity direction and movable in a movement direction intersecting the gravity direction; a weight reducer configured to apply a static non-contact force to the workpiece holder to reduce a weight of the workpiece holder; a force generator disposed on the moving body to face the workpiece holder in the gravity direction, the force generator configured to apply a controllable non-contact force to the workpiece holder so as to follow a movement of the moving body while levitating the workpiece holder having the reduced weight; and circuitry configured to control the controllable non-contact force generated by the force generator to control a relative position of the workpiece holder with respect to the moving body.

    SUBSTRATE TRANSPORT SYSTEM
    8.
    发明公开

    公开(公告)号:US20230312271A1

    公开(公告)日:2023-10-05

    申请号:US18331179

    申请日:2023-06-08

    CPC classification number: B65G54/02 B65G47/904

    Abstract: A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move along the transport line; a second moving body configured to support the substrate; and a non-contact force generator configured to apply a non-contact force to the second moving body from the first moving body to cause the second moving body to follow movement of the first moving body while levitating, by the non-contact force, the second moving body with respect to the first moving body.

    MOTOR DRIVE SYSTEM, MOTOR CONTROL APPARATUS AND MOTOR CONTROL METHOD
    9.
    发明申请
    MOTOR DRIVE SYSTEM, MOTOR CONTROL APPARATUS AND MOTOR CONTROL METHOD 审中-公开
    电机驱动系统,电动机控制装置和电动机控制方法

    公开(公告)号:US20160156297A1

    公开(公告)日:2016-06-02

    申请号:US15014020

    申请日:2016-02-03

    Abstract: A motor control apparatus according to an embodiment includes a torque current controller, an excitation current controller, and an estimation unit. The torque current controller that performs torque current control on a motor based on a deviation between a feedback signal based on a detection result of a sensor that can detect torque or acceleration of the motor and a torque current reference. The excitation current controller that performs excitation current control on the motor based on an excitation current reference on which a high-frequency current reference is superimposed. The estimation unit that estimates at least one of a position and a velocity of the motor based on the deviation and the high-frequency current reference.

    Abstract translation: 根据实施例的电动机控制装置包括转矩电流控制器,励磁电流控制器和估计单元。 扭矩电流控制器,其基于可以检测电动机的转矩或加速度的传感器的检测结果的反馈信号与转矩电流基准之间的差异,对电动机进行转矩电流控制。 励磁电流控制器,其基于叠加了高频电流基准的励磁电流基准对电动机进行励磁电流控制。 估计单元,基于偏差和高频电流基准来估计电动机的位置和速度中的至少一个。

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