摘要:
The present invention provides a method for designing a light transmission device, which adjusts a wavelength region of a spectrum of transmitted light without expanding a width of a transmission spectrum and without lowering the transmittance. The method for designing a light transmission device having a metal thin film, and a rectangular aperture which is formed in a plane of the metal thin film, has a long side and a short side and makes light pass therethrough, wherein the short side has a dimension smaller than a wavelength of incident light, and the long side is determined to have such a dimension that a peak wavelength at which the transmittance of light passing through the rectangular aperture is maximal can be a predetermined value.
摘要:
A substrate for forming a target substance detecting device includes a supporting member, an underlying layer disposed on a surface of the supporting member, and a metal pattern layer, disposed on a surface of the underlying layer, for being bound to a target substance trapping substance capable of trapping a target substance in a specimen solution at least containing water as a liquid medium to detect the target substance by utilizing plasmon resonance. The underlying layer has a refractive index nb satisfying the following relationship: 0.90 na≦nb≦1.05 na, wherein na represents a refractive index of water.
摘要:
A substrate for forming a target substance detecting device includes a supporting member, an underlying layer disposed on a surface of the supporting member, and a metal pattern layer, disposed on a surface of the underlying layer, for being bound to a target substance trapping substance capable of trapping a target substance in a specimen solution at least containing water as a liquid medium to detect the target substance by utilizing plasmon resonance. The underlying layer has a refractive index nb satisfying the following relationship: 0.90na≦nb≦1.05na, wherein na represents a refractive index of water.
摘要:
An optical element of the present invention includes a conductive microstructure having a conductive property, and detects an optical spectrum signal varied by the binding of measured molecules on the surface of the conductive microstructure. The optical element has a distribution in the binding capacity of the measured molecules on the surface of the conductive microstructure in the direction of the electric displacement vector generated inside the conductive microstructure. As a result, it is possible to provide an optical element capable of measuring the density at high accuracy without depending on the binding position of the measured molecules.
摘要:
A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.
摘要:
A near-field light generating structure for generating near-field light has a pattern of a fine metal structure comprising a light blocking layer or a pattern of a fine opening provided in the light blocking layer. The fine metal structure or the fine opening has a size of not more than a wavelength of incident light. The fine metal structure or the fine opening has a sectional shape, in a plane parallel with the incident light, which is asymmetrical in terms of a member adjacent to the fine metal structure or the fine opening.
摘要:
An exposure mask in which exposure of an exposure object is carried out on the basis of near field light leaking from a plurality of openings provided in a light blocking member in a mutually adjoining relation, in which the spacing between adjacent openings is not greater than the wavelength of light used for the exposure, and an end portion of the opening at the exposure object side has a structure effective to reduce scatter of a surface plasmon polariton wave going around to the exposure object side of the light blocking member.
摘要:
A near-field exposure mask includes a mask base material and a light blocking layer formed on the base material, the light blocking layer includes a fine metal structure or fine opening formed in the light blocking layer. The size of the metal structure or the size of the opening is not more than a wavelength of light for exposure, and at least one of a cross section of the fine metal structure in a direction perpendicular to a surface of the mask, and a cross section of the fine opening in a direction perpendicular to the mask surface has an asymmetrical sectional shape with respect to an arbitrary axis perpendicular to the mask surface.
摘要:
A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.
摘要:
Disclosed is an exposure method and apparatus, an exposure mask and a device manufacturing method, wherein a first surface of a light blocking member having a plurality of openings formed in a mutually adjoining relation is placed at an exposure object side, and light is projected to the light blocking member from its second surface side so that exposure of the exposure object is carried out on the basis of near field light leaking from the openings. For exposure, interference is caused between surface plasmon polariton waves passing respectively through adjacent openings and going around to the first surface side, and, on the basis of it, a portion having a decreased light intensity is produced in the exposure object so that the exposure is carried out by use of the decreased light intensity portion.