Method of cleaning substrates
    4.
    发明授权
    Method of cleaning substrates 失效
    清洗基材的方法

    公开(公告)号:US5601655A

    公开(公告)日:1997-02-11

    申请号:US388076

    申请日:1995-02-14

    IPC分类号: B08B3/12 B08B3/00 B08B3/04

    CPC分类号: B08B3/123 Y10S134/902

    摘要: Method for cleaning substrates, particularly a method for removing soluble contaminants and particulate materials from the substrate surface. According to the method, a substrate is inverted and moved horizontally, while flowing cleaning fluid inclinedly upwardly towards the substrate and oppositely to the moving of the substrate; accoustically vibrating the cleaning fluid and, elevating the flowing cleaning fluid at a point adjacent the substrate surface, such that that the flowing cleaning fluid contacts the substrate surface and forms leading edge and trailing edge menisci between the flowing cleaning fluid and the moving substrate.

    摘要翻译: 清洁基材的方法,特别是从基材表面除去可溶性污染物和颗粒材料的方法。 根据该方法,将衬底倒置并水平移动,同时使清洁流体向衬底倾斜向上移动并与衬底的移动相反; 使清洁流体振动,并使流动的清洁流体在与基底表面相邻的位置升高,使得流动的清洁流体接触基底表面并在流动的清洁流体和移动的基底之间形成前缘和后缘半月形。

    Method for uniform film coating of substrates
    5.
    发明授权
    Method for uniform film coating of substrates 失效
    基材均匀涂膜方法

    公开(公告)号:US5695833A

    公开(公告)日:1997-12-09

    申请号:US662160

    申请日:1996-06-12

    IPC分类号: B05C9/02 B06B1/20

    CPC分类号: B05C9/02 B06B1/20

    摘要: Method and apparatus for applying thin films of coating material with a high degree of uniformity, high utilization of coating fluid and superior adhesion characteristics are disclosed. According to the method, an inverted substrate is moved horizontally and countercurrent to a two stage coating fluid applicator assembly. The first coating stage utilizes megasonic pressure waves directed inclinedly upwardly through the coating fluid/substrate surface interface to wet, clean, degas and deposit coating fluid on the substrate surface. A second stage removes excess coating fluid at the substrate's trailing edge so as to precisely establish a thin and uniform coating film. After the coating has been applied, spinning of the substrate may be employed to enable further coating film uniformity and to increase the film's drying rate.

    摘要翻译: 公开了涂敷液均匀性高,涂布液利用率高,附着力特性优异的涂料薄膜的方法和装置。 根据该方法,反转的基板​​水平移动并与两级涂布流体涂布器组件逆流。 第一涂层阶段使用超声波压力波,其倾斜向上穿过涂覆流体/基底表面界面,以在基底表面上湿,清洁,脱气和沉积涂层流体。 第二阶段在基片的后缘去除多余的涂层液体,以便精确地建立薄且均匀的涂膜。 涂布后,可以使用基材的纺丝,以进一步提高涂膜的均匀性并提高膜的干燥速度。

    Method of conformal coating
    6.
    发明授权
    Method of conformal coating 失效
    保形涂层方法

    公开(公告)号:US5017409A

    公开(公告)日:1991-05-21

    申请号:US205889

    申请日:1988-06-13

    申请人: Hendrik F. Bok

    发明人: Hendrik F. Bok

    摘要: Spray coating, particularly flat spray coating of circuit boards. Applicant's method of conformal coating, eliminates "railroading" at the edges of the flat spray web and assures precise control of the amount of coating material placed on the circuit board surface.The method includes longitudinally advancing a pressurized coating over a surface to be coated, while simultaneously feeding the coating in a flat spray pattern, and triggering feeding "ON/OFF" so as to proportion the amount of coating being fed onto the surface and to reduce "fishtail" at the edges of the flat spray pattern.

    摘要翻译: 喷涂,特别是平面喷涂电路板。 申请人的保形涂布方法消除了在平坦喷涂网边缘处的“铁路”,并且确保精确地控制放置在电路板表面上的涂层材料的量。该方法包括将加压涂层纵向推进到待涂覆的表面上, 同时以平坦的喷射图案供给涂层,并且触发进给“打开/关闭”,以便将进料的涂层的量与表面上的比例进行比例,并减少在平坦喷雾图案的边缘处的“鱼尾”。

    Methods and apparatus for cleaning objects
    7.
    发明授权
    Methods and apparatus for cleaning objects 失效
    清洁物品的方法和设备

    公开(公告)号:US5339842A

    公开(公告)日:1994-08-23

    申请号:US993098

    申请日:1992-12-18

    申请人: Hendrik F. Bok

    发明人: Hendrik F. Bok

    CPC分类号: H01L21/67057 B08B3/12

    摘要: Cleaning methods and apparatus for removing particulate materials from the surfaces of objects are disclosed. Megasonic vibrations are utilized to cause a liquid cleaning fluid in a first reservoir to rise above the upper end of the first reservoir, contact the surface of the object to be cleaned and flow over a weir at the upper end of the first reservoir into a second reservoir. The methods and apparatus are useful to remove small particles, e.g. having a particle size of less than about 1 micron, from flat or curved planar surfaces. The methods and apparatus can be integrated with subsequent processing steps, e.g. applying thin film coatings, without intermediate handling of the objects.

