公开(公告)号：US11340440B2

公开(公告)日：2022-05-24

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  G02B21/02 ,  H01L21/67 ,  G02B21/00 ,  G02B17/08 ,  G02B21/04 ,  C23C16/52 ,  H01L21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

公开(公告)号：US11680851B2

公开(公告)日：2023-06-20

申请号：US17326313

申请日：2021-05-20

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Jing Jiang ,  Anmei Qiu ,  Yekui Zhong ,  Yi Niu ,  Peifeng Yu ,  Zezhan Zhang ,  Ying Duan ,  Xueke Gou ,  Guiyun Tian

IPC: G01J5/00 ,  G01J5/0806 ,  G01J5/10 ,  G01M15/02 ,  G01M15/14 ,  G01J5/04 ,  G01J5/48

CPC classification number: G01J5/0088 ,  G01J5/04 ,  G01J5/0806 ,  G01J5/10 ,  G01M15/02 ,  G01M15/14 ,  G01J5/485 ,  G01J2005/106

Abstract: A device for measuring surface temperature of a turbine blade based on a rotatable prism includes a probe, a prism rotating apparatus and an optical focusing apparatus. The prism rotating apparatus and the optical focusing apparatus are located inside the probe. The probe includes a probe outer casing, a probe inner casing, a water-cooled casing pipe, a sapphire window piece, a quartz prism, a light pipe, a collimating lens, a focusing lens and an infrared array detector. The prism rotating apparatus includes a rotary motor, a worm, a gear and a prism rotary table, the rotary motor rotates to drive the prism rotary table to rotate. The optical focusing apparatus includes a telescopic motor, a coupler, a lead screw and a drive rod, the telescopic motor rotates to drive the lead screw, so as to further drive the drive rod to move along the slot.

公开(公告)号：US20210270674A1

公开(公告)日：2021-09-02

申请号：US17326313

申请日：2021-05-20

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Jing Jiang ,  Anmei Qiu ,  Yekui Zhong ,  Yi Niu ,  Peifeng Yu ,  Zezhan Zhang ,  Ying Duan ,  Xueke Gou ,  Guiyun Tian

IPC: G01J5/00 ,  G01J5/08 ,  G01J5/10 ,  G01M15/02 ,  G01M15/14

Abstract: A device for measuring surface temperature of a turbine blade based on a rotatable prism includes a probe, a prism rotating apparatus and an optical focusing apparatus. The prism rotating apparatus and the optical focusing apparatus are located inside the probe. The probe includes a probe outer casing, a probe inner casing, a water-cooled casing pipe, a sapphire window piece, a quartz prism, a light pipe, a collimating lens, a focusing lens and an infrared array detector. The prism rotating apparatus includes a rotary motor, a worm, a gear and a prism rotary table, the rotary motor rotates to drive the prism rotary table to rotate. The optical focusing apparatus includes a telescopic motor, a coupler, a lead screw and a drive rod, the telescopic motor rotates to drive the lead screw, so as to further drive the drive rod to move along the slot.

公开(公告)号：US20210143014A1

公开(公告)日：2021-05-13

申请号：US16618354

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Congjun Wu

IPC: H01L21/20 ,  H01L21/02 ,  G02B27/10 ,  G02B27/30

Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

公开(公告)号：US11466979B2

公开(公告)日：2022-10-11

申请号：US17151681

申请日：2021-01-19

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Zezhan Zhang ,  Peifeng Yu ,  Yi Niu ,  Ying Duan ,  Xueke Gou ,  Yekui Zhong ,  Anmei Qiu ,  Pei Huang ,  Yuehai Zhang ,  Shan Gao ,  Jing Jiang

IPC: G01B11/16

Abstract: The present invention discloses a method of measuring longitude deformation of blades. The radiation and rotation speed of the blade are collected by an optical probe and a synchronized rotation sensor. The stretch of the blade is able to be determined by the obvious change in the light intensity detected by the optical probe. The precision servo motor keeps driving the optical probe to move upward. The collected radiation is compared with the radiation collected on the previous point. The stretch of the blade is calculated based on position of the blade tip which is determined by the time when the high level radiation from the blade is disappeared. The longitude deformation of the blade is calculated by plugging the stretch into the deformation equation. Mapping the calculated deformation with the number of the blade calculated with rotation speed synchronizing signals to achieve the deformation of all the blades.

公开(公告)号：US11410849B2

公开(公告)日：2022-08-09

申请号：US16618354

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Congjun Wu

IPC: H01L21/20 ,  G02B27/10 ,  G02B27/30 ,  H01L21/02 ,  H01L21/66 ,  G01J5/00 ,  G02B27/14 ,  H01L21/64

Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

公开(公告)号：US20210140761A1

公开(公告)日：2021-05-13

申请号：US17151681

申请日：2021-01-19

Applicant: University of Electronic Science and Technology of China

Inventor： Chao Wang ,  Zezhan Zhang ,  Peifeng Yu ,  Yi Niu ,  Ying Duan ,  Xueke Gou ,  Yekui Zhong ,  Anmei Qiu ,  Pei Huang ,  Yuehai Zhang ,  Shan Gao ,  Jing Jiang

IPC: G01B11/16

Abstract: The present invention discloses a method of measuring longitude deformation of blades. The radiation and rotation speed of the blade are collected by an optical probe and a synchronized rotation sensor. The stretch of the blade is able to be determined by the obvious change in the light intensity detected by the optical probe. The precision servo motor keeps driving the optical probe to move upward. The collected radiation is compared with the radiation collected on the previous point. The stretch of the blade is calculated based on position of the blade tip which is determined by the time when the high level radiation from the blade is disappeared. The longitude deformation of the blade is calculated by plugging the stretch into the deformation equation. Mapping the calculated deformation with the number of the blade calculated with rotation speed synchronizing signals to achieve the deformation of all the blades.

公开(公告)号：US20200209606A1

公开(公告)日：2020-07-02

申请号：US16622868

申请日：2019-03-22

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Xueke Gou ,  Jing Jiang ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Ying Duan ,  Congjun Wu ,  Yueming Wang

IPC: G02B21/36 ,  C23C16/52 ,  H01L21/02 ,  H01L21/67 ,  G02B21/02

Abstract: A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system has the resolution better than 1 μm, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

公开(公告)号：US10670467B2

公开(公告)日：2020-06-02

申请号：US15865297

申请日：2018-01-09

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Jun Hu ,  Fei Wang ,  Zezhan Zhang ,  Jing Jiang ,  Jie Xiong ,  Yueming Wang ,  Tiezhong Ma ,  Dong Yan ,  Xueke Gou ,  Ting Zhou ,  Yi Niu ,  Pei Huang

IPC: G01J5/00 ,  G01K1/00 ,  G01K13/00 ,  G01J5/08 ,  G01K1/02 ,  F01D17/08

Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.

公开(公告)号：US10670464B2

公开(公告)日：2020-06-02

申请号：US15871033

申请日：2018-01-14

Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA

Inventor： Chao Wang ,  Ying Duan ,  Jun Hu ,  Zezhan Zhang ,  Yang Yang ,  Xueke Gou ,  Fei Wang ,  Jing Jiang ,  Jinguang Lv ,  Yueming Wang ,  Hongchuan Jiang ,  Li Du ,  Jiexiong Ding ,  Jingqiu Liang ,  Xianfu Liu ,  Xiaojiang Shi ,  Bing Xiong

IPC: G01K1/00 ,  G01J5/00 ,  G01J5/52 ,  F01D17/08 ,  F01D21/00 ,  F01D17/02 ,  G01J5/06

Abstract: A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).