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公开(公告)号：US07459325B2
公开(公告)日：2008-12-02
申请号：US11029985
申请日：2005-01-05
IPC分类号： H01L21/00
CPC分类号： G02B1/14 , B81B3/0005 , B81C1/0096 , B81C2201/112 , B82Y30/00 , G02B1/105 , G02B26/0833 , H01L23/26 , H01L2924/0002 , H01L2924/00
摘要： Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
摘要翻译： 有机表面活性剂用于钝化MEMS器件的表面，例如数字微镜。 这些表面活性剂与表面的结合通过首先与元素周期表的IVB，VB和IVB族元素的表面过渡金属原子或离子缔合来改善。
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公开(公告)号：US07410820B2
公开(公告)日：2008-08-12
申请号：US11031655
申请日：2005-01-05
IPC分类号： H01L21/00
CPC分类号： B81B3/0005 , B81B2201/042 , B81C2201/112 , B82Y30/00
摘要： Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.
摘要翻译： 磷酸盐表面活性剂用于钝化MEMS器件的表面，例如数字微镜器件。 表面活性剂从蒸气或溶液中吸附，在器件表面形成自组装的单层膜。 膦酸酯端基（与羧酸酯表面活性剂相比）的较高的结合能改善了所得层的热稳定性。
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公开(公告)号：US20080290325A1
公开(公告)日：2008-11-27
申请号：US12185094
申请日：2008-08-03
IPC分类号： H01B1/00
CPC分类号： B81B3/0005 , B81B2201/042 , B81C2201/112 , B82Y30/00
摘要： Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.
摘要翻译： 磷酸盐表面活性剂用于钝化MEMS器件的表面，例如数字微镜器件。 表面活性剂从蒸气或溶液中吸附，在器件表面形成自组装单层。 膦酸酯端基（与羧酸酯表面活性剂相比）的较高的结合能改善了所得层的热稳定性。
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公开(公告)号：US07651734B2
公开(公告)日：2010-01-26
申请号：US10935949
申请日：2004-09-07
申请人： Simon Joshua Jacobs
发明人： Simon Joshua Jacobs
IPC分类号： C23C16/50
CPC分类号： B81C1/00896 , G02B26/0841
摘要： A method of fabricating a micromechanical device. Several of the micromechanical devices are fabricated 20 on a common wafer. After the devices are fabricated, the sacrificial layers are removed 22 leaving open spaces where the sacrificial layers once were. These open spaces allow for movement of the components of the micromechanical device. The devices optionally are passivated 24, which may include the application of a lubricant. After the devices have been passivated, they are tested 26 in wafer form. After testing 26, any surface treatments that are not compatible with the remainder of the processing steps are removed 28. The substrate wafer containing the completed devices receives a conformal overcoat 30. The overcoat layer is thick enough to project the micromechanical structures, but thin and light enough to prevent deforming the underlying micromechanical structures. Once the devices on the wafer are overcoated, the wafer is separated 32, and the known good devices are cleaned 34 to remove debris left by the dicing process. Once the devices are separated and cleaned, the overcoat may be removed, however, the overcoat typically is left in place to protect the device during the initial stages of the packaging process. Typically the devices are mounted 36 in the package substrate, the overcoat removed 38 from the devices, and the package containing the micromechanical device finished by sealing the package to enclose the device.
摘要翻译： 一种制造微机械装置的方法。 几个微机械器件在公共晶片上制造20。 在器件制造之后，去除牺牲层22，留下牺牲层一次的开放空间。 这些开放空间允许微机械装置的部件移动。 所述装置可选地被钝化24，其可以包括施加润滑剂。 在器件被钝化之后，它们以晶片形式被测试26。 在测试26之后，除去与其余处理步骤不相容的任何表面处理。含有完成的器件的衬底晶片接收共形外涂层30.该外涂层足够厚以使微机械结构突出，但是薄和 光足以防止底层微机械结构变形。 一旦晶片上的器件被覆盖，晶片被分离32，并且已知的良好器件被清洁34以去除由切割工艺留下的残留物。 一旦设备被分离和清洁，可以去除外涂层，然而，外包层通常留在适当位置以在包装过程的初始阶段保护装置。 通常，将器件安装在封装衬底36中，从器件移除外涂层38，并且将包含微机械器件的封装通过密封封装封闭器件而完成。
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公开(公告)号：US20090168136A1
公开(公告)日：2009-07-02
申请号：US11966314
申请日：2007-12-28
申请人： Simon Joshua Jacobs
发明人： Simon Joshua Jacobs
CPC分类号： G02F1/0136 , G02F1/03 , G02F1/13718 , G02F2201/343
摘要： A spatial light modulator comprises a solid-state chiral material disposed between electrodes such that the polarization direction of the polarized light incident thereto can be controlled through an electrical field established between the electrodes.
摘要翻译： 空间光调制器包括设置在电极之间的固态手性材料，使得可以通过在电极之间建立的电场来控制入射到其上的偏振光的偏振方向。
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公开(公告)号：US08436453B2
公开(公告)日：2013-05-07
申请号：US11617459
申请日：2006-12-28
IPC分类号： H01L23/20
CPC分类号： B81B3/0005 , B81B3/0075 , G02B26/0833
摘要： The present application is directed to a reservoir for use with a micro-electromechanical device having a first surface area to be lubricant. The reservoir comprises a solid component with a porous structure having a second surface area. The second surface area is greater than the first surface area. The reservoir also comprises a lubricant capable of reversibly reacting with either the solid component or the first surface area of the micro-electromechanical device.
