METHOD FOR DESIGNING LIGHT TRANSMISSION DEVICE, OPTICAL ELEMENT AND SENSOR
    1.
    发明申请
    METHOD FOR DESIGNING LIGHT TRANSMISSION DEVICE, OPTICAL ELEMENT AND SENSOR 审中-公开
    用于设计光传输装置,光学元件和传感器的方法

    公开(公告)号:US20090310133A1

    公开(公告)日:2009-12-17

    申请号:US12158147

    申请日:2007-02-26

    CPC分类号: G02B5/008 G02B5/204

    摘要: The present invention provides a method for designing a light transmission device, which adjusts a wavelength region of a spectrum of transmitted light without expanding a width of a transmission spectrum and without lowering the transmittance. The method for designing a light transmission device having a metal thin film, and a rectangular aperture which is formed in a plane of the metal thin film, has a long side and a short side and makes light pass therethrough, wherein the short side has a dimension smaller than a wavelength of incident light, and the long side is determined to have such a dimension that a peak wavelength at which the transmittance of light passing through the rectangular aperture is maximal can be a predetermined value.

    摘要翻译: 本发明提供了一种用于设计光透射装置的方法,其调节透射光谱的波长区域,而不会扩大透射光谱的宽度并且不降低透射率。 用于设计具有金属薄膜的光传输装置和形成在金属薄膜的平面中的矩形孔的方法具有长边和短边,使光通过,其中短边具有 尺寸小于入射光的波长,并且长边被确定为具有通过矩形孔径的光的透射率最大的峰值波长的尺寸可以是预定值。

    Optical element, sensor device, manufacturing method of optical element, detection element, target substance measuring device and detection method
    4.
    发明授权
    Optical element, sensor device, manufacturing method of optical element, detection element, target substance measuring device and detection method 有权
    光学元件,传感器装置,光学元件的制造方法,检测元件,靶物质测量装置和检测方法

    公开(公告)号:US07859672B2

    公开(公告)日:2010-12-28

    申请号:US12045335

    申请日:2008-03-10

    IPC分类号: G01N21/00

    摘要: An optical element of the present invention includes a conductive microstructure having a conductive property, and detects an optical spectrum signal varied by the binding of measured molecules on the surface of the conductive microstructure. The optical element has a distribution in the binding capacity of the measured molecules on the surface of the conductive microstructure in the direction of the electric displacement vector generated inside the conductive microstructure. As a result, it is possible to provide an optical element capable of measuring the density at high accuracy without depending on the binding position of the measured molecules.

    摘要翻译: 本发明的光学元件包括具有导电特性的导电微结构,并且检测由导电微结构的表面上测量分子的结合而变化的光谱信号。 光学元件在导电微结构内部产生的电位移矢量的方向上具有导电微结构表面上测量分子的结合能力分布。 结果,可以提供能够高精度地测量密度的光学元件,而不依赖于所测量的分子的结合位置。

    SENSOR DEVICE AND TESTING METHOD UTILIZING LOCALIZED PLASMON RESONANCE
    5.
    发明申请
    SENSOR DEVICE AND TESTING METHOD UTILIZING LOCALIZED PLASMON RESONANCE 失效
    传感器设备和测试方法利用本地化的PLASMON共振

    公开(公告)号:US20080246970A1

    公开(公告)日:2008-10-09

    申请号:US12131433

    申请日:2008-06-02

    IPC分类号: G01N21/55

    摘要: A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.

    摘要翻译: 传感器装置由具有多个开口的金属膜形成,位于每个开口内的传感器材料,发射具有第一波长的光的光源和检测从光源发出的光并发射的光检测器 从开口穿过或反射。 多个开口在金属膜中沿第一方向周期性地布置,并且多个开口中的每一个的尺寸和第一方向上的间隔都等于或小于光的波长。

    Near-field light generating structure, near-field exposure mask, and near-field generating method
    6.
    发明申请
    Near-field light generating structure, near-field exposure mask, and near-field generating method 失效
    近场光产生结构,近场曝光掩模和近场产生方法

    公开(公告)号:US20050064303A1

    公开(公告)日:2005-03-24

    申请号:US10936806

    申请日:2004-09-09

    CPC分类号: G03F1/54 G03F1/50

    摘要: A near-field light generating structure for generating near-field light has a pattern of a fine metal structure comprising a light blocking layer or a pattern of a fine opening provided in the light blocking layer. The fine metal structure or the fine opening has a size of not more than a wavelength of incident light. The fine metal structure or the fine opening has a sectional shape, in a plane parallel with the incident light, which is asymmetrical in terms of a member adjacent to the fine metal structure or the fine opening.

