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    Ink jet recording head including a cap member sealing piezoelectric vibrators
    6.
    发明授权
    Ink jet recording head including a cap member sealing piezoelectric vibrators 失效
    喷墨记录头包括密封压电振动器的盖构件

    公开(公告)号：US06332672B1

    公开(公告)日：2001-12-25

    申请号：US09069991

    申请日：1998-04-30

    申请人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

    发明人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

    IPC分类号： B41J2045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14387

    摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.

    摘要翻译： 一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器 形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。

    Liquid-jet head and method of producing the same and liquid injection device
    7.
    发明申请
    Liquid-jet head and method of producing the same and liquid injection device 有权
    喷液头及其制造方法和液体注射装置

    公开(公告)号：US20060290747A1

    公开(公告)日：2006-12-28

    申请号：US10573356

    申请日：2004-09-24

    申请人： Masato Shimada ,  Shiro Yazaki ,  Tsutomu Nishiwaki ,  Akihito Tsuda ,  Masataka Yamada

    发明人： Masato Shimada ,  Shiro Yazaki ,  Tsutomu Nishiwaki ,  Akihito Tsuda ,  Masataka Yamada

    IPC分类号： B41J2/045

    CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： There are provided a liquid-jet head which can reliably prevent breakage of piezoelectric elements over a long period of time, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. Further, there are provided a liquid-jet head which can effectively prevent a drop in the amount of displacement of a vibration plate caused through drive of a piezoelectric element, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. A liquid-jet head includes a channel substrate 10 which has pressure generation chambers 12 formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements 300 each of which is composed of a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80 and which are disposed on one surface of the channel substrate 10 via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric elements 300 are covered with an insulating film 100 formed of an inorganic insulating material.

    摘要翻译： 提供了能够可靠地防止压电元件长时间破裂的液体喷射头，以及喷液头的制造方法以及喷液装置。 此外，还提供了一种液体喷射头，其能够有效地防止由压电元件的驱动引起的振动板的位移量的下降，以及液体喷射头的制造方法， 喷气机 液体喷射头包括：通道基板10，其具有形成在其中的压力产生室12和用于喷射液滴的连通喷嘴孔;以及压电元件300，每个压电元件由下电极60，压电层70和上 电极80，其经由振动板设置在通道基板10的一个表面上，其中构成压电元件300的各层的至少图案区域被由无机绝缘材料形成的绝缘膜100覆盖。

    Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer
    9.
    发明授权
    Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer 有权
    制造压电元件的方法，压电元件，喷墨记录头和打印机

    公开(公告)号：US06639340B1

    公开(公告)日：2003-10-28

    申请号：US09549209

    申请日：2000-04-13

    申请人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

    发明人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

    IPC分类号： H01L4108

    CPC分类号： H01L41/0805 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318

    摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.

    摘要翻译： 提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。 压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。 利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

    Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head
    10.
    发明授权
    Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head 失效
    压电致动器，喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法

    公开(公告)号：US06402304B1

    公开(公告)日：2002-06-11

    申请号：US09372990

    申请日：1999-08-12

    申请人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

    发明人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

    IPC分类号： B41J2045

    CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1645 ,  B41J2002/14387 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/317

    摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.

    摘要翻译： 提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。 压电致动器的面积可以扩大，并且具有平坦的顶表面。 本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。 压电致动器包括设置在下电极和上电极之间的压电膜。 构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。 制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。