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公开(公告)号：US11417827B2
公开(公告)日：2022-08-16
申请号：US16215821
申请日：2018-12-11
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/00 , H01L41/113 , H01L41/047 , H01L41/22 , H02N2/18 , H01L41/053 , H01L41/187 , H01L41/25 , H01L41/29 , H01L41/332
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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Patent Agency Ranking
公开(公告)号：US09588075B2
公开(公告)日：2017-03-07
申请号：US14200576
申请日：2014-03-07
Applicant: STMicroelectronics S.r.l.
IPC: C25D17/00 , G01N27/30 , G01N27/333 , G01N27/416
CPC classification number: G01N27/302 , G01N27/3335 , G01N27/4167
Abstract: The present disclosure relates to a sensor for detecting hydrogen ions in an aqueous solution comprising a support, a reference electrode, a working electrode and a counter electrode supported by said support, the reference electrode being made of a material comprising silver and silver chloride, the counter electrode being made of a conductive material. The working electrode comprises a substrate and a layer made of an inherently electrically conductive polymer of the polythiophene or polyaniline (PANI) or polypyrrole class.
Abstract translation: 本发明涉及一种用于检测水溶液中氢离子的传感器，包括载体，参比电极，工作电极和由所述载体支撑的对电极，参比电极由包含银和氯化银的材料制成， 对电极由导电材料制成。 工作电极包括基底和由聚噻吩或聚苯胺（PANI）或聚吡咯类的固有导电聚合物制成的层。
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公开(公告)号：US12058938B2
公开(公告)日：2024-08-06
申请号：US17722713
申请日：2022-04-18
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H10N30/30 , H02N2/18 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/853 , H10N30/87 , H10N30/88
CPC classification number: H10N30/308 , H02N2/186 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/304 , H10N30/8554 , H10N30/87 , H10N30/88
Abstract: A process for manufacturing a MEMS piezoelectric device includes: forming a membrane at a first surface of wafer of semiconductor material further having a second surface (the first and second surfaces being opposite along a vertical axis and extending parallel to a horizontal plane formed by first and second horizontal axes); forming a cavity within the wafer so that the membrane is suspended above the cavity; forming a piezoelectric material layer above a first surface of the membrane; forming an electrode arrangement in contact with the piezoelectric material layer; and forming a proof mass coupled to a second surface of the membrane opposite to the first surface along the vertical axis. The proof mass deforms the membrane in response to environmental mechanical vibrations. Forming the proof mass includes forming a connection element at a central position between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US10186654B2
公开(公告)日：2019-01-22
申请号：US15163230
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/09 , H01L41/053 , H01L41/22 , H01L41/113 , H01L41/047 , H02N2/18 , H01L41/187 , H01L41/25 , H01L41/29 , H01L41/332
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US20170186940A1
公开(公告)日：2017-06-29
申请号：US15163230
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/113 , H01L41/053 , H01L41/332 , H01L41/25 , H01L41/29 , H01L41/047 , H01L41/187
CPC classification number: H01L41/1138 , H01L41/047 , H01L41/053 , H01L41/1134 , H01L41/1876 , H01L41/22 , H01L41/25 , H01L41/29 , H01L41/332 , H02N2/186
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US20140251805A1
公开(公告)日：2014-09-11
申请号：US14200576
申请日：2014-03-07
Applicant: STMicroelectronics S.r.l.
IPC: G01N27/30
CPC classification number: G01N27/302 , G01N27/3335 , G01N27/4167
Abstract: The present disclosure relates to a sensor for detecting hydrogen ions in an aqueous solution comprising a support, a reference electrode, a working electrode and a counter electrode supported by said support, the reference electrode being made of a material comprising silver and silver chloride, the counter electrode being made of a conductive material. The working electrode comprises a substrate and a layer made of an inherently electrically conductive polymer of the polythiophene or polyaniline (PANI) or polypyrrole class.
Abstract translation: 本发明涉及一种用于检测水溶液中氢离子的传感器，包括载体，参比电极，工作电极和由所述载体支撑的对电极，参比电极由包含银和氯化银的材料制成， 对电极由导电材料制成。 工作电极包括基底和由聚噻吩或聚苯胺（PANI）或聚吡咯类的固有导电聚合物制成的层。
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