Abstract:
Exemplary embodiments of the present invention provide a substrate recycling method and a recycled substrate. The method includes separating a substrate having a first surface from an epitaxial layer, performing a first etching of the first surface using electrochemical etching, and performing, after the first etching, a second etching of the first surface using chemical etching, dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface.
Abstract:
A light emitting diode includes an N-type GaN-based semiconductor compound layer, a P-type GaN-based semiconductor compound layer, and an active region disposed between the P-type and N-type layers, the active region comprising alternately laminated well layers and barrier layers. The well layers comprise AlxInyGa1−(x+y)N, where 0≦x, y≦1, the barrier layers comprise AlxInyGa1−(x+y)N, where 0≦x, y≦1, and at least one of the barrier layers comprises first and second layers having different compositions.
Abstract translation:发光二极管包括N型GaN基半导体化合物层,P型GaN基半导体化合物层和设置在P型和N型层之间的有源区,活性区包括交替层叠的 层和阻挡层。 阱层包括Al x In y Ga 1-(x + y)N,其中0≤x,y≤1,势垒层包括Al x In y Ga 1-(x + y)N,其中0≤x,y≤1,以及至少一个 阻挡层包括具有不同组成的第一和第二层。