公开(公告)号：US11410849B2

公开(公告)日：2022-08-09

申请号：US16618354

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Congjun Wu

IPC: H01L21/20 ,  G02B27/10 ,  G02B27/30 ,  H01L21/02 ,  H01L21/66 ,  G01J5/00 ,  G02B27/14 ,  H01L21/64

Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

公开(公告)号：US11309634B2

公开(公告)日：2022-04-19

申请号：US17439759

申请日：2020-08-28

Applicant: CHENGDU INSTITUTE OF BIOLOGY, CHINESE ACADEMY OF SCIENCES ,  UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Haibo Jiang ,  Zijun Chen ,  Yubin Gong ,  Yang Yang ,  Shaomeng Wang ,  Chengbo Gui ,  Jiangnan Fu ,  Xinyang He

IPC: H01Q15/00 ,  H01Q21/00 ,  H01Q21/20 ,  H01Q3/26 ,  H01Q3/40

Abstract: A novel synthetic uniform circular array (SUCA) method for generating vortex electromagnetic (EM) wave carrying high orbital angular momentum (OAM) mode has the following steps. N antenna elements are placed radially to form a uniform circular array (UCA), where N is a positive integer. By rotating the array elements to various spatial locations, modifying their feeding phases, and superimposing the generated fields at various spatial locations, SUCA can beat the limit of space and configure more array elements to generate vortex electromagnetic (EM) waves carrying high mode OAMs. Meanwhile, due to the more synthetic array elements and smaller aperture than the traditional UCA, the purity of OAM mode is higher and it is more flexible to adjust the main lobe directions of these vortex waves carrying different OAM modes, and can generate vortex EM waves.

公开(公告)号：US20200209606A1

公开(公告)日：2020-07-02

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  C23C16/52 ,  H01L21/02 ,  H01L21/67 ,  G02B21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

公开(公告)号：US10670464B2

公开(公告)日：2020-06-02

申请号：US15871033

申请日：2018-01-14

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Fei Wang ,  Jing Jiang ,  Jinguang Lv ,  Yueming Wang ,  Hongchuan Jiang ,  Li Du ,  Jiexiong Ding ,  Jingqiu Liang ,  Xianfu Liu ,  Xiaojiang Shi ,  Bing Xiong

IPC: G01K1/00 ,  G01J5/00 ,  G01J5/52 ,  F01D17/08 ,  F01D21/00 ,  F01D17/02 ,  G01J5/06

Abstract: A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).

公开(公告)号：US11523211B2

公开(公告)日：2022-12-06

申请号：US17597395

申请日：2021-01-26

Applicant: CHENGDU INSTITUTE OF BIOLOGY, CHINESE ACADEMY OF SCIENCES ,  UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Haibo Jiang ,  Xinyang He ,  Yubin Gong ,  Dan Tang ,  Yang Yang ,  Zijun Chen ,  Jiangnan Fu ,  Yuan Gao

IPC: H04R1/40

Abstract: A method and device for generating synthetic vortex sound field (SVSF) with more mode number includes the following steps: (1) a transducer array composed of N transducer units is constructed, and each transducer unit emits a sound field to generate an initial sound field; (2) at the same time, the position of the transducer unit and the phase of the sound field emitted by each transducer unit are changed, and each change produces a sound field, and thus changings times produces of sound fields, wherein the way to change the position of the transducer unit is to rotate the transducer array as a whole; (3) the initial sound field is superimposed with s of sound fields generated in step (2), to obtain SVSF with more mode number. The method and device for generating vortex sound field (VSF) can be used for underwater communication or acoustic imaging.