摘要翻译： 本申请涉及一种与具有第一表面积为润滑剂的微机电装置一起使用的贮存器。 储存器包括具有第二表面积的多孔结构的固体成分。 第二表面积大于第一表面积。 储存器还包括能够与微机电装置的固体组分或第一表面区域可逆地反应的润滑剂。
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7.发明申请MULTILAYERED DEFORMABLE ELEMENT WITH REDUCED MEMORY PROPERTIES IN A MEMS DEVICE 有权在MEMS器件中具有减少的存储器特性的多层可变元件公开(公告)号：US20090231673A1
公开(公告)日：2009-09-17
申请号：US12046598
申请日：2008-03-12
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.
摘要翻译： 用于微机电系统的可变形元件包括芯层和保护层。 保护层能够在操作环境中阻止可变形元件的芯层的不期望的化学成分的组合。
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公开(公告)号：US20080160268A1
公开(公告)日：2008-07-03
申请号：US11617459
申请日：2006-12-28
CPC分类号： B81B3/0005 , B81B3/0075 , G02B26/0833
摘要： The present application is directed to a reservoir for use with a micro-electromechanical device having a first surface area to be lubricant. The reservoir comprises a solid component with a porous structure having a second surface area. The second surface area is greater than the first surface area. The reservoir also comprises a lubricant capable of reversibly reacting with either the solid component or the first surface area of the micro-electromechanical device.
摘要翻译： 本申请涉及一种与具有第一表面积为润滑剂的微机电装置一起使用的贮存器。 储存器包括具有第二表面积的多孔结构的固体成分。 第二表面积大于第一表面积。 储存器还包括能够与微机电装置的固体组分或第一表面区域可逆地反应的润滑剂。
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公开(公告)号：US06746886B2
公开(公告)日：2004-06-08
申请号：US10101669
申请日：2002-03-18
IPC分类号： H01L2156
CPC分类号： G02B1/14 , B81B7/0012 , B81B2201/042 , G02B1/105 , G02B26/0833 , G03B27/42 , G03F7/70291 , G03F7/70983
摘要： A process for protecting a MEMS device used in a UV illuminated application from damage due to a photochemical activation between the UV flux and package gas constituents, formed from the out-gassing of various lubricants and passivants put in the device package to prevent sticking of the MEMS device's moving parts. This process coats the exposed surfaces of the MEMS device and package's optical window surfaces with a metal-halide film to eliminate this photochemical activation and therefore significantly extend the reliability and lifetime of the MEMS device.
摘要翻译： 用于保护在紫外线照射应用中使用的MEMS器件的过程不会由于UV通量和封装气体成分之间的光化学活化而损坏，所述UV通量和封装气体成分由放置在器件封装中的各种润滑剂和钝化剂的排出物形成，以防止粘附 MEMS器件的运动部件。 该方法用金属卤化物膜涂覆MEMS器件和封装的光学窗表面的暴露表面以消除该光化学活化，因此显着地延长了MEMS器件的可靠性和使用寿命。
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公开(公告)号：US06475570B2
公开(公告)日：2002-11-05
申请号：US10036611
申请日：2001-12-31
申请人： Simon Joshua Jacobs
发明人： Simon Joshua Jacobs
IPC分类号： B05D102
CPC分类号： B81C1/0096 , B05D1/60 , B05D5/083 , B81B3/0005 , B81C2201/0181 , B81C2201/112
摘要： A method and apparatus for delivering a fine mist of a lubricant to a micromechanical device. A mixture 402 of a lubricant and a diluent carrier fluid is held in a supply reservoir 404. The mixture is forced through a nebulizer tip 406 to produce a fine aerosol. A particle selector 408 removes large droplets from the aerosol as the aerosol passes. The aerosol travels a distance through a delivery conduit 410 while the diluent carrier fluid evaporates from the nebulized droplets. The evaporation removes the vast majority of the diluent carrier fluid from the droplets, greatly reducing the size of the lubricant droplets. The evaporated aerosol enters a deposition chamber 412 and is deposited on a micromechanical device 414. The micromechanical devices may be lubricated in wafer form, in which case the lubricant aerosol will lubricate an entire wafer of micromechanical devices at one time. One embodiment produces an aerosol having a mean droplet size of less than 10 microns. Evaporation of the diluent carrier fluid reduces this droplet size to 10-500 nm by the time the lubricant is deposited on the micromechanical devices. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. §1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.
摘要翻译： 一种用于将微细油雾润滑剂输送到微机械装置的方法和装置。 润滑剂和稀释剂载体流体的混合物402被保持在供应容器404中。混合物被迫通过雾化器尖端406以产生细小的气溶胶。 颗粒选择器408随着气溶胶通过而从气溶胶中去除大的液滴。 气雾剂通过输送管道410行进一段距离，同时稀释剂载体流体从喷雾的液滴中蒸发。 蒸发从液滴中除去大部分稀释剂载体流体，大大减小了润滑剂液滴的尺寸。 蒸发的气溶胶进入沉积室412并沉积在微机械装置414上。微机械装置可以以晶片形式润滑，在这种情况下，润滑剂气溶胶将一次润滑整个微机械装置的晶片。 一个实施例产生具有小于10微米的平均液滴尺寸的气溶胶。 润滑剂沉积在微机械装置上时，稀释剂载体流体的蒸发将该液滴尺寸减小到10-500nm。 提交上述摘要的理解是，它只会用于协助从粗略检查中确定37 C.F.R.描述的技术披露的性质和要点。 §1.72（b）。 在任何情况下，本摘要不得用于解释任何专利权利要求的范围。
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