公开(公告)号：US07586085B2

公开(公告)日：2009-09-08

申请号：US10563626

申请日：2004-07-08

申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

IPC分类号： H01J3/14 ,  H01J37/00

CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。

公开(公告)号：US20070018082A1

公开(公告)日：2007-01-25

申请号：US10563626

申请日：2004-07-08

申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

IPC分类号： G01B9/10 ,  G02B6/00

CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。

公开(公告)号：US5908562A

公开(公告)日：1999-06-01

申请号：US76880

申请日：1998-05-12

申请人： Motoichi Ohtsu ,  Shuji Mononobe ,  Takuya Matsumoto ,  Toshiharu Saiki

发明人： Motoichi Ohtsu ,  Shuji Mononobe ,  Takuya Matsumoto ,  Toshiharu Saiki

IPC分类号： G01Q60/00 ,  G01Q60/18 ,  G01Q60/22 ,  G02B6/24 ,  G02B6/245 ,  G02B6/26 ,  C03C15/00 ,  C03C25/00

CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G02B6/241 ,  G02B6/245 ,  G02B6/262 ,  Y10S977/862 ,  Y10S977/875

摘要： An optical fiber made up of a core for propagating the light and a cladding covering the core for interrupting light propagated within the core. The optical fiber includes a tip formed by sharpening an end of the core in a tapering fashion, a light-shielding coating layer formed on the surface of the tip and an aperture formed by exposing the foremost part of the tip from the light-shielding coating layer to outside. The light-shielding coating layer operates as a light shielding portion for interrupting the light radiated on other than the aperture and light enters or exits only at the aperture and light is propagated in the core as it is repeatedly reflected at a core-cladding boundary and is collected at the tip so as to be radiated via the aperture. The light entering the tip via the aperture is conducted into the core via the tip.

摘要翻译： 由用于传播光的芯构成的光纤和覆盖芯的包层，用于中断在芯内传播的光。 该光纤包括通过以锥形方式锐化芯的端部而形成的尖端，形成在尖端的表面上的遮光涂层和通过从遮光涂层暴露尖端的最前部而形成的孔 层到外面。 遮光涂层作为遮光部分起作用，用于中断除了孔径之外的光辐射，并且光仅在孔径处进入或离开，并且光在纤芯中传播时，因为它在芯 - 包层边界反复反射， 在尖端处被收集以便经由孔径辐射。 通过孔进入尖端的光通过尖端传导到芯中。

公开(公告)号：US06236783B1

公开(公告)日：2001-05-22

申请号：US09180975

申请日：1998-11-18

申请人： Shuji Mononobe ,  Motoichi Ohtsu

发明人： Shuji Mononobe ,  Motoichi Ohtsu

IPC分类号： G02B626

CPC分类号： G02B6/03694 ,  G01B11/30 ,  G01Q60/22 ,  G02B6/03638 ,  G02B6/241 ,  Y10S977/862 ,  Y10S977/878

摘要： An optical fiber probe having a tapered portion inclined in three stages having three inclinations is manufactured by carrying out etching on one end of an optical fiber having a second core, a first cladding and a second cladding provided in this order around a first core, in which a radius r4 of an outer peripheral surface of the second cladding is r4

摘要翻译： 通过在具有第二芯，第一包层和第二包层的光纤的一端上进行蚀刻来制造具有倾斜三层倾斜的锥形部分的光纤探针，该第二芯，第一包层和第二包层围绕第一芯设置， 第二包层的外周面的半径r4为r4

公开(公告)号：US5928525A

公开(公告)日：1999-07-27

申请号：US95352

申请日：1998-06-09

申请人： Motoichi Ohtsu ,  Shuji Mononobe ,  Uma Maheswari Rajagopalan

发明人： Motoichi Ohtsu ,  Shuji Mononobe ,  Uma Maheswari Rajagopalan

IPC分类号： G01Q60/18 ,  G02B6/24 ,  G02B6/245 ,  G02B6/42 ,  C03C25/06

CPC分类号： G02B6/4203 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q60/22 ,  G02B6/245 ,  G02B6/241 ,  Y10S977/862 ,  Y10S977/878

摘要： An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for entrance and exiting of light. The optical fiber is used in a photon scanning tunneling microscope detecting the evanescent light localized in an area smaller in size than the wavelength of light on the surface of an sample as an optical probe disposed in proximity to the surface of the sample for scattering the evanescent light for detecting the scattered light. The optical fiber is optically coupled to an optical waveguide for constituting an optically coupled element. With this optically coupled element, a protrusion of the optical fiber operates as a collection unit for collecting the light propagated in the core. The light collected by the protrusion enters the optical waveguide.

摘要翻译： 由用于传播光的芯构成的光纤和覆盖芯的包层以限制在芯中传播的光。 光纤在顶点处具有锥形突起，用于入射和离开光。 该光纤用于光子扫描隧道显微镜，其检测位于比样品表面上的光的波长小的区域中的ev逝光，作为设置在样品表面附近的光学探针，用于散射ev逝 用于检测散射光的光。 光纤光学耦合到光波导，用于构成光耦合元件。 利用该光耦合元件，光纤的突起作为用于收集在芯中传播的光的收集单元。 由突起收集的光进入光波导。

公开(公告)号：US5812723A

公开(公告)日：1998-09-22

申请号：US704615

申请日：1997-01-17

申请人： Motoichi Ohtsu ,  Shuji Mononobe ,  Uma Maheswari Rajagopalan

发明人： Motoichi Ohtsu ,  Shuji Mononobe ,  Uma Maheswari Rajagopalan

IPC分类号： G01Q60/18 ,  G02B6/24 ,  G02B6/245 ,  G02B6/42 ,  G02B6/02

CPC分类号： G02B6/4203 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q60/22 ,  G02B6/245 ,  G02B6/241 ,  Y10S977/862 ,  Y10S977/878

摘要： An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for entrance and exiting of light. The optical fiber is used in a photon scanning tunneling microscope detecting the evanescent light localized in an area smaller in size than the wavelength of light on the surface of an sample as an optical probe disposed in proximity to the surface of the sample for scattering the evanescent light for detecting the scattered light. The optical fiber is optically coupled to an optical waveguide for constituting an optically coupled element. With this optically coupled element, a protrusion of the optical fiber operates as a collection unit for collecting the light propagated in the core. The light collected by the protrusion enters the optical waveguide.

