公开(公告)号：US08508868B2

公开(公告)日：2013-08-13

申请号：US13359341

申请日：2012-01-26

申请人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

发明人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

IPC分类号： G02B7/02 ,  G02B15/14

CPC分类号： G02B7/004 ,  G02B7/023

摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.

摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。

公开(公告)号：US20050248858A1

公开(公告)日：2005-11-10

申请号：US11109316

申请日：2005-04-19

申请人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

发明人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

IPC分类号： G02B7/00 ,  G02B7/18 ,  G03F7/20 ,  G02B5/30 ,  G02B7/02 ,  G02B27/28

CPC分类号： G03F7/70825 ,  G02B7/008 ,  G02B7/1805 ,  G03F7/70891

摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的壳体中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件

公开(公告)号：US20120154935A1

公开(公告)日：2012-06-21

申请号：US13359341

申请日：2012-01-26

申请人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

发明人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

IPC分类号： G02B7/02

CPC分类号： G02B7/004 ,  G02B7/023

摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.

摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。

公开(公告)号：US07079331B2

公开(公告)日：2006-07-18

申请号：US11109316

申请日：2005-04-19

申请人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

发明人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

IPC分类号： G02B7/02 ,  G02B27/10 ,  G02B27/14 ,  G02B7/18 ,  G02F1/01

CPC分类号： G03F7/70825 ,  G02B7/008 ,  G02B7/1805 ,  G03F7/70891

摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的外壳中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件

公开(公告)号：US20110128521A1

公开(公告)日：2011-06-02

申请号：US13009438

申请日：2011-01-19

申请人： Ulrich Weber ,  Stefan Hembacher ,  Armin Schoeppach

发明人： Ulrich Weber ,  Stefan Hembacher ,  Armin Schoeppach

IPC分类号： G03B27/54 ,  F16H21/44

CPC分类号： G03F7/70141 ,  F16H21/44 ,  G03F7/70258 ,  G03F7/70825 ,  H02N1/002 ,  H02N2/023 ,  Y10T74/18992

摘要： An actuator includes a housing and a rotor that can be moved in relation to the housing in the effective direction of the actuator, wherein the actuator includes an advancing unit that is connected to the rotor at least part of the time. The advancing unit includes at least one deformation unit and at least one deformer for deforming the deformation unit. The at least one deformer is suited to deform the deformation unit perpendicular to the effective direction of the actuator such that the total length of the deformation unit changes in the effective direction as a result of the deformation. The actuator can be used in a projection exposure system for semiconductor lithography.

摘要翻译： 致动器包括壳体和可以在致动器的有效方向上相对于壳体移动的转子，其中致动器包括至少部分时间连接到转子的前进单元。 前进单元包括至少一个变形单元和用于使变形单元变形的至少一个变形器。 至少一个变形器适于使变形单元垂直于致动器的有效方向变形，使得变形单元的总长度由于变形而在有效方向上变化。 致动器可用于半导体光刻的投影曝光系统。

公开(公告)号：US20090244509A1

公开(公告)日：2009-10-01

申请号：US12409961

申请日：2009-03-24

申请人： Guido Limbach ,  Franz Sorg ,  Armin Schoeppach ,  Ulrich Weber ,  Ulrich Loering ,  Dirk Hellweg ,  Peter Meyer ,  Stefan Xalter ,  Jens Kugler ,  Bernhard Gellrich ,  Stefan Hembacher ,  Bernhard Geuppert ,  Aksel Goehnermeier

发明人： Guido Limbach ,  Franz Sorg ,  Armin Schoeppach ,  Ulrich Weber ,  Ulrich Loering ,  Dirk Hellweg ,  Peter Meyer ,  Stefan Xalter ,  Jens Kugler ,  Bernhard Gellrich ,  Stefan Hembacher ,  Bernhard Geuppert ,  Aksel Goehnermeier

IPC分类号： G03B27/54

CPC分类号： G02B7/004 ,  G02B27/0068 ,  G03F7/70191 ,  G03F7/70258 ,  G03F7/70308 ,  G03F7/70825

摘要： The disclosure relates to an optical system, such as a projection exposure apparatus for semiconductor lithography, including a manipulable correction arrangement for reducing image aberrations. In some embodiments, the system includes at least one manipulator configured to reduce image aberrations. The manipulator can include at least one optical element which can be manipulated by at least one actuator. The manipulator can be formed in changeable fashion together with an actuator.

摘要翻译： 本发明涉及一种光学系统，例如用于半导体光刻的投影曝光装置，包括用于减小图像像差的可操作的校正装置。 在一些实施例中，系统包括被配置为减少图像像差的至少一个操纵器。 操纵器可以包括至少一个可由至少一个致动器操纵的光学元件。 操纵器可以与致动器一起以可变的方式形成。

公开(公告)号：US07564636B2

公开(公告)日：2009-07-21

申请号：US10570021

申请日：2004-08-20

申请人： Christian Zengerling ,  Armin Schoeppach ,  Ulrich Weber

发明人： Christian Zengerling ,  Armin Schoeppach ,  Ulrich Weber

IPC分类号： G02B7/02

CPC分类号： G03F7/70825 ,  G02B7/003

摘要： In a device for preventing the creeping of an optical element, in particular a lens or a mirror, the optical element is connected to a mount via connecting members arranged on the circumference of the optical element. The position of the optical element in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part of the objective (PL) is provided in addition to the connecting members.

