WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR)
    5.
    发明申请
    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR) 审中-公开
    用于制作用于热辅助记录(TAR)的磁记录头滑块中的光通道和光孔结构的波形方法

    公开(公告)号:US20090258186A1

    公开(公告)日:2009-10-15

    申请号:US12101066

    申请日:2008-04-10

    IPC分类号: G03F7/00 B32B3/10

    摘要: A process for forming a plurality of sliders for use in thermally-assisted recording (TAR) disk drives includes a wafer-level process for forming a plurality of aperture structures, and optionally abutting optical channels, on a wafer surface prior to cutting the wafer into individual sliders. The wafer has a generally planar surface arranged into a plurality of rectangularly-shaped regions. In each rectangular region a first metal layer is deposited on the wafer surface, followed by a layer of radiation-transmissive aperture material, which is then lithographically patterned to define the width of the aperture, the aperture width being parallel to the length of the rectangularly-shaped region. A second metal layer is deposited over the patterned layer of aperture material. The resulting structure is then lithographically patterned to define an aperture structure comprising aperture material surrounded by metal and having parallel radiation entrance and exit faces orthogonal to the wafer surface.

    摘要翻译: 用于形成用于热辅助记录(TAR)盘驱动器中的多个滑动件的方法包括在将晶片切割成晶片之前在晶片表面上形成多个孔结构和可选地邻接的光通道的晶片级工艺 个人滑块 晶片具有布置成多个矩形区域的大致平坦的表面。 在每个矩形区域中,第一金属层沉积在晶片表面上,随后是一层辐射透射的孔隙材料,然后将其光刻图案化以限定孔的宽度,孔的宽度平行于矩形的长度 形状区域。 在孔材料的图案化层上沉积第二金属层。 然后将所得结构光刻图案化以限定孔结构,该孔结构包括由金属包围并具有与晶片表面正交的平行辐射入射面和出射面的孔隙材料。

    Magnetic recording system with patterned multilevel perpendicular magnetic recording
    6.
    发明授权
    Magnetic recording system with patterned multilevel perpendicular magnetic recording 失效
    具有图案多层垂直磁记录的磁记录系统

    公开(公告)号:US06906879B1

    公开(公告)日:2005-06-14

    申请号:US10727703

    申请日:2003-12-03

    摘要: A magnetic recording system, such as a magnetic recording disk drive, uses a patterned perpendicular magnetic recording medium where each magnetic block or island contains a stack of individual magnetic cells to provide multilevel recording. Each cell in an island is formed of a material or set of materials to provide the cell with perpendicular magnetic anisotropy and is a single magnetic domain. Each cell is magnetically decoupled from the other cells in its island by nonmagnetic spacer layers. Thus each cell can have a magnetization (magnetic moment) in one of two directions (into or out of the plane of the layer making up the cell), and this magnetization is independent of the magnetization of the other cells in its island, This permits multiple magnetic levels or states to be recorded in each magnetic island.

    摘要翻译: 诸如磁记录盘驱动器的磁记录系统使用图案化的垂直磁记录介质,其中每个磁块或岛包含单个磁性单元的堆叠以提供多级记录。 岛中的每个单元由材料或材料组成,以向单元提供垂直的磁各向异性并且是单个磁畴。 每个单元通过非磁性间隔层与其岛中的其它单元磁耦合。 因此,每个电池可以在两个方向之一(进入或离开构成电池的层的平面)中具有磁化(磁矩),并且该磁化独立于其岛中的其他电池的磁化。这允许 要记录在每个磁岛中的多个磁级或状态。

    Ion beam definition of magnetoresistive field sensors
    7.
    发明授权
    Ion beam definition of magnetoresistive field sensors 失效
    磁阻场传感器的离子束定义

    公开(公告)号:US06884632B2

    公开(公告)日:2005-04-26

    申请号:US10765545

    申请日:2004-01-26

    摘要: A magnetoresistive (MR) sensor can be shaped using ion beam irradiation and/or implantation through a mask introduced between a MR structure and an ion source. The mask covers selected portions of the MR structure to define the track width of the sensor. Ion irradiation and/or implantation reduces the magnetoresistance of the unmasked portions while leaving the masked portion substantially unaltered. The mask can be a photoresist mask, an electron beam resist mask, or a stencil mask. Alternatively the mask may be part of a projection ion beam system. Track width resolution is determined at the mask production step. The edges of the sensor can be defined by a highly collimated ion beam producing an extremely straight transition edge, which reduces sensor noise and improves sensor track width control. Improved hard bias layers that directly abut the sensor may be used to achieve a suitable stability. A variety of longitudinal bias schemes are compatible with ion beam patterning.

    摘要翻译: 可以使用离子束照射和/或通过在MR结构和离子源之间引入的掩模注入来形成磁阻(MR)传感器。 掩模覆盖MR结构的所选部分以限定传感器的轨道宽度。 离子照射和/或注入降低未掩蔽部分的磁阻,同时使掩蔽部分基本上保持不变。 掩模可以是光致抗蚀剂掩模,电子束抗蚀剂掩模或模板掩模。 或者,掩模可以是投影离子束系统的一部分。 轨迹宽度分辨率在掩模生产步骤中确定。 传感器的边缘可以由高度准直的离子束限定,产生非常直的过渡边缘,这降低了传感器噪声并提高了传感器轨道宽度控制。 可以使用直接邻接传感器的改进的硬偏压层来实现合适的稳定性。 各种纵向偏置方案与离子束图案相容。

    Patterned magnetic recording media containing chemically-ordered FePt of CoPt
    8.
    发明授权
    Patterned magnetic recording media containing chemically-ordered FePt of CoPt 有权
    含有化学有序FePt或CoPt的图案化磁记录介质

    公开(公告)号:US06331364B1

    公开(公告)日:2001-12-18

    申请号:US09350803

    申请日:1999-07-09

    IPC分类号: G11B566

    摘要: A patterned magnetic recording disk, i.e., a disk with discrete magnetically recordable regions that can function as discrete magnetic bits, is formed by ion irradiating a continuous magnetic film of a chemically-ordered alloy having a tetragonal crystalline structure through a patterned non-contact mask. The ions cause disordering in the film and produce regions in the film that have no magnetocrystalline anisotropy. The regions of the film not impacted by the ions retain their chemical ordering and magnetocrystalline anisotropy and thus serve as the discrete magnetic regions that can be recorded as individual magnetic bits. The chemically-ordered alloy is preferably Co (or Fe) and Pt (or Pd) with the c-axis of the tetragonal crystalline film oriented at an angle less than 45 degrees relative to the plane of the film, so that after patterning the discrete magnetic regions can be recorded by horizontal magnetic recording.

    摘要翻译: 通过离子辐射具有四方晶体结构的化学有序合金的连续磁性膜,通过图案化的非接触掩模来形成图案化的磁记录盘,即具有可用作离散磁头的离散可磁记录区域的磁盘 。 离子引起薄膜中的无序化并产生不具有磁晶各向异性的膜中的区域。 不受离子影响的膜的区域保留其化学排序和磁晶各向异性,并且因此用作可以记录为单个磁性位的离散磁性区域。 化学有序合金优选是Co(或Fe)和Pt(或Pd),其中四方晶体膜的c轴相对于膜的平面定向成小于45度的角度,使得在图案化之后离散 可以通过水平磁记录来记录磁区。