Method for preparing column spacer

    公开(公告)号:US10859907B2

    公开(公告)日:2020-12-08

    申请号:US15774426

    申请日:2016-09-28

    IPC分类号: G03F1/50 G02F1/1339

    摘要: The present invention relates to a method for preparing a column spacer, and is characterized in using a mask including first, second, and third patterns having different light transmittance. In addition, according to the method for preparing a column spacer of the present invention, a taper angle between a matrix part and a spacer part may increase during manufacturing a column spacer in which the matrix part and the spacer part are continuously connected, and critical dimension of the spacer part may decrease. Therefore, a column spacer with fine patterns may be simply and efficiently manufactured.