公开(公告)号：US4633085A

公开(公告)日：1986-12-30

申请号：US722778

申请日：1985-04-12

申请人： Takeshi Tomita ,  Yoshiyasu Harada ,  Kimio Ohi

发明人： Takeshi Tomita ,  Yoshiyasu Harada ,  Kimio Ohi

IPC分类号： H01J37/10 ,  H01J37/141 ,  H01J37/26 ,  H01J37/252

CPC分类号： H01J37/26 ,  H01J37/141

摘要： An electron microscope having plural stages of focusing lenses between an objective lens and an electron gun. The magnetic pole piece of the focusing lens of the final stage which is on the side of the objective lens takes a conic form which tapers toward the objective lens. The yoke of the objective lens on the side of the focusing lenses is centrally provided with a conic recess. This structure makes it possible to shorten the distance between the position of the magnetic field produced by an auxiliary lens and the front focal point defined by a front objective lens without introducing interference between the focusing lens of the final stage and the object lens proper. Thus, the observation of an electron micrograph covering a wide field of view facilitates accurate analysis of the physical properties of a designated microscopic region on a specimen.

摘要翻译： 一种具有在物镜和电子枪之间具有多级聚焦透镜的电子显微镜。 位于物镜侧的最后级的聚焦透镜的磁极片呈圆锥形，朝向物镜逐渐变细。 在聚焦透镜一侧的物镜的轭在中央设置有圆锥凹槽。 这种结构使得可以缩短由辅助透镜产生的磁场的位置与由前物镜限定的前焦点之间的距离，而不会引起最终级的聚焦透镜与物镜本体之间的干涉。 因此，观察覆盖宽视野的电子显微镜有助于准确分析样品上指定的微观区域的物理性质。

公开(公告)号：US4810886A

公开(公告)日：1989-03-07

申请号：US140989

申请日：1988-01-05

申请人： Nobufumi Mori ,  Takayuki Katoh ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Takayuki Katoh ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： H01J37/16 ,  H01J37/22 ,  H01J37/26 ,  H01J37/244

CPC分类号： H01J37/224 ,  H01J37/261

摘要： A transmission-type electron microscope using a sensitive two-dimensional sensor in its micrograph-taking section acts as a recording medium for an electron beam. When the sensor is illuminated with an electron beam, it stores the energy of the beam. When the sensor is subsequently illuminated with light, it releases the stored energy as light. In accordance with the invention, at least a portion of the micrograph-taking section includes a member for reducing the amount of x-rays produced or a member for absorbing x-rays to shield the sensor from x-rays.

摘要翻译： 在其显微摄影部分中使用敏感二维传感器的透射型电子显微镜用作电子束的记录介质。 当传感器用电子束照射时，它会存储光束的能量。 当传感器随后用光照射时，它将光能释放储存的能量。 根据本发明，显微摄影部分的至少一部分包括用于减少产生的X射线量的部件或用于吸收x射线的部件，以防止传感器从X射线屏蔽。

公开(公告)号：US4873440A

公开(公告)日：1989-10-10

申请号：US137691

申请日：1987-12-24

申请人： Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

发明人： Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/224

摘要： In a system for outputting an electron microscope image, a two-dimensional sensor for storing electron beam energy thereon is exposed to an electron beam passing through a specimen in a vacuum to have the electron beam energy stored on the two-dimensional sensor, and is then exposed to light or heat to release the stored energy as light emission. The emitted light is photoelectrically detected to obtain image signals, and an electron beam image of the specimen is output on the basis of the image signals. The specimen is divided into a plurality of divisions, and the storage of the electron beam energy is carried out for each of the divisions. The image signals obtained at the divisions are combined to form composite image signals that represent an overall specimen image formed by a group of the divisions, and the image signals at the divisions are corrected so that signal values of the boundary areas of adjacent divisions become approximately equal to each other.

