Method of dispersing fine particles in a spray
    2.
    发明授权
    Method of dispersing fine particles in a spray 失效
    将细颗粒分散在喷雾中的方法

    公开(公告)号:US07909263B2

    公开(公告)日:2011-03-22

    申请号:US10886757

    申请日:2004-07-08

    IPC分类号: A62C5/02

    摘要: A method of dispersing fine particles in a spray including the steps of providing a liquid carrier having a critical point and fine particles of at least one material. The fine particles are dispersed in the liquid carrier. A supercritical carrier containing dispersed particles is created by driving the liquid carrier containing dispersed fine particles above the critical point. The pressure of the supercritical carrier containing dispersed particles is reduced thereby forming a vapor carrier containing dispersed particles therein. The vapor carrier containing dispersed fine particles is then discharged.

    摘要翻译: 一种在喷雾中分散细颗粒的方法,包括提供具有临界点和至少一种材料的细颗粒的液体载体的步骤。 细颗粒分散在液体载体中。 含有分散颗粒的超临界载体通过驱动含有高于临界点的分散细颗粒的液体载体来产生。 包含分散颗粒的超临界载体的压力降低,从而形成其中含有分散颗粒的蒸气载体。 然后排出含有分散的细颗粒的蒸气载体。

    Method of coating microelectronic substrates
    3.
    发明授权
    Method of coating microelectronic substrates 失效
    涂布微电子基板的方法

    公开(公告)号:US07592035B2

    公开(公告)日:2009-09-22

    申请号:US11261299

    申请日:2005-10-28

    IPC分类号: B05D5/12

    摘要: A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.

    摘要翻译: 涂覆基材的方法包括以下步骤:(a)在封闭容器中提供基材,所述基材具有表面部分; (b)用第一超临界流体至少部分地填充封闭的容器,使得所述第一超临界流体接触表面部分,第一超临界流体携带或包含涂层组分; 然后(c)向所述反应容器中加入单独的压缩气体气氛,使得在所述第一超临界流体和所述单独的压缩气体气氛之间形成边界,所述单独的压缩气体气氛的密度小于所述第一超临界流体; 然后(d)通过将所述单独的压缩气体气氛继续加入到所述容器中,使所述边界移动穿过所述表面部分并且将涂层组分的薄膜沉积在所述微电子衬底上,从而使所述第一超临界流体从所述容器移位。

    Process for the selective deposition of particulate material
    4.
    发明授权
    Process for the selective deposition of particulate material 失效
    颗粒材料的选择性沉积工艺

    公开(公告)号:US07220456B2

    公开(公告)日:2007-05-22

    申请号:US10815010

    申请日:2004-03-31

    IPC分类号: B05D5/00

    摘要: A process for the patterning of a desired substance on a surface includes: (i) charging a particle formation vessel with a compressed fluid; (ii) introducing into the particle formation vessel a first feed stream comprising a solvent and the desired substance dissolved therein and a second feed stream comprising the compressed fluid, wherein the desired substance is less soluble in the compressed fluid relative to its solubility in the solvent and the solvent is soluble in the compressed fluid, and wherein the first feed stream is dispersed in the compressed fluid, allowing extraction of the solvent into the compressed fluid and precipitation of particles of the desired substance; (iii) exhausting compressed fluid, solvent and the desired substance from the particle formation vessel at a rate substantially equal to a rate of addition of such components to the vessel in step (ii) through a restrictive passage to a lower pressure whereby the compressed fluid is transformed to a gaseous state, and wherein the restrictive passage includes a discharge device that produces a shaped beam of particles of the desired substance at a point beyond an outlet of the discharge device, where the fluid is in a gaseous state at a location before or beyond the outlet of the discharge device; and (iv) exposing a receiver surface to the shaped beam of particles of the desired substance and selectively depositing a pattern of particles on the receiver surface.