    摘要翻译: 用于产生近场光的近场光产生结构具有包括遮光层的细金属结构图案或设置在遮光层中的精细开口图案。 细金属结构或微细开口具有不大于入射光波长的尺寸。 细金属结构或微细开口在与入射光平行的平面中具有与邻近细金属结构或微细开口的构件不对称的截面形状。

    Near Field Exposure That Reduces Scatter of a Surface Plasmon Polariton Wave Going Around a Light Blocking Member
    7.
    发明申请
    Near Field Exposure That Reduces Scatter of a Surface Plasmon Polariton Wave Going Around a Light Blocking Member 审中-公开
    近场暴露减少了表面等离子体极化波在光阻挡件周围的散射

    公开(公告)号:US20090207398A1

    公开(公告)日:2009-08-20

    申请号:US12434992

    申请日:2009-05-04

    IPC分类号: G03B27/72 G03F1/00 G03B27/32

    摘要: An exposure mask in which exposure of an exposure object is carried out on the basis of near field light leaking from a plurality of openings provided in a light blocking member in a mutually adjoining relation, in which the spacing between adjacent openings is not greater than the wavelength of light used for the exposure, and an end portion of the opening at the exposure object side has a structure effective to reduce scatter of a surface plasmon polariton wave going around to the exposure object side of the light blocking member.

    摘要翻译: 一种曝光掩模,其中曝光对象的曝光是基于相邻开口之间的间隔不大于相邻邻接关系中设置的光阻挡构件中的多个开口泄漏的近场光, 用于曝光的光的波长和曝光对象侧的开口的端部具有有效地减少到达遮光构件的曝光物体侧的表面等离子体激元波的散射的结构。

    Near-field light generating structure, near-field exposure mask, and near-field generating method
    8.
    发明授权
    Near-field light generating structure, near-field exposure mask, and near-field generating method 失效
    近场光产生结构,近场曝光掩模和近场产生方法

    公开(公告)号:US07279253B2

    公开(公告)日:2007-10-09

    申请号:US10936806

    申请日:2004-09-09

    IPC分类号: G03F1/00

    CPC分类号: G03F1/54 G03F1/50

    摘要: A near-field exposure mask includes a mask base material and a light blocking layer formed on the base material, the light blocking layer includes a fine metal structure or fine opening formed in the light blocking layer. The size of the metal structure or the size of the opening is not more than a wavelength of light for exposure, and at least one of a cross section of the fine metal structure in a direction perpendicular to a surface of the mask, and a cross section of the fine opening in a direction perpendicular to the mask surface has an asymmetrical sectional shape with respect to an arbitrary axis perpendicular to the mask surface.

    摘要翻译: 近场曝光掩模包括掩模基材和形成在基材上的遮光层,遮光层包括形成在遮光层中的细金属结构或细孔。 金属结构的尺寸或开口的尺寸不大于用于曝光的光的波长,并且细小金属结构的垂直于掩模的表面的方向的横截面中的至少一个和十字 在与掩模表面垂直的方向上的细孔的截面相对于垂直于掩模表面的任意轴具有不对称的截面形状。

    Chemical sensor
    9.
    发明授权
    Chemical sensor 失效
    化学传感器

    公开(公告)号:US07399445B2

    公开(公告)日:2008-07-15

    申请号:US10340152

    申请日:2003-01-10

    IPC分类号: C12Q1/68 G01N1/02

    摘要: A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.

    摘要翻译: 传感器装置由具有多个开口的金属膜形成,位于每个开口内的传感器材料,发射具有第一波长的光的光源和检测从光源发出的光并发射的光检测器 从开口穿过或反射。 多个开口在金属膜中沿第一方向周期性地布置,并且多个开口中的每一个的尺寸和第一方向上的间隔都等于或小于光的波长。

    Exposure method and apparatus, exposure mask, and device manufacturing method
    10.
    发明申请
    Exposure method and apparatus, exposure mask, and device manufacturing method 审中-公开
    曝光方法和装置,曝光掩模和装置制造方法

    公开(公告)号:US20060110693A1

    公开(公告)日:2006-05-25

    申请号:US10529907

    申请日:2004-06-24

    IPC分类号: G03C5/00 G03B27/42 G03F1/00

    摘要: Disclosed is an exposure method and apparatus, an exposure mask and a device manufacturing method, wherein a first surface of a light blocking member having a plurality of openings formed in a mutually adjoining relation is placed at an exposure object side, and light is projected to the light blocking member from its second surface side so that exposure of the exposure object is carried out on the basis of near field light leaking from the openings. For exposure, interference is caused between surface plasmon polariton waves passing respectively through adjacent openings and going around to the first surface side, and, on the basis of it, a portion having a decreased light intensity is produced in the exposure object so that the exposure is carried out by use of the decreased light intensity portion.

    摘要翻译: 公开了一种曝光方法和装置,曝光掩模和装置制造方法,其中具有相互邻接关系形成的多个开口的遮光构件的第一表面被放置在曝光物体侧,并且将光投射到 遮光构件从其第二表面侧使得曝光对象的曝光是基于从开口泄漏的近场光进行的。 对于曝光,分别通过相邻的开口并绕到第一表面侧的表面等离子体激元波之间产生干涉,并且在其基础上,在曝光对象中产生具有降低的光强度的部分,使得曝光 通过使用减小的光强度部分进行。