公开(公告)号：US20090165872A1

公开(公告)日：2009-07-02

申请号：US12226416

申请日：2006-06-02

申请人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

发明人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

IPC分类号： F15C1/06

CPC分类号： F17D1/04 ,  Y10T137/87177 ,  Y10T137/87885

摘要： A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

摘要翻译： 气体供给单元和气体供给系统，其尺寸小且便宜。 气体供应单元安装在操作气体输送管道上，并具有通过流路块连接并控制操作气体的流体控制装置。 气体供应单元具有第一流路块，其一侧包括在流体控制装置中的入口打开/关闭阀，并且还具有第二流路块，其一侧包括一个净化阀 流体控制装置被连接。 第一流路块和第二流路块在与操作气体的输送方向垂直的方向上分层。 入口打开/关闭阀和净化阀布置在安装在操作气体输送管线上的质量流量控制器和安装单元的安装表面之间。

公开(公告)号：US08104516B2

公开(公告)日：2012-01-31

申请号：US12226416

申请日：2006-06-02

申请人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

发明人： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

IPC分类号： F16K11/10

CPC分类号： F17D1/04 ,  Y10T137/87177 ,  Y10T137/87885

摘要： A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

摘要翻译： 气体供给单元和气体供给系统，其尺寸小且便宜。 气体供应单元安装在操作气体输送管道上，并具有通过流路块连接并控制操作气体的流体控制装置。 气体供应单元具有第一流路块，其一侧包括在流体控制装置中的入口打开/关闭阀，并且还具有第二流路块，其一侧包括一个净化阀 流体控制装置被连接。 第一流路块和第二流路块在与操作气体的输送方向垂直的方向上分层。 入口打开/关闭阀和净化阀布置在安装在操作气体输送管线上的质量流量控制器和安装单元的安装表面之间。

公开(公告)号：US20070295405A1

公开(公告)日：2007-12-27

申请号：US11812051

申请日：2007-06-14

申请人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

发明人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

IPC分类号： F16K3/36

CPC分类号： F16K27/003 ,  F16K7/14 ,  F16K31/06 ,  H01L21/31691 ,  Y10T137/4259 ,  Y10T137/87885

摘要： A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.

摘要翻译： 用于蒸发器的液体原料供应单元适于将液体原料供应到蒸发液体原料的蒸发器。 该单元包括：内部形成有流动通道的歧管; 以及安装在所述歧管上的多个流体控制阀，其中，所述多个流体控制阀包括：液体原料控制阀，用于控制所述液体原料供给所述流路; 清洗液控制阀，用于控制向所述流路供给清洗液; 吹扫气体控制阀，用于控制向所述流动通道供应净化气体; 以及可连接到蒸发器的第一引入控制阀，用于控制从流动通道到蒸发器的流体供应，吹扫气体控制阀，清洗溶液控制阀，液体原料控制阀和第一引入控制阀是 从歧管的上游侧依次安装在歧管上，其中流路分别连接到多个控制阀的阀口，与各个控制阀的阀口连通的阀口，流路是 被配置为允许从净化气体控制阀提供的净化气体直接流入清洗液控制阀的阀口和设置在净化气体控制阀下游的液体原料控制阀。

公开(公告)号：US07343926B2

公开(公告)日：2008-03-18

申请号：US11812051

申请日：2007-06-14

申请人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

发明人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

IPC分类号： F16K51/00

CPC分类号： F16K27/003 ,  F16K7/14 ,  F16K31/06 ,  H01L21/31691 ,  Y10T137/4259 ,  Y10T137/87885

摘要： A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.

摘要翻译： 用于蒸发器的液体原料供应单元适于将液体原料供应到蒸发液体原料的蒸发器。 该单元包括：内部形成有流动通道的歧管; 以及安装在所述歧管上的多个流体控制阀，其中，所述多个流体控制阀包括：液体原料控制阀，用于控制所述液体原料供给所述流路; 清洗液控制阀，用于控制向所述流路供给清洗液; 吹扫气体控制阀，用于控制向所述流动通道供应净化气体; 以及可连接到蒸发器的第一引入控制阀，用于控制从流动通道到蒸发器的流体供应，吹扫气体控制阀，清洗溶液控制阀，液体原料控制阀和第一引入控制阀是 从歧管的上游侧依次安装在歧管上，其中流路分别连接到多个控制阀的阀口，与各个控制阀的阀口连通的阀口，流路是 被配置为允许从净化气体控制阀提供的净化气体直接流入清洗液控制阀的阀口和设置在净化气体控制阀下游的液体原料控制阀。