    摘要翻译: 用于在表面上图案化所需物质的方法包括:(i)用压缩流体填充颗粒形成容器; (ii)向颗粒形成容器中引入包含溶剂和所需物质溶解在其中的第一进料流和包含压缩流体的第二进料流,其中所需物质相对于其在溶剂中的溶解度较不溶于压缩流体 并且溶剂可溶于压缩流体中,并且其中第一进料流分散在压缩流体中,允许将溶剂萃取到压缩流体中并沉淀所需物质的颗粒; (iii)通过限制性通道将压缩流体,溶剂和所需物质从所述颗粒形成容器排出,其速率基本上等于在步骤(ii)中通过限制通道将这些组分添加到容器中的速率,由此压缩流体 转化为气态,并且其中限制通道包括排出装置,其在超出排放装置的出口的点处产生所需物质的成形颗粒束,其中流体在气体状态处于位于之前的位置处 或超出排出装置的出口; 和(iv)将接收器表面暴露于所需物质的成形的颗粒束并选择性地在接收器表面上沉积颗粒图案。

    Chemical vapor deposition and powder formation using thermal spray
    5.
    发明申请
    Chemical vapor deposition and powder formation using thermal spray 审中-公开
    化学气相沉积和粉末形成使用热喷涂

    公开(公告)号:US20050019551A1

    公开(公告)日:2005-01-27

    申请号:US10924313

    申请日:2004-08-23

    摘要: A method for chemical vapor deposition using a very fine atomization or vaporization of a reagent containing liquid or liquid-like fluid near its supercritical temperature, where the resulting atomized or vaporized solution is entered into a flame or a plasma torch, and a powder is formed or a coating is deposited onto a substrate. The combustion flame can be stable from 10 torr to multiple atmospheres, and provides the energetic environment in which the reagent contained within the fluid can be reacted to form the desired powder or coating material on a substrate. The plasma torch likewise produces the required energy environment, but, unlike the flame, no oxidizer is needed so materials stable in only very low oxygen partial pressures can be formed. Using either the plasma torch or the combustion plasma, coatings can be deposited and powders formed in the open atmosphere without the necessity of a reaction chamber, but a chamber may be used for various reasons including process separation from the environment and pressure regulation.

    摘要翻译: 使用在其超临界温度附近含有液体或液体状流体的试剂非常精细的雾化或蒸发的化学气相沉积方法,其中所得雾化或蒸发的溶液进入火焰或等离子体焰炬,并形成粉末 或涂层沉积在基底上。 燃烧火焰可以从10托稳定到多个大气压,并且提供能够使流体中包含的试剂反应以在基底上形成所需粉末或涂层材料的能量环境。 等离子体焰炬同样产生所需的能量环境,但是与火焰不同,不需要氧化剂,因此可以形成仅在非常低的氧分压下稳定的材料。 使用等离子体焰炬或燃烧等离子体,可以沉积涂层并且在开放气氛中形成粉末,而不需要反应室,但是可以由于各种原因使用室,包括与环境的分离和压力调节。

    Method of coating microelectronic substrates
    6.
    发明申请
    Method of coating microelectronic substrates 失效
    涂布微电子基板的方法

    公开(公告)号:US20040146636A1

    公开(公告)日:2004-07-29

    申请号:US10681515

    申请日:2003-10-08

    IPC分类号: B05D005/12 B05D003/10

    摘要: A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.

    摘要翻译: 涂覆基材的方法包括以下步骤:(a)在封闭容器中提供基材,所述基材具有表面部分; (b)用第一超临界流体至少部分地填充封闭的容器,使得所述第一超临界流体接触表面部分,其中第一超临界流体携带或包含涂层组分; 然后(c)向所述反应容器中加入单独的压缩气体气氛,使得在所述第一超临界流体和所述单独的压缩气体气氛之间形成边界,所述单独的压缩气体气氛的密度小于所述第一超临界流体; 然后(d)通过将所述单独的压缩气体气氛继续加入到所述容器中,使所述边界移动穿过所述表面部分并且将涂层组分的薄膜沉积在所述微电子衬底上,从而使所述第一超临界流体从所述容器移位。

    Biofunctional polymers prepared in supercritical fluid

    公开(公告)号:US06670407B2

    公开(公告)日:2003-12-30

    申请号:US10164580

    申请日:2002-06-10

    IPC分类号: C08K300

    摘要: Process for the preparation of a composition comprising a biofunctional polymer substrate and biofunctional material substrate adapted for use in or in association with the human or animal body, cultivated or uncultivated living matter, wherein the biofunctional material substrate is substantially insoluble in the polymer substrate and/or a supercritical fluid, wherein the process comprises contacting a mixture of the substrates or their precursors with a supercritical fluid under supercritical conditions and conditions of reduced viscosity and physical blending to plasticise and swell the polymer and distribute the biofunctional material substrate throughout the polymer, and releasing the fluid under subcritical conditions, wherein the substrates are adapted to be isolated in form of a solid admixture comprising the biofunctional material substrate in substantially unchanged chemical form, and in substantially unchanged physical form, composition obtained thereby, polymer matrix embodiment thereof and the process for its preparation.