    摘要翻译: 公开了用于从物体表面去除颗粒材料的清洁方法和设备。 使用兆声振动使第一储存器中的液体清洁流体升高到第一储存器的上端之上,接触待清洁物体的表面并在第一储存器的上端处的堰上流入第二储存器 水库 所述方法和装置可用于除去小颗粒,例如, 具有小于约1微米的粒度,从平坦或弯曲的平面表面。 方法和装置可以与后续处理步骤,例如, 应用薄膜涂层,无需中间处理物体。

    Method of discrete conformal coating
    8.
    发明授权
    Method of discrete conformal coating 失效
    离散保形涂层方法

    公开(公告)号:US5266349A

    公开(公告)日:1993-11-30

    申请号:US660072

    申请日:1991-02-25

    申请人: Hendrik F. Bok

    发明人: Hendrik F. Bok

    摘要: Spray coating, particularly flat spray coating of circuit boards. Applicant's method of discrete conformal coating eliminates "railroading" at the edges of the flat spray web and assures precise control of the amount of coating material placed on the circuit board surface, as well as on the varying and complex circuit board components. The method includes pressurizing the coating; longitudinally advancing a surface to be coated, such as a circuit board, beneath the coating, while simultaneously feeding the coating onto the advancing surface as a plural series of aligned droplets extending transversely across the advancing surface. The feeding of coating is triggered "ON/OFF" so as to define longitudinally the series of droplets feeding onto the advancing surface.

    摘要翻译: 喷涂,特别是平面喷涂电路板。 申请人的分散保形涂层方法消除了在平坦喷涂网边缘的“铁路”,并确保精确控制放置在电路板表面上的涂层材料的数量,以及变化和复杂的电路板部件。 该方法包括加压涂层; 在涂层下方纵向推进待涂覆的表面(例如电路板),同时将涂层作为横向延伸穿过前进表面延伸的多个对齐的液滴进给到前进表面上。 涂层的供给被触发“ON / OFF”,以便纵向地限定供给到前进表面上的一系列液滴。

    Vacuum chuck for coating apparatus
    9.
    发明授权
    Vacuum chuck for coating apparatus 失效
    真空吸盘用于涂装设备

    公开(公告)号:US5368645A

    公开(公告)日:1994-11-29

    申请号:US126324

    申请日:1993-09-24

    申请人: Hendrik F. Bok

    发明人: Hendrik F. Bok

    摘要: Apparatus for coating the surface of an object with a coating material are disclosed. The apparatus comprise a vacuum chuck assembly suitable for holding the object to be coated in a downward, i.e., inverted position, and a coating material applicator movably positioned beneath the vacuum chuck assembly to traverse the surface of the object in a generally parallel direction to the surface. The vacuum chuck assembly provides a means for temperature control as well as a means for establishing a vacuum for holding the object in the inverted position.

    摘要翻译: 公开了一种用涂料涂覆物体表面的装置。 该装置包括适于将待涂覆的物体保持在向下的,即倒置的位置的真空卡盘组件,以及可移动地定位在真空卡盘组件下面的涂料材料施加器,以沿大致平行的方向横穿物体的表面 表面。 真空吸盘组件提供用于温度控制的装置以及用于建立用于将物体保持在倒置位置的真空的装置。

    Methods of meniscus coating
    10.
    发明授权
    Methods of meniscus coating 失效
    半月板涂层方法

    公开(公告)号:US5270079A

    公开(公告)日:1993-12-14

    申请号:US993315

    申请日:1992-12-18

    申请人: Hendrik F. Bok

    发明人: Hendrik F. Bok

    CPC分类号: G03F7/16 B05C9/02 B05D1/28

    摘要: Methods are disclosed for coating flat or curved planar surfaces by flowing a coating material through a porous applicator onto the surface of the object to be coated. Menisci of the coating material are maintained between the porous applicator and the surface of the object to be coated by attractive forces between the coating material and the surface of the object. Thin, uniform coating thicknesses, e.g., less than about 1 micron, and conformal coatings of objects having irregular surfaces can be obtained. The methods are useful, for example, for coating objects such as flat panel displays, optical devices, silicon and germanium wafers, and hybrid circuit boards.

    摘要翻译: 公开了通过使涂覆材料通过多孔施加器流动到待涂覆物体的表面上来涂覆平坦或弯曲平面表面的方法。 通过涂层材料和物体表面之间的吸引力,将涂层材料的Menisci保持在多孔施加器和待涂覆物体的表面之间。 可以获得薄均匀的涂层厚度,例如小于约1微米,并且可以获得具有不规则表面的物体的保形涂层。 该方法例如用于涂覆诸如平板显示器,光学器件,硅和锗晶片的物体以及混合电路板是有用的。