摘要:
A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate supporting member supporting substrates within the processing vessel, the processing fluid supplying section supplying to the processing vessel, the processing fluid for performing processing such as cleaning processing on the substrates, a processing fluid exhausting section exhausting processing fluid from the processing vessel, and a drying fluid supplying section supplying, to the processing vessel, the liquid drops of drying fluid for performing drying processing on the substrates.
摘要:
A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
摘要:
A device for processing a substrate comprises a processing vessel (1), an outer vessel (2) for surrounding the processing vessel (1) which outer vessel (2) can be sealed, a first supporting member (4) for bringing the substrate (3) into and out from the processing vessel (1) which first supporting member (4) supports the substrate (3) in a standing manner, and a second supporting member (5) for transferring the substrate (3) between the first supporting member (4) which second supporting member (5) is movable up and down within the processing vessel (1). The device processes the entire surface of the substrate (3) uniformly and prevents varying in processing from occurrence.
摘要:
A first laminate layer block having a bolt fixing unit laminated/fixed by caulking a plurality of steel plates having lug metals protruding diametrically and a second laminate layer block laminated/fixed by caulking a plurality of steel plates not having lug metals are rolled and laminate on part of a steel plate, and are welded on the surfaces of their side surface in a laminate direction to be laminated and integrated. Accordingly, it is possible to prevent the axial force of the fixed bolt from being lowered due to thermal shock of a stator to decrease the occurrence of vibration or noise, and reduce vibration or noise by increasing the fixing levels of the stator and a case.
摘要:
A roof tile-integrated solar battery module applicable to many types of roof tiles can be obtained. A roof tile-integrated solar battery module according to the present invention is a module including a solar battery power generating body, and an exterior member accommodating the solar battery power generating body therein and including an upper metal plate and a lower metal plate. A concave portion formed of an upper metal plate insertion portion and a surface of the upper metal plate and opening in a direction to an eaves when the module is provided at a roof, and a fitting portion for connection, for connecting to another module adjacent in a direction intersecting the direction to the eaves, are formed at the upper metal plate. An eaves side insertion portion extending in a direction to a ridge when the module is provided at the roof is formed at the lower metal plate.
摘要:
An equipment-mounting wire harness for mounting on equipment, which includes a shield casing for accommodating a plurality of equipment-side terminals. The equipment-mounting wire harness includes a plurality of wires and metal terminals. Each of the metal terminals includes a terminal connection portion for connecting to the equipment-side terminal and a wire connection portion for connecting to the wire. The wire harness further includes a connector body, a seal ring, a tubular shield member, a tubular shield member and a shield shell. The connector body can be fitted into the mounting hole and is molded to embrace the wire connection portions. The seal ring seals a gap between the connector body and an inner surface of a mounting hole of the shield casing. The tubular shield member collectively covers the wires in a surrounding manner. The shield shell secures an end portion of the shield member to the shield casing.
摘要:
When a motor temperature exceeds a threshold value, a torque control unit reduces a torque control value for a motor generator. A torque limitation control unit determines from torque control value and vehicular speed whether limiting a torque by the torque control unit should be alleviated, and if so the torque limitation control unit activates a signal for a predetermined period of time. When the signal is activated, the torque control unit stops reducing the torque control value and fixes the torque control value to be constant.
摘要:
An insulation inspection apparatus includes a chamber in which a stator with a winding can be stored, an electrode movable along the outer circumference of a coil end of the stator winding, a voltage application unit applying voltage between the coil end and electrode, a sensor unit sensing leakage current and/or voltage drop between the coil end and electrode, and a pressure reduction unit reducing the pressure in the chamber.
摘要:
When a torque control value (TR) is larger than a threshold value and vehicular speed (SV) is lower than a threshold value an upper temperature limit setting unit sets the upper temperature limit of a motor generator at an upper temperature limit (TS2) higher than a normally set upper temperature limit (TS1). A torque limitation control controls limiting a torque of the motor generator, as based on a motor temperature (T) and the upper temperature limit set by the upper temperature limit setting unit.
摘要:
A variable reluctance resolver includes a rotor that rotates about a rotational axis, a plurality of detection coils that detect rotation of the rotor, and a magnetic member that magnetically connects adjacent ones of the detection coils to each other. The magnetic member includes a pair of body portions around which the detection coils are wound, and a connection portion that connects the pair of body portions to each other. Both the body portions and the connection portion have a thin flat shape. The body portions are flat so that a direction of extension of the flat shape is along a rotational axis direction, and the magnetic member has a U shape as viewed from the rotational axis direction.