摘要翻译： 在防止光学元件，特别是透镜或反射镜的蠕变的装置中，光学元件通过布置在光学元件的圆周上的连接构件连接到安装座。 光学元件在物镜（PL）中的位置偏离垂直轴向位置。 为了补偿至少一个光学元件的自重，除了连接构件之外，还设置有至少一个保持元件，通过该保持元件将光学元件保持在物镜（PL）的外壳部分上。

公开(公告)号：US08542346B2

公开(公告)日：2013-09-24

申请号：US12409961

申请日：2009-03-24

申请人： Guido Limbach ,  Franz Sorg ,  Armin Schoeppach ,  Ulrich Weber ,  Ulrich Loering ,  Dirk Hellweg ,  Peter Meyer ,  Stefan Xalter ,  Jens Kugler ,  Bernhard Gellrich ,  Stefan Hembacher ,  Bernhard Geuppert ,  Aksel Goehnermeier

发明人： Guido Limbach ,  Franz Sorg ,  Armin Schoeppach ,  Ulrich Weber ,  Ulrich Loering ,  Dirk Hellweg ,  Peter Meyer ,  Stefan Xalter ,  Jens Kugler ,  Bernhard Gellrich ,  Stefan Hembacher ,  Bernhard Geuppert ,  Aksel Goehnermeier

IPC分类号： G03B27/52

CPC分类号： G02B7/004 ,  G02B27/0068 ,  G03F7/70191 ,  G03F7/70258 ,  G03F7/70308 ,  G03F7/70825

摘要： The disclosure relates to an optical system, such as a projection exposure apparatus for semiconductor lithography, including a manipulable correction arrangement for reducing image aberrations. In some embodiments, the system includes at least one manipulator configured to reduce image aberrations. The manipulator can include at least one optical element which can be manipulated by at least one actuator. The manipulator can be formed in changeable fashion together with an actuator.

摘要翻译： 本发明涉及一种光学系统，例如用于半导体光刻的投影曝光装置，包括用于减小图像像差的可操作的校正装置。 在一些实施例中，系统包括被配置为减少图像像差的至少一个操纵器。 操纵器可以包括至少一个可由至少一个致动器操纵的光学元件。 操纵器可以与致动器一起以可变的方式形成。

公开(公告)号：US20120147344A1

公开(公告)日：2012-06-14

申请号：US13402115

申请日：2012-02-22

申请人： Ulrich Weber ,  Stefan Hembacher ,  Armin Schoeppach

发明人： Ulrich Weber ,  Stefan Hembacher ,  Armin Schoeppach

IPC分类号： F16H21/44 ,  G03B27/34 ,  H02N1/00

CPC分类号： G03F7/70141 ,  F16H21/44 ,  G03F7/70258 ,  G03F7/70825 ,  H02N1/002 ,  H02N2/023 ,  Y10T74/18992

摘要： An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.

摘要翻译： 致动器包括壳体，可移动部件和至少临时连接到可动部件的前进单元。 前进单元包括变形单元和变形构件，其构造成使得垂直于致动器的有效方向的矢量分量使变形单元变形，使得变形单元的总长度在致动器的有效方向上变化，作为 形变。 可移动部件被构造成在去除变形单元上的矢量分量时沿着致动器的有效方向移动，并且在去除变形单元上的矢量分量时沿着致动器的有效方向设置变形单元。

公开(公告)号：US20070183063A1

公开(公告)日：2007-08-09

申请号：US10570021

申请日：2004-08-20

申请人： Christian Zengerling ,  Armin Schoeppach ,  Ulrich Weber

发明人： Christian Zengerling ,  Armin Schoeppach ,  Ulrich Weber

IPC分类号： G02B7/02

CPC分类号： G03F7/70825 ,  G02B7/003

摘要： In a device (1) for preventing the creeping of an optical element (2), in particular a lens or a mirror, the optical element (2) is connected to a mount (3) via connecting members (4) arranged on the circumference of the optical element (2). The position of the optical element (2) in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element (2) at least one holding element (7) via which the optical element (2) is held on a housing part of the objective (PL) is provided in addition to the connecting members (4).

摘要翻译： 在用于防止光学元件（2），特别是透镜或反射镜的蠕变的装置（1）中，光学元件（2）经由布置在圆周上的连接构件（4）连接到安装件（3） 的光学元件（2）。 光学元件（2）在物镜（PL）中的位置偏离垂直轴向位置。 为了补偿至少一个光学元件（2）的自重，除了将光学元件（2）保持在物镜（PL）的壳体部分上以外还提供至少一个保持元件（7） 连接构件（4）。