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    Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof
    6.
    发明授权
    Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof 有权
    压电元件，液体喷射头，液体喷射装置及其制造方法

    公开(公告)号：US08632168B2

    公开(公告)日：2014-01-21

    申请号：US13225301

    申请日：2011-09-02

    申请人： Chikara Kojima ,  Eiju Hirai

    发明人： Chikara Kojima ,  Eiju Hirai

    IPC分类号： H01L41/00 ,  H02N2/00 ,  B41J2/045

    CPC分类号： H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/047 ,  H01L41/29

    摘要： A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.

    摘要翻译： 提供了具有改进的可靠性的压电元件，液体喷射头和液体喷射装置。 还提供了制造方法。 压电元件包括​​在第一表面具有凹陷的振动板，形成在凹部中的第一电极，形成在振动板上的压电层和第一电极，以及形成在压电层上的第二电极， 的第一电极与第一表面一起形成连续的平坦表面。

    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS
    7.
    发明申请
    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 有权
    液体喷射和液体喷射装置

    公开(公告)号：US20120007929A1

    公开(公告)日：2012-01-12

    申请号：US13178378

    申请日：2011-07-07

    申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

    发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2202/18

    摘要： A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.

    摘要翻译： 一种液体喷射头，包括：压力室基板，其中设置有与喷嘴孔连通的压力室;以及压电元件，包括第一导电层，压电材料层和第二导电层，其中压电元件具有重叠区域 其与所述压力室，所述第一导电层，所述压电材料层和所述第二导电层重叠，其中所述第二导电层连续地与多个所述压力室重叠，其中，所述第一导电层设置在每个所述重叠区域 并且在纵向方向上的重叠区域的一端侧具有端部区域，并且其中当端部区域指向纵向方向的末端时，端部区域的宽度在横向方向上变窄。

    Method for manufacturing piezoelectric element and method for manufacturing liquid ejection head
    9.
    发明授权
    Method for manufacturing piezoelectric element and method for manufacturing liquid ejection head 有权
    制造压电元件的方法和液体喷射头的制造方法

    公开(公告)号：US08914955B2

    公开(公告)日：2014-12-23

    申请号：US13178389

    申请日：2011-07-07

    申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

    发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

    IPC分类号： H04R17/00 ,  H01L41/332 ,  B41J2/14 ,  B41J2/16 ,  H01L41/29

    CPC分类号： H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/29 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908

    摘要： A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region, a process for forming a second conductive layer, which overlaps with the region, a process for forming a third conductive layer, which overlaps with the region, on the second conductive layer, a process for forming an opening portion that divides the third conductive layer into a first portion and a second portion, a process for forming a resist layer that covers the opening portion and a peripheral portion at the side of the opening portion of the first portion and the second portion; a process for etching the third conductive layer to form a first conductive portion and a second conductive portion, and a process for etching the second conductive layer to form a third conductive portion.

    摘要翻译： 压电元件的制造方法包括形成第一导电层的工序，形成具有作为有源区的区域的压电层的工序，与该区域重叠的第二导电层的形成工序，工序 用于在所述第二导电层上形成与所述区域重叠的第三导电层，形成将所述第三导电层分成第一部分和第二部分的开口部分的工艺，形成覆盖所述第三导电层的抗蚀剂层的工艺 所述开口部分和在所述第一部分的开口部分和所述第二部分的一侧的周边部分; 用于蚀刻第三导电层以形成第一导电部分和第二导电部分的工艺，以及用于蚀刻第二导电层以形成第三导电部分的工艺。

    Liquid ejecting head and liquid ejecting apparatus
    10.
    发明授权
    Liquid ejecting head and liquid ejecting apparatus 有权
    液体喷头和液体喷射装置

    公开(公告)号：US08752938B2

    公开(公告)日：2014-06-17

    申请号：US12974800

    申请日：2010-12-21

    申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

    发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

    IPC分类号： B41J2/045

    CPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

    摘要翻译： 液体喷射头包括具有压力产生室的流路形成基板，该压力产生室与喷嘴开口连通并且沿着横向方向平行布置。 压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。 在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是压电层的实质驱动部分的非活动部分之间的边界中，第一电极包括锥形部分 宽度从有效部分侧朝向边界逐渐减小。