摘要翻译： 在用于输出电子显微镜图像的系统中，用于在其上存储电子束能的二维传感器暴露于在真空中通过样本的电子束，以将电子束能量存储在二维传感器上，并且是 然后暴露于光或热以释放储存的能量作为发光。 发射的光被光电检测以获得图像信号，并且基于图像信号输出样本的电子束图像。 样本被分成多个部分，并且对于每个部分执行电子束能量的存储。 在分割处获得的图像信号被组合以形成表示由一组分割形成的总体样本图像的合成图像信号，并且校正分割处的图像信号，使得相邻分区的边界区域的信号值变为约 相等。

公开(公告)号：US5006707A

公开(公告)日：1991-04-09

申请号：US467479

申请日：1990-01-19

申请人： Nobufumi Mori ,  Masahiro Ohnishi ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Masahiro Ohnishi ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： G01T1/29 ,  H01J37/22 ,  H01J37/244

CPC分类号： H01J37/224 ,  G01T1/2014 ,  H01J2237/2443

摘要： Each of two-dimensional sensors is exposed to an electron beam, which has passed through a sample, in a vacuum in order to store the energy from the electron beam on the two-dimensional sensor, and is then exposed to light or heat in order to release the stored energy as emitted light. The emitted light is photoelectrically detected and an image signal is thereby obtained which represents an electron microscope image of the sample. Read-out conditions which are to be used when the emitted light is detected are determined from an electron beam exposure amount which was set when the energy from the electron beam was stored on each two-dimensional sensor. Signals representing the read-out conditions determined for the two-dimensional sensors are stored in a storage device so that it is clear which read-out conditions correspond to which two-dimensional sensor. When light emitted by a two-dimensional sensor is to be detected, a signal which represents the read-out conditions corresponding to the two-dimensional sensor is read from the storage device, and the read-out conditions are set.

摘要翻译： 每个二维传感器在真空中暴露于已经通过样品的电子束，以将来自电子束的能量存储在二维传感器上，然后依次暴露于光或热 释放存储的能量作为发射光。 发射的光被光电检测，并且由此获得表示样品的电子显微镜图像的图像信号。 当检测到发射光时使用的读出条件是根据在每个二维传感器上存储来自电子束的能量而设定的电子束曝光量来确定的。 表示为二维传感器确定的读出条件的信号被存储在存储装置中，使得清楚哪个读出条件对应于哪个二维传感器。 当要检测由二维传感器发出的光时，从存储装置中读取表示与二维传感器对应的读出条件的信号，并设定读出条件。

公开(公告)号：US4801801A

公开(公告)日：1989-01-31

申请号：US59501

申请日：1987-06-08

申请人： Nobufumi Mori ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

发明人： Nobufumi Mori ,  Junji Miyahara ,  Tetsuo Oikawa ,  Yoshiyasu Harada

IPC分类号： H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  G01N23/04

CPC分类号： H01J37/224 ,  H01J37/26

摘要： A transmission-type electron microscope comprises a lens system including an electron gun for producing an electron beam that is focused and directed to a specimen. The lens system forms a magnified electron optical image of the specimen from the electron beam transmitted through the specimen. A two-dimensional sensor is mounted in the plane in which the magnified image is formed, the sensor acting to store the energy of the electron beam impinging on it and to release the stored energy as light when illuminated with light or heated. An electron beam-deflecting means is mounted in the lens system and acting to tilt the focal plane in which the magnified lens image is formed, in such a way that a straight line extending from the main optical axis of the electron beam between the electron gun and the specimen does not interset the two-dimensional sensor.

摘要翻译： 透射型电子显微镜包括透镜系统，该透镜系统包括用于产生聚焦并指向样本的电子束的电子枪。 透镜系统从通过样品的电子束形成样品的放大电子光学图像。 二维传感器安装在其中形成放大图像的平面中，传感器用于存储电子束的能量照射在其上，并在用光照射或加热时将其作为光释放。 电子束偏转装置安装在透镜系统中，用于使形成放大透镜图像的焦平面倾斜，使得从电子枪的主光轴延伸的直线在电子枪 样品不会混合二维传感器。

公开(公告)号：US3952198A

公开(公告)日：1976-04-20

申请号：US500625

申请日：1974-08-26

申请人： Yoshiyasu Harada ,  Teruo Someya

发明人： Yoshiyasu Harada ,  Teruo Someya

IPC分类号： H01J37/153 ,  H01J37/26

CPC分类号： H01J37/153

摘要： An electron lens system comprising a plurality of quadrupole elements, a plurality of octupole elements for correcting the spherical aberrations of said plurality of quadrupole elements, and an axially symmetric lens, arranged at the inlet or outlet side of said quadrupole and octupole elements for varying the focal length of said lens system so that the excitation currents of said plurality of quadrupole elements remain fixed.

摘要翻译： 包括多个四极元件的电子透镜系统，用于校正所述多个四极元件的球面像差的多个八极元件和布置在所述四极杆和八极元件的入口侧或出口侧的轴对称透镜，用于改变 所述透镜系统的焦距使得所述多个四极元件的激励电流保持固定。