公开(公告)号：US07353841B2

公开(公告)日：2008-04-08

申请号：US11295649

申请日：2005-12-07

申请人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

发明人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

IPC分类号： G05D11/13 ,  G05D16/20

CPC分类号： G05D16/206 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/87877

摘要： Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

摘要翻译： 提供一种相对压力控制系统具有简单的结构，但是能够精确地调节操作气体的分配比，并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀，其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器，其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个通常打开的硬联锁电磁阀。 在这种构造中，调节多个气动阀中的指定的一个的开度，以预定的分配比率输出操作气体。

公开(公告)号：US20060097644A1

公开(公告)日：2006-05-11

申请号：US11295649

申请日：2005-12-07

申请人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

发明人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

IPC分类号： H01J7/24

CPC分类号： G05D16/206 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/87877

摘要： Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

摘要翻译： 提供一种相对压力控制系统具有简单的结构，但是能够精确地调节操作气体的分配比，并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀，其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器，其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个正常打开的硬联锁电磁阀。 在这种构造中，调节多个气动阀中的指定的一个的开度，以预定的分配比率输出操作气体。

公开(公告)号：US20070295401A1

公开(公告)日：2007-12-27

申请号：US11660860

申请日：2005-09-05

申请人： Katsuya Okumura ,  Hiroshi Itafuji ,  Hiroki Doi ,  Yasunori Nishimura

发明人： Katsuya Okumura ,  Hiroshi Itafuji ,  Hiroki Doi ,  Yasunori Nishimura

IPC分类号： G05D11/00

CPC分类号： F16K27/003 ,  F15B13/0807 ,  Y10T29/49405 ,  Y10T137/2587

摘要： The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.

摘要翻译： 本发明的目的是提供一种能够减少压力损失，提供非常长的流动路径和复杂的流动路径并实现减轻重量的流路块及其制造方法。 流路块（1）包括形成有通孔（21）的块体（11）和与通孔（21）连通的槽（22）和覆盖槽（22）的盖构件（12）。 槽（22）可以通过切削工具以任何深度和宽度形成，以减少压力损失。 槽（22）也可以通过切割工具形成为长形状，使得当凹槽（22）被盖构件（12）覆盖时，可以提供非常长的流动路径。 槽（22）可以通过切削工具自由地形成以提供复杂的流动路径。 此外，可以减小块体（11）的厚度，以实现重量减轻。

公开(公告)号：US07716993B2

公开(公告)日：2010-05-18

申请号：US12223808

申请日：2007-02-22

申请人： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

发明人： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

IPC分类号： G01F1/00 ,  G01F25/00 ,  G01F1/34

CPC分类号： G01F1/383 ,  G01F1/50 ,  G01F15/005 ,  G01F25/0007 ,  Y10T137/0379 ,  Y10T137/87249

摘要： A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.

摘要翻译： 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。

公开(公告)号：US20090019943A1

公开(公告)日：2009-01-22

申请号：US12223808

申请日：2007-02-22

申请人： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

发明人： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

IPC分类号： G01F1/00

CPC分类号： G01F1/383 ,  G01F1/50 ,  G01F15/005 ,  G01F25/0007 ,  Y10T137/0379 ,  Y10T137/87249

摘要： A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.

摘要翻译： 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。

公开(公告)号：US06972602B2

公开(公告)日：2005-12-06

申请号：US10829298

申请日：2004-04-22

申请人： Tetsuya Akamatsu ,  Hiroki Doi ,  Masanori Inamori

发明人： Tetsuya Akamatsu ,  Hiroki Doi ,  Masanori Inamori

IPC分类号： H03K17/22 ,  H03K17/687 ,  H03L7/00

CPC分类号： H03K17/223

摘要： A power-on reset circuit comprises a power supply voltage detection circuit that detects a rise of a power supply voltage and that changes a logic level of a first internal node; a capacitor charge/discharge circuit that charges and discharges a capacitor according to the first internal node level and that in an event that the power supply voltage is reduced, discharges the capacitor to follow the event; and a reset pulse generation circuit that before the power supply voltage rises higher than the predetermined voltage, outputs a first output voltage to an output node and that after the power supply voltage has risen higher than the predetermined voltage, outputs a second output voltage to the output node upon detecting that a charge level of the capacitor has become higher than a charge level detection voltage.

摘要翻译： 上电复位电路包括电源电压检测电路，其检测电源电压的上升并改变第一内部节点的逻辑电平; 电容器充电/放电电路，其根据第一内部节点电平对电容器进行充电和放电，并且在电源电压降低的情况下，对电容器进行放电以跟随事件; 以及复位脉冲发生电路，其在电源电压上升到高于预定电压之前，向输出节点输出第一输出电压，并且在电源电压上升到高于预定电压之后，向第二输出电压输出第二输出电压 检测到电容器的电荷水平已经变得高于充电电平检测电压。