公开(公告)号：US20150160172A1

公开(公告)日：2015-06-11

申请号：US14593304

申请日：2015-01-09

Applicant: University of Electronic Science and Technology of China

Inventor： Xiaosong Du ,  Luhua Cheng ,  Penglin Wu ,  Huan Yuan ,  Yadong Jiang ,  Ze Wu ,  Yi Li ,  Dong Qiu

IPC: G01N30/93

CPC classification number: G01N30/93 ,  B01L3/5027 ,  B01L3/502707 ,  B01L2300/069 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/0883 ,  G01N1/4005 ,  G01N1/405 ,  G01N30/08 ,  G01N2030/085

Abstract: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.

Abstract translation: 双面隔膜微气体预浓缩器具有微气体室，该微气体室通过将具有背面构造的下硅基板与上硅基板层叠而形成。 在每个硅衬底上提供一个或多个悬浮膜。 提供悬浮膜的硅完全除去以形成空腔。 薄膜加热器沉积在每个悬浮膜上。 吸附膜涂覆在每个悬浮膜的内壁上。 因此，本发明的预浓缩器的上侧和下侧是悬浮膜，其改善了隔膜上吸附膜的面积。 结果，在保持平面膜片预浓缩器的小热容量，快速加热速率和低功耗特征的同时，提高了预浓缩因子。

公开(公告)号：US09921194B2

公开(公告)日：2018-03-20

申请号：US15164841

申请日：2016-05-25

Applicant: University of Electronic Science and Technology of China

Inventor： Xiaosong Du ,  Huan Yuan ,  Xulan Zhao ,  Penglin Wu ,  Yadong Jiang

IPC: G01N30/60 ,  G01N30/02

CPC classification number: G01N30/6086 ,  G01N30/6095 ,  G01N2030/025 ,  G01N2030/6056

Abstract: A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes multiple regular wavy curves. Each wavy curve is formed through alternately connecting first upper arcs with first lower arcs. Because the groove has a curving structure, the carrier gas velocity is decreased as the increase of the arc angle, resulting in an improvement of the flow uniformity at the zones between two adjacent bends but also an enlarging nonsymmetric distribution at the bends. Thus, an optimal curving structure can make the overall flow more even, and in turn achieve a better separation performance compared to the straight channel columns. Meanwhile, a wavy channel realizes a longer column length on a given area.

公开(公告)号：US09726651B2

公开(公告)日：2017-08-08

申请号：US14593304

申请日：2015-01-09

Applicant: University of Electronic Science and Technology of China

Inventor： Xiaosong Du ,  Luhua Cheng ,  Penglin Wu ,  Huan Yuan ,  Yadong Jiang ,  Ze Wu ,  Yi Li ,  Dong Qiu

IPC: G01N30/08 ,  H01L27/02 ,  G01N30/93 ,  B01L3/00 ,  G01N1/40

CPC classification number: G01N30/93 ,  B01L3/5027 ,  B01L3/502707 ,  B01L2300/069 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/0883 ,  G01N1/4005 ,  G01N1/405 ,  G01N30/08 ,  G01N2030/085

Abstract: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.

公开(公告)号：US20160266073A1

公开(公告)日：2016-09-15

申请号：US15164841

申请日：2016-05-25

Applicant: University of Electronic Science and Technology of China

Inventor： Xiaosong Du ,  Huan Yuan ,  Xulan Zhao ,  Penglin Wu ,  Yadong Jiang

IPC: G01N30/02

CPC classification number: G01N30/6086 ,  G01N30/6095 ,  G01N2030/025 ,  G01N2030/6056

Abstract: A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes multiple regular wavy curves. Each wavy curve is formed through alternately connecting first upper arcs with first lower arcs. Because the groove has a curving structure, the carrier gas velocity is decreased as the increase of the arc angle, resulting in an improvement of the flow uniformity at the zones between two adjacent bends but also an enlarging nonsymmetric distribution at the bends. Thus, an optimal curving structure can make the overall flow more even, and in turn achieve a better separation performance compared to the straight channel columns. Meanwhile, a wavy channel realizes a longer column length on a given area.

Abstract translation: 波浪微气相色谱柱包括硅衬底和粘合玻璃罩。 在硅衬底上蚀刻具有矩形横截面的微通道并涂覆有固定相膜。 硅衬底上的微通道的投影图包括多个规则的波浪曲线。 每个波浪曲线通过交替地将第一上部弧线与第一个较低的弧线交替地形成。 由于凹槽具有弯曲结构，所以载气速度随着弧角的增加而减小，导致两个相邻弯头之间的区域的流动均匀性得到改善，而且在弯曲处也是扩大的非对称分布。 因此，与直通柱相比，最佳弯曲结构可以使整体流动更均匀，从而达到更好的分离性能。 同时，波浪通道在给定区域实现更长的列长度。