公开(公告)号：US10534120B2

公开(公告)日：2020-01-14

申请号：US15631256

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free ,  Bradley R. Williams ,  Matthew R. Linford ,  Anubhav Diwan ,  Fred Lane ,  Shaun Ogden

IPC: G02B5/30 ,  G02B1/14 ,  C09D5/08 ,  C23C16/44 ,  C23C16/56 ,  C23C16/02 ,  C23C14/24 ,  C23C14/02 ,  C23C14/58 ,  B05D1/00 ,  C23C14/12 ,  C23C16/30 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455 ,  G02B1/04 ,  H04N9/31 ,  G02B1/18 ,  B05D3/06 ,  B05D3/10 ,  B05D3/14 ,  G03B21/20

Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

公开(公告)号：US09632224B2

公开(公告)日：2017-04-25

申请号：US14937488

申请日：2015-11-10

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free

IPC: G02B5/30 ,  H04N9/31 ,  G03B21/00 ,  G03B21/20

CPC classification number: G02B5/3058 ,  G03B21/006 ,  G03B21/2073 ,  H04N9/3167

Abstract: The invention includes a selectively-absorptive wire grid polarizer (WGP) comprising an array of parallel, elongated rods located over a surface of a transparent substrate with gaps between adjacent rods. Each of the rods can include a reflective wire and two absorptive ribs. The reflective wire can be sandwiched between the two absorptive ribs and the substrate or the two absorptive ribs can be sandwiched between the reflective wire and the substrate. Each of the two absorptive ribs can comprise a different material. Use of multiple absorptive ribs within each rod can increase the effective useful bandwidth of light for selectively absorbing one polarization.

公开(公告)号：US10656309B2

公开(公告)日：2020-05-19

申请号：US16556768

申请日：2019-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/04 ,  G02B1/11 ,  G02B1/115 ,  G02B1/14 ,  G02B1/18 ,  G02B5/30 ,  C09D1/00 ,  C09D5/08 ,  G03B21/20 ,  H04N9/31 ,  G02F1/1335

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US20190391299A1

公开(公告)日：2019-12-26

申请号：US16556768

申请日：2019-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/18 ,  C09D1/00 ,  G02B1/14 ,  C09D5/08 ,  G02B1/04 ,  H04N9/31 ,  G02B1/115 ,  G02B5/30 ,  G02B1/11 ,  G03B21/20

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US10444410B2

公开(公告)日：2019-10-15

申请号：US15691315

申请日：2017-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/11 ,  G02B1/18 ,  G02B5/30 ,  G03B21/20 ,  C09D1/00 ,  C09D5/08 ,  G02B1/04 ,  H04N9/31 ,  G02B1/14 ,  G02B1/115 ,  G02F1/1335

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US20180052270A1

公开(公告)日：2018-02-22

申请号：US15709127

申请日：2017-09-19

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Mathew Free ,  Bradley R. Williams ,  Fred Lane ,  Ted Wangensteen

IPC: G02B5/30 ,  G02B7/00

Abstract: A wire grid polarizer (WGP) can include a heat-dissipation layer. The heat-dissipation layer can enable the WGP to be able to endure high temperatures. The heat-dissipation layer can be located (a) over an array of wires and farther from a transparent substrate than the array of wires; or (b) between the array of wires and the transparent substrate. The heat-dissipation layer can be a continuous layer. The heat-dissipation layer can have a high electrical resistivity and a high coefficient of thermal conductivity.

公开(公告)号：US10571614B2

公开(公告)日：2020-02-25

申请号：US15709127

申请日：2017-09-19

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Mathew Free ,  Bradley R. Williams ,  Fred Lane ,  Ted Wangensteen ,  Matthew C. George

IPC: G02B5/30 ,  G02B7/00 ,  G02F1/1335

Abstract: A wire grid polarizer (WGP) can include a heat-dissipation layer. The heat-dissipation layer can enable the WGP to be able to endure high temperatures. The heat-dissipation layer can be located (a) over an array of wires and farther from a transparent substrate than the array of wires; or (b) between the array of wires and the transparent substrate. The heat-dissipation layer can be a continuous layer. The heat-dissipation layer can have a high electrical resistivity and a high coefficient of thermal conductivity.

公开(公告)号：US20180052257A1

公开(公告)日：2018-02-22

申请号：US15691315

申请日：2017-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/18 ,  G02B5/30 ,  G02B1/11 ,  G03B21/20

CPC classification number: G02B1/18 ,  C09D1/00 ,  C09D5/08 ,  C09D5/084 ,  G02B1/04 ,  G02B1/11 ,  G02B1/115 ,  G02B1/14 ,  G02B5/3058 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US20170293059A1

公开(公告)日：2017-10-12

申请号：US15631256

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free ,  Bradley R. Williams ,  Matthew R. Linford ,  Anubhav Diwan ,  Fred Lane ,  Shaun Ogden

IPC: G02B5/30 ,  C09D5/08 ,  C23C16/44 ,  C23C14/58 ,  C23C16/02 ,  C23C14/24 ,  C23C14/02 ,  G02B1/14 ,  C23C16/56

CPC classification number: G02B5/3058 ,  C09D5/08 ,  C23C14/02 ,  C23C14/12 ,  C23C14/24 ,  C23C14/58 ,  C23C16/02 ,  C23C16/308 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/44 ,  C23C16/56 ,  G02B1/04 ,  G02B1/14 ,  G02B1/18 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

公开(公告)号：US20160062017A1

公开(公告)日：2016-03-03

申请号：US14937488

申请日：2015-11-10

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free

IPC: G02B5/30 ,  G03B21/20 ,  G03B21/00

CPC classification number: G02B5/3058 ,  G03B21/006 ,  G03B21/2073 ,  H04N9/3167

Abstract: The invention includes a selectively-absorptive wire grid polarizer (WGP) comprising an array of parallel, elongated rods located over a surface of a transparent substrate with gaps between adjacent rods. Each of the rods can include a reflective wire and two absorptive ribs. The reflective wire can be sandwiched between the two absorptive ribs and the substrate or the two absorptive ribs can be sandwiched between the reflective wire and the substrate. Each of the two absorptive ribs can comprise a different material. Use of multiple absorptive ribs within each rod can increase the effective useful bandwidth of light for selectively absorbing one polarization.

Abstract translation: 本发明包括选择性吸收线栅偏振器（WGP），其包括位于透明基底的表面上的平行的细长杆阵列，其中相邻杆之间具有间隙。 每个杆可以包括反射线和两个吸收肋。 反射线可以夹在两个吸收肋和基板之间，或者两个吸收肋可夹在反射线和基板之间。 两个吸收肋中的每一个可以包括不同的材料。 在每个杆内使用多个吸收肋可以增加光的有效有用带宽以选择性地吸收一个极化。