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公开(公告)号：US11340440B2
公开(公告)日：2022-05-24
申请号：US16622868
申请日：2019-03-22
Inventor： Chao Wang , Xueke Gou , Jing Jiang , Jun Hu , Zezhan Zhang , Yang Yang , Ying Duan , Congjun Wu , Yueming Wang
Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.
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Patent Agency Ranking
公开(公告)号：US11085829B2
公开(公告)日：2021-08-10
申请号：US15950143
申请日：2018-04-10
Inventor： Chao Wang , Yang Yang , Jing Jiang , Chengui Zhang , Zezhan Zhang , Fei Wang , Ying Duan , Jun Hu , Yueming Wang , Hongchuan Jiang , Huiyuan Geng , Jiexiong Ding , Li Du
Abstract: An infrared temperature-measurement probe, including: a probe housing; a reflector; and a reflector adjusting mechanism. The probe housing includes an inner wall, an outer wall, a cooling channel sandwiched between the inner wall and the outer wall, a chamber surrounded by the inner wall, and a light transmission hole communicating with the chamber. The reflector includes a mirror and a mirror frame. The reflector adjusting mechanism includes a motion controller, a drive coupling, and three control rods. The reflector and the three control rods are disposed in the chamber of the probe housing. The motion controller is disposed outside the chamber of the probe housing. The drive coupling is disposed between the motion controller and the three control rods, and the motion controller is adapted to move each of the three control rods via the drive coupling. The mirror is imbedded in and is supported by the mirror frame.
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公开(公告)号：US10746604B2
公开(公告)日：2020-08-18
申请号：US15949037
申请日：2018-04-09
Inventor： Chao Wang , Zezhan Zhang , Fei Wang , Chengui Zhang , Jun Hu , Yang Yang , Jing Jiang , Hongchuan Jiang , Yueming Wang , Yuhua Cheng , Jiexiong Ding , Li Du , Houjun Wang
IPC: G01J5/08 , G01J5/06 , G01N21/27 , G01J5/04 , G01J5/02 , G01J3/36 , G01J5/52 , G01J5/00 , G01J5/60 , G01N21/25
Abstract: An apparatus for measuring temperature of turbine blades, including: a radiation collection device, a data processing module; a master control unit (MCU); a calibration module; and a motion servo. The radiation collection device includes a scan reflector, a collimator lens, a first dichroic mirror, a first focus lens, a visible and near-infrared (VNIR) detector, a second dichroic mirror, a second focus lens, a short-wave infrared (SWIR) detector, a third focus lens, and a medium-wave infrared (MWIR) detector. The calibration module includes a calibration reflection mirror and a blackbody furnace. The scan reflector, the collimator lens, the first dichroic mirror, the second dichroic mirror, the third focus lens, and the MWIR detector are disposed successively along a first optical axis; the first dichroic mirror, the first focus lens, and the VNIR detector are disposed successively along a second optical axis that is perpendicular to the first optical axis.
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4.发明申请公开(公告)号：US20200209606A1
公开(公告)日：2020-07-02
申请号：US16622868
申请日：2019-03-22
Inventor： Chao Wang , Xueke Gou , Jing Jiang , Jun Hu , Zezhan Zhang , Yang Yang , Ying Duan , Congjun Wu , Yueming Wang
Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.
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公开(公告)号：US10670467B2
公开(公告)日：2020-06-02
申请号：US15865297
申请日：2018-01-09
Inventor： Chao Wang , Jun Hu , Fei Wang , Zezhan Zhang , Jing Jiang , Jie Xiong , Yueming Wang , Tiezhong Ma , Dong Yan , Xueke Gou , Ting Zhou , Yi Niu , Pei Huang
Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.
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公开(公告)号：US10670464B2
公开(公告)日：2020-06-02
申请号：US15871033
申请日：2018-01-14
Inventor： Chao Wang , Ying Duan , Jun Hu , Zezhan Zhang , Yang Yang , Xueke Gou , Fei Wang , Jing Jiang , Jinguang Lv , Yueming Wang , Hongchuan Jiang , Li Du , Jiexiong Ding , Jingqiu Liang , Xianfu Liu , Xiaojiang Shi , Bing Xiong
Abstract: A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).
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