摘要翻译： PCT No.PCT / JP94 / 00906 Sec。 371日期1997年1月17日 102（e）日期1997年1月17日PCT Filed 1994年6月3日PCT公布。 第WO95 / 25972号公报 日期1995年9月28日由用于传播光的芯构成的光纤和覆盖芯的包层以限制在芯中传播的光。 光纤在顶点处具有锥形突起，用于入射和离开光。 该光纤用于光子扫描隧道显微镜，其检测位于比样品表面上的光的波长小的区域中的ev逝光，作为设置在样品表面附近的光学探针，用于散射ev逝 用于检测散射光的光。 光纤光学耦合到光波导，用于构成光耦合元件。 利用该光耦合元件，光纤的突起作为用于收集在芯中传播的光的收集单元。 由突起收集的光进入光波导。

公开(公告)号：US06617569B2

公开(公告)日：2003-09-09

申请号：US09860643

申请日：2001-05-21

申请人： Yoshihito Narita ,  Tsutomu Inoue ,  Susumu Teruyama ,  Toshiharu Saiki ,  Shuji Mononobe ,  Motoichi Ohtsu

发明人： Yoshihito Narita ,  Tsutomu Inoue ,  Susumu Teruyama ,  Toshiharu Saiki ,  Shuji Mononobe ,  Motoichi Ohtsu

IPC分类号： H01J516

CPC分类号： G01Q60/22

摘要： A probe opening forming apparatus 139 comprising: light detecting means 140 for detecting a quantity of a light transmitted from a tip portion of the probe through a light of the source 116, which is on contact with the tip portion of the probe; storage means 142 for previously storing information about relation of the quantity of the light transmitted from the tip portion of the probe and the size of the opening; calculating means 144 for obtaining the value of the light quantity for obtaining an opening having a desirable size based on the information stored in the storage means 142; and pressing control means 126 for controlling the press of the tip portion of the probe against the light detecting means through the pressing means 114 such that a light quantity detected by the light detecting means 140 is equal to the light quantity calculated from the calculating means 144.

摘要翻译： 探针开口形成装置139，包括：光检测装置140，用于通过与探针的尖端部分接触的源116的光来检测从探针的末端部分透射的光量; 存储装置142，用于预先存储关于从探头的尖端部分传播的光量与开口尺寸的关系的信息; 计算装置144，用于基于存储在存储装置142中的信息获得用于获得具有期望尺寸的开口的光量的值; 以及按压控制装置126，用于通过按压装置114控制探针的顶端部分对光检测装置的按压，使得由光检测装置140检测的光量等于从计算装置144计算的光量 。

公开(公告)号：US5812724A

公开(公告)日：1998-09-22

申请号：US737605

申请日：1997-02-25

申请人： Motoichi Ohtsu ,  Shuji Mononobe ,  Takuya Matsumoto ,  Toshiharu Saiki

发明人： Motoichi Ohtsu ,  Shuji Mononobe ,  Takuya Matsumoto ,  Toshiharu Saiki

IPC分类号： G01Q60/00 ,  G01Q60/18 ,  G01Q60/22 ,  G02B6/24 ,  G02B6/245 ,  G02B6/26 ,  G02B6/02

CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G02B6/241 ,  G02B6/245 ,  G02B6/262 ,  Y10S977/862 ,  Y10S977/875

摘要： An optical fiber made up of a core for propagating the light and a cladding covering the core for interrupting light propagated within the core. The optical fiber includes a tip formed by sharpening an end of the core in a tapering fashion, a light-shielding coating layer formed on the surface of the tip and an aperture formed by exposing the foremost part of the tip from the light-shielding coating layer to outside. The light-shielding coating layer operates as a light shielding portion for interrupting the light radiated on other than the aperture and light enters or exits only at the aperture, and light is propagated in the core as it is repeatedly reflected at a core-cladding boundary and is collected at the tip so as to be radiated via the aperture. The light entering the tip via the aperture is conducted into the core via the tip.

摘要翻译： PCT No.PCT / JP95 / 01068 Sec。 371日期1997年2月25日 102（e）日期1997年2月25日PCT提交1995年5月31日PCT公布。 公开号WO95 / 33207 日期1995年12月7日由用于传播光的芯构成的光纤和覆盖芯的包层以中断在芯内传播的光。 该光纤包括通过以锥形方式锐化芯的端部而形成的尖端，形成在尖端的表面上的遮光涂层和通过从遮光涂层暴露尖端的最前部而形成的孔 层到外面。 遮光涂层作为遮光部分工作，用于中断除了光圈以外的光辐射的光，光仅在孔径处进入或退出，并且光在核心上传播时，因为它在芯 - 包层边界反复反射 并且在尖端收集以便经由孔辐射。 通过孔进入尖端的光通过尖端传导到芯中。