公开(公告)号：US20210143014A1

公开(公告)日：2021-05-13

申请号：US16618354

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Congjun Wu

IPC: H01L21/20 ,  H01L21/02 ,  G02B27/10 ,  G02B27/30

Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

公开(公告)号：US11960568B2

公开(公告)日：2024-04-16

申请号：US17519604

申请日：2021-11-05

Applicant: University of Electronic Science and Technology of China

Inventor： Xing Xu ,  Yangye Fu ,  Yang Yang ,  Jie Shao ,  Zheng Wang

IPC: G06K9/62 ,  G06F18/213 ,  G06F18/214 ,  G06F18/241 ,  G06N3/045 ,  G06N3/088

CPC classification number: G06F18/214 ,  G06F18/213 ,  G06F18/241 ,  G06N3/045 ,  G06N3/088

Abstract: A multi-source domain adaptation model by aligning partial features includes a general feature extraction module, a feature selection module for partial feature extraction with the dedicated loss function, three partial feature alignment losses, and two classifiers for adversarial training, where the three partial feature alignment losses include an intra-class partial feature alignment loss, an inter-domain partial feature alignment loss, and an inter-class partial feature alignment loss. With the partial features extracted by the general feature extraction module and the feature selection module following three different partial feature alignment losses, the model is capable of clustering the samples from the identical categories and isolating samples from distinct classes.

公开(公告)号：US11340440B2

公开(公告)日：2022-05-24

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  G02B21/02 ,  H01L21/67 ,  G02B21/00 ,  G02B17/08 ,  G02B21/04 ,  C23C16/52 ,  H01L21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

公开(公告)号：US11085829B2

公开(公告)日：2021-08-10

申请号：US15950143

申请日：2018-04-10

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Yang Yang ,  Jing Jiang ,  Chengui Zhang ,  Zezhan Zhang ,  Fei Wang ,  Ying Duan ,  Jun Hu ,  Yueming Wang ,  Hongchuan Jiang ,  Huiyuan Geng ,  Jiexiong Ding ,  Li Du

IPC: G01J5/00 ,  G01J5/08 ,  G01K13/00 ,  F01D21/00 ,  G01J5/04 ,  G02B7/182 ,  G01J5/02 ,  G01J5/06

Abstract: An infrared temperature-measurement probe, including: a probe housing; a reflector; and a reflector adjusting mechanism. The probe housing includes an inner wall, an outer wall, a cooling channel sandwiched between the inner wall and the outer wall, a chamber surrounded by the inner wall, and a light transmission hole communicating with the chamber. The reflector includes a mirror and a mirror frame. The reflector adjusting mechanism includes a motion controller, a drive coupling, and three control rods. The reflector and the three control rods are disposed in the chamber of the probe housing. The motion controller is disposed outside the chamber of the probe housing. The drive coupling is disposed between the motion controller and the three control rods, and the motion controller is adapted to move each of the three control rods via the drive coupling. The mirror is imbedded in and is supported by the mirror frame.

公开(公告)号：US10746604B2

公开(公告)日：2020-08-18

申请号：US15949037

申请日：2018-04-09

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Zezhan Zhang ,  Fei Wang ,  Chengui Zhang ,  Jun Hu ,  Yang Yang ,  Jing Jiang ,  Hongchuan Jiang ,  Yueming Wang ,  Yuhua Cheng ,  Jiexiong Ding ,  Li Du ,  Houjun Wang

IPC: G01J5/08 ,  G01J5/06 ,  G01N21/27 ,  G01J5/04 ,  G01J5/02 ,  G01J3/36 ,  G01J5/52 ,  G01J5/00 ,  G01J5/60 ,  G01N21/25

Abstract: An apparatus for measuring temperature of turbine blades, including: a radiation collection device, a data processing module; a master control unit (MCU); a calibration module; and a motion servo. The radiation collection device includes a scan reflector, a collimator lens, a first dichroic mirror, a first focus lens, a visible and near-infrared (VNIR) detector, a second dichroic mirror, a second focus lens, a short-wave infrared (SWIR) detector, a third focus lens, and a medium-wave infrared (MWIR) detector. The calibration module includes a calibration reflection mirror and a blackbody furnace. The scan reflector, the collimator lens, the first dichroic mirror, the second dichroic mirror, the third focus lens, and the MWIR detector are disposed successively along a first optical axis; the first dichroic mirror, the first focus lens, and the VNIR detector are disposed successively along a second optical axis that is perpendicular to the first optical axis.