公开(公告)号：US11822182B2

公开(公告)日：2023-11-21

申请号：US16933090

申请日：2020-07-20

Applicant: Moxtek, Inc.

Inventor： Anubhav Diwan ,  Matt Linford

IPC: G02F1/1335 ,  C23C16/455 ,  G02B1/14 ,  C23C16/40 ,  C23C16/52 ,  G02B5/30

CPC classification number: G02F1/133548 ,  C23C16/402 ,  C23C16/455 ,  C23C16/45555 ,  C23C16/52 ,  G02B1/14 ,  C09K2323/033 ,  G02B5/3058

Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.

公开(公告)号：US11513272B2

公开(公告)日：2022-11-29

申请号：US16941021

申请日：2020-07-28

Applicant: Moxtek, Inc.

Inventor： Stew Nielson ,  Matt Linford ,  Anubhav Diwan ,  Matthew C. George

IPC: G02B5/30 ,  G02B1/18 ,  G02B1/14 ,  G02B1/04 ,  C23C14/08 ,  C23C14/06 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  C23C16/32 ,  C09D183/04 ,  C09D5/08 ,  C09D183/02 ,  C09D185/02 ,  C23C16/455 ,  B05D5/08 ,  B05D1/00

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.

公开(公告)号：US11079528B2

公开(公告)日：2021-08-03

申请号：US16366932

申请日：2019-03-27

Applicant: Moxtek, Inc.

Inventor： Bradley R. Williams ,  R. Stewart Nielson ,  Anubhav Diwan ,  Eric Gardner ,  Shaun Patrick Ogden ,  Bob West

IPC: G02B5/30 ,  G03F7/00 ,  B29D11/00 ,  G03F7/20 ,  B82Y40/00

Abstract: A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.

公开(公告)号：US10969307B2

公开(公告)日：2021-04-06

申请号：US16519324

申请日：2019-07-23

Applicant: Moxtek, Inc.

Inventor： Matthew R. Linford ,  Anubhav Diwan ,  Bhupinder Singh

IPC: G01N1/22 ,  C23C14/10 ,  G01N33/00 ,  C23C14/18 ,  C23C14/35 ,  C23C14/58 ,  G01N1/40 ,  C23C14/34 ,  G01N1/10

Abstract: An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.

公开(公告)号：US20200347495A1

公开(公告)日：2020-11-05

申请号：US16933090

申请日：2020-07-20

Applicant: Moxtek, Inc.

Inventor： Anubhav Diwan ,  Matt Linford

IPC: C23C16/40 ,  C23C16/455 ,  G02B1/14 ,  C23C16/52

Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.

公开(公告)号：US10761252B2

公开(公告)日：2020-09-01

申请号：US15978470

申请日：2018-05-14

Applicant: Moxtek, Inc.

Inventor： Stew Nielson ,  Matt Linford ,  Anubhav Diwan ,  Matthew C. George

IPC: G02B5/30 ,  G02B1/18 ,  G02B1/14 ,  G02B1/04 ,  C23C14/08 ,  C23C14/06 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  C23C16/32 ,  C09D183/04 ,  C09D5/08 ,  C09D183/02 ,  C09D185/02 ,  C23C16/455 ,  B05D5/08 ,  B05D1/00

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.

公开(公告)号：US10752989B2

公开(公告)日：2020-08-25

申请号：US16028039

申请日：2018-07-05

Applicant: Moxtek, Inc. ,  Brigham Young University

Inventor： Anubhav Diwan ,  Matt Linford

IPC: G02B1/14 ,  C23C16/40 ,  C23C16/455 ,  C23C16/52 ,  G02B5/30

Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.

公开(公告)号：US20180195936A1

公开(公告)日：2018-07-12

申请号：US15908151

申请日：2018-02-28

Applicant: Moxtek, Inc.

Inventor： Matthew R. Linford ,  Anubhav Diwan ,  Bhupinder Singh

IPC: G01N1/22 ,  G01N33/00 ,  G01N1/10 ,  C23C14/34 ,  C23C14/10

Abstract: An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.

公开(公告)号：US20160291208A1

公开(公告)日：2016-10-06

申请号：US15078495

申请日：2016-03-23

Applicant: Moxtek, Inc. ,  Brigham Young University

Inventor： Ted Wangensteen ,  Stew Nielson ,  Fred Lane ,  Matt Linford ,  Anubhav Diwan

IPC: G02B1/14 ,  G02B1/04 ,  C09D5/08 ,  B05D5/08 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  C23C16/32 ,  G02B5/30 ,  C23C16/455

CPC classification number: G02B1/14 ,  B05D1/60 ,  B05D5/08 ,  B05D2350/63 ,  C09D5/084 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45555 ,  G02B1/04 ,  G02B5/3058

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

Abstract translation: 线栅偏振器（WGP）可以具有保形涂层以保护WGP免受氧化和/或腐蚀。 共形涂层可以包括具有至少一种：氧化铝，氧化硅，氮化硅，氮氧化硅，碳化硅，氧化铪和氧化锆的阻挡层。 制造WGP的方法可以包括通过气相沉积在WGP的肋上施加阻挡层。

公开(公告)号：US11555953B2

公开(公告)日：2023-01-17

申请号：US16992423

申请日：2020-08-13

Applicant: Moxtek, Inc.

Inventor： Anubhav Diwan ,  Bradley R. Williams ,  R. Stewart Nielson

IPC: G02B5/30 ,  G02B1/00 ,  G02F1/1335

Abstract: An optical device can comprise wires 12 on a face of a substrate 11, with channel(s) 13 between adjacent wires 12. Each wire 12 can include embedded organic moieties. Each wire 12 can include multiple ribs 31. Part or all of the wire 12, the substrate 11, or both can have a high refractive index n and a low extinction coefficient k. The optical device can have reduced separation of layers of different materials during flexing and temperature changes. The optical device can be manufactured by a method designed for improved manufacturability.