FERROELECTRIC MEMORY DEVICE
    5.
    发明公开

    公开(公告)号:US20230165012A1

    公开(公告)日:2023-05-25

    申请号:US18049366

    申请日:2022-10-25

    CPC classification number: H01L27/1159

    Abstract: A ferroelectric memory device according to the inventive concept includes a substrate having source/drain regions, an interface layer on the substrate, a high dielectric layer on the interface layer, a ferroelectric layer on the high dielectric layer, and a gate electrode layer on the ferroelectric layer. The high dielectric layer and the ferroelectric layer have phases of different crystal structures.

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