公开(公告)号：US20240208085A1

公开(公告)日：2024-06-27

申请号：US18373869

申请日：2023-09-27

Applicant: SEMES CO., LTD.

Inventor： Seung Chan LEE ,  Sun Oh KIM ,  Jeong Woo HAN ,  Ho Young LEE ,  Wang Hyeon SON ,  Woo Sang KWON ,  Dong Hoon YANG ,  Seung Seok HA ,  Seung Jun LEE ,  Gil Do KIM ,  Sang Hoon BAEK ,  Ji Wook KWON

IPC: B25J21/00 ,  F24F3/167

CPC classification number: B25J21/005 ,  F24F3/167

Abstract: Provided are a driving apparatus and an operation method thereof. The driving apparatus includes driving parts driving on a driving path in a clean room in an autonomous driving manner, and handling parts provided on the driving parts and performing a three-dimensional handling operation for an object through flow in multi-directions.

公开(公告)号：US20240077878A1

公开(公告)日：2024-03-07

申请号：US18177957

申请日：2023-03-03

Applicant: SEMES CO., LTD.

Inventor： Seung Jun LEE ,  Seung Seok HA ,  In Sung CHOI ,  Gil Do KIM

IPC: G05D1/02 ,  B65G1/137 ,  H01L21/677

CPC classification number: G05D1/0238 ,  B65G1/1373 ,  H01L21/67724 ,  H01L21/67733

Abstract: The inventive concept provides a transfer robot system. Embodiments of the inventive concept provide a transfer robot system and a transfer robot system driving method in which a bottleneck phenomenon of mobile robots may be prevented, as a new obstacle which does not exist within a map for a mobile robot is recognized in advance during an autonomous driving of the mobile robot and the new obstacle is not passed through. The transfer robot system includes an OHT for transferring an article by autonomously driving along a rail and having a bottom side distance detection sensor installed for generating a distance information of below; and a mobile robot for transferring the article by autonomously driving on the ground and autonomously driving while avoiding an obstacle information generated through the distance information.

公开(公告)号：US20250068080A1

公开(公告)日：2025-02-27

申请号：US18743089

申请日：2024-06-13

Applicant: SEMES CO., LTD.

Inventor： Kyung Taek IM ,  Jae Ha KIM ,  Seung Hwan LEE ,  Seung Jun LEE

IPC: G03F7/38 ,  H01L21/67

Abstract: Provided is a substrate treatment apparatus including: a cooling chamber accommodating a substrate; and a cooling unit disposed inside the cooling chamber, the cooling unit including a support, two first plates connected to the support to support the substrate and spaced apart from each other in a height direction of the support, and a second plate disposed to move up and down between the two first plates.

公开(公告)号：US20230195126A1

公开(公告)日：2023-06-22

申请号：US18085301

申请日：2022-12-20

Applicant: SEMES CO., LTD.

Inventor： Seung Seok HA ,  In Sung CHOI ,  Seung Jun LEE

IPC: G05D1/02 ,  G06T7/50

CPC classification number: G05D1/0214 ,  G05D1/0246 ,  G05D1/0238 ,  G06T7/50 ,  G05D2201/0216 ,  G06T2207/10028 ,  G06T2207/20024 ,  G06T2207/30261

Abstract: A method of operating a mobile robot for transporting an article in a manufacturing facility, the mobile robot, and an article transport system including the same are proposed. The method of operating the mobile robot includes obtaining a 3-D depth image, extracting, from the 3-D depth image, a region of interest corresponding to a traveling path of the mobile robot on a bottom surface of the manufacturing facility, generating a projected point cloud by projecting an object detected from the region of interest on a reference plane corresponding to the bottom surface, generating an imaginary point cloud filled with voxels in the reference plane, detecting a hole existing in the bottom surface by comparing the imaginary point cloud to the projected point cloud, and travelling while avoiding the hole.