SEMICONDUCTOR DEVICE HAVING VERTICAL CHANNELS AND METHOD OF MANUFACTURING THE SAME
    2.
    发明申请
    SEMICONDUCTOR DEVICE HAVING VERTICAL CHANNELS AND METHOD OF MANUFACTURING THE SAME 审中-公开
    具有垂直通道的半导体器件及其制造方法

    公开(公告)号:US20170032969A1

    公开(公告)日:2017-02-02

    申请号:US15292884

    申请日:2016-10-13

    Abstract: A method of manufacturing a semiconductor device which can prevent leakage current caused by gate electrodes intersecting element isolation layers in a major axis of an active region, and which further has vertical channels to provide a sufficient overlap margin, and a semiconductor device manufactured using the above method. The device includes gate electrodes formed on element isolation layers that are disposed between active regions and have top surfaces that are higher than the top surfaces of the active regions. Since the gate electrodes are formed on the element isolation layers, leakage current in a semiconductor substrate is prevented. In addition, the gate electrodes are formed using a striped shape mask pattern, thereby obtaining a sufficient overlap margin compared to a contact shape or bar shape pattern.

    Abstract translation: 一种制造半导体器件的方法,该半导体器件能够防止由有源区的长轴与元件隔离层相交的栅电极引起的泄漏电流,并且还具有垂直沟道以提供足够的重叠余量;以及使用上述制造的半导体器件 方法。 该器件包括形成在元件隔离层上的栅电极,它们设置在有源区之间并具有高于有源区顶表面的顶表面。 由于栅电极形成在元件隔离层上,所以防止了半导体衬底中的漏电流。 此外,使用条纹形掩模图案形成栅电极,从而与接触形状或条形图案相比获得足够的重叠余量。

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