公开(公告)号：US20140238963A1

公开(公告)日：2014-08-28

申请号：US14021420

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Jun Ho JO ,  Doh-Hyoung LEE

IPC: B23K26/067 ,  B23K26/30 ,  B23K26/12

CPC classification number: B23K26/127 ,  B23K26/0652 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/359 ,  B23K26/361 ,  B23K26/703

Abstract: A mask manufacturing apparatus includes a chamber, a laser beam irradiator, a stage, a cooling system, and a fan. The chamber provides an interior space therein. At least an upper wall of the chamber comprises a glass. The laser beam irradiator is disposed outside the chamber and configured to divide a laser beam into a plurality of sub-laser beams to irradiate the sub-laser beams onto a shadow mask material. The stage is disposed in the chamber and the shadow mask material is placed on the stage. The cooling system is configured cool the interior space. The fan configured to discharge heat generated in the interior space of the chamber to the outside of the chamber. Therefore, the shadow mask may be protected from overheating.

Abstract translation: 掩模制造装置包括室，激光束照射器，台，冷却系统和风扇。 该室在其中提供内部空间。 至少室的上壁包括玻璃。 激光束照射器设置在室外，并被配置为将激光束分成多个子激光束，以将子激光束照射到荫罩材料上。 将该台设置在该室中，并将该荫罩材料放置在该台上。 冷却系统配置冷却内部空间。 风扇构造成将在室的内部空间中产生的热量排出到室的外部。 因此，可以防止荫罩过热。

公开(公告)号：US20140291306A1

公开(公告)日：2014-10-02

申请号：US14021700

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung LEE ,  Jun Ho JO

IPC: B23K26/00 ,  C23C16/04

CPC classification number: B23K26/0093 ,  B23K26/0648 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/127 ,  B23K26/364 ,  B23K26/40 ,  B23K2101/18 ,  B23K2103/04 ,  B23K2103/05 ,  B23K2103/50 ,  C23C14/042 ,  C23C16/042

Abstract: A mask substrate that includes a first area and a second area surrounding the first area is provided. Then, a laser beam is irradiated on the mask substrate to at least partly remove a material of the second area. After that, a physical force is applied to the mask substrate to separate the first area from the mask substrate thereby forming an opening through the mask substrate.

Abstract translation: 提供了包括第一区域和围绕第一区域的第二区域的掩模基板。 然后，将激光束照射在掩模基板上，以至少部分地去除第二区域的材料。 之后，对掩模基板施加物理力以将第一区域与掩模基板分离，从而形成通过掩模基板的开口。

公开(公告)号：US20140177055A1

公开(公告)日：2014-06-26

申请号：US14085280

申请日：2013-11-20

Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e. V. ,  Samsung Display Co., Ltd.

Inventor： Doh-Hyoung LEE ,  Choong-Ho LEE ,  Sung-Sik YUN ,  Tong-Jin PARK

IPC: H01S3/10

CPC classification number: B23K26/0604 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/066 ,  B23K26/38 ,  G02B26/0808 ,  G02B26/0816 ,  G02B27/0911

Abstract: A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask.

Abstract translation: 激光加工装置包括：激光发生器，其产生激光束;衍射光学元件，其将由激光发生器产生的激光束分割为多个子激光束;以及光束间隙调整器，其调整相邻光束之间的间隙 的多个子激光束。 因此，通过将由激光发生器产生的激光束分割成多个子激光束的衍射光学元件和用于调整多个子激光束之间的间隙的光束间隙调整器，将激光加工装置 可以在提高荫罩的处理速度的同时，在荫罩中形成各种分辨率的处理图案。

公开(公告)号：US20140217646A1

公开(公告)日：2014-08-07

申请号：US14021489

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung LEE ,  Jun Ho JO

IPC: G03F7/20

CPC classification number: G03F1/76 ,  B23K26/067 ,  G03F7/2053 ,  G03F7/70383 ,  G03F7/70875

Abstract: A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.

Abstract translation: 掩模制造装置包括激光照射器，台架，框架和散热片。 激光照射器将激光束分割成多个子激光束，并将副激光束照射到放置在台上的荫罩材料。 框架设置在舞台上以支撑荫罩材料。 散热片与荫罩材料接触，吸收由荫罩材料产生的热量，并将热量散发到荫罩材料的周围。 因此，防止荫罩材料过热。