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    Delivery member and apparatus making use of the same
    4.
    发明授权
    Delivery member and apparatus making use of the same 失效
    交付成员和使用相同的设备

    公开(公告)号：US5523833A

    公开(公告)日：1996-06-04

    申请号：US957820

    申请日：1992-10-08

    申请人： Yoshiaki Tomari ,  Susumu Kadokura ,  Tomoaki Kato ,  Tadanori Suto

    发明人： Yoshiaki Tomari ,  Susumu Kadokura ,  Tomoaki Kato ,  Tadanori Suto

    IPC分类号： B65H27/00 ,  C09D5/44 ,  G03G21/00 ,  G01D15/06

    CPC分类号： C09D5/448 ,  B65H27/00

    摘要： A delivery member has a substrate and, provided thereon, an eletro-deposition coating film containing an organic powder. By this configuration, a delivery member having a homogeneous coating is formed. Stress is therefore uniformly distributed and the coating is resistant to wear. The delivery member can be made in a variety of different forms and can be used in many different types of apparatus.

    摘要翻译： 传送部件具有基板，并且在其上设置含有有机粉末的电沉积涂膜。 通过这种构造，形成具有均匀涂层的输送构件。 因此应力均匀分布，并且涂层耐磨损。 输送构件可以以各种不同形式制成并且可以用于许多不同类型的装置中。

    CHEMICAL TREATMENT METHOD
    6.
    发明申请
    CHEMICAL TREATMENT METHOD 有权
    化学处理方法

    公开(公告)号：US20090017622A1

    公开(公告)日：2009-01-15

    申请号：US12239191

    申请日：2008-09-26

    申请人： Yoshiaki Tomari

    发明人： Yoshiaki Tomari

    IPC分类号： H01L21/288 ,  H01L21/461

    CPC分类号： H01L21/67086 ,  C25D5/08 ,  C25D7/123 ,  C25D17/001 ,  C25D17/02 ,  C25D17/08 ,  C25D21/10 ,  C25D21/12 ,  H01L21/2885 ,  H01L21/30608 ,  H01L21/6708

    摘要： A chemical treatment apparatus and a method for performing a chemical treatment of a wafer, etc., by supplying a chemical via a cell. The apparatus includes a cylindrical inner cell and a cylindrical outer cell with open ends disposed at an outer circumference of the inner cell. The outer cell is axially movable to vary the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding means by the axial movement, thereby adjusting the discharge rate of the chemical and varying the pressure of the chemical.

    摘要翻译： 一种通过经由电池供给化学品来进行晶片等的化学处理的化学处理装置和方法。 该装置包括圆柱形内电池和圆柱形外电池，其开口端设置在内电池的外周。 外部单元可轴向移动以通过轴向移动来改变在外部单元的底端和基板保持装置的顶部表面之间形成的狭缝的宽度，从而调节化学品的排出速率并改变其压力 化学品。

    CHEMICAL TREATMENT METHOD
    7.
    发明申请
    CHEMICAL TREATMENT METHOD 审中-公开
    化学处理方法

    公开(公告)号：US20120003839A1

    公开(公告)日：2012-01-05

    申请号：US13231734

    申请日：2011-09-13

    申请人： Yoshiaki Tomari

    发明人： Yoshiaki Tomari

    IPC分类号： H01L21/302 ,  C25D5/02

    CPC分类号： H01L21/67086 ,  C25D5/08 ,  C25D7/123 ,  C25D17/001 ,  C25D17/02 ,  C25D17/08 ,  C25D21/10 ,  C25D21/12 ,  H01L21/2885 ,  H01L21/30608 ,  H01L21/6708

    摘要： A chemical treatment apparatus and a method for performing a chemical treatment of a wafer, etc., by supplying a chemical via a cell. The apparatus includes a cylindrical inner cell and a cylindrical outer cell with open ends disposed at an outer circumference of the inner cell. The outer cell is axially movable to vary the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding means by the axial movement, thereby adjusting the discharge rate of the chemical and varying the pressure of the chemical.

    摘要翻译： 一种通过经由电池供给化学品来进行晶片等的化学处理的化学处理装置和方法。 该装置包括圆柱形内电池和圆柱形外电池，其开口端设置在内电池的外圆周。 外部单元可轴向移动以通过轴向移动来改变在外部单元的底端和基板保持装置的顶部表面之间形成的狭缝的宽度，从而调节化学品的排出速率并改变其压力 化学品。

    Chemical treatment method
    9.
    发明授权
    Chemical treatment method 有权
    化学处理方法

    公开(公告)号：US09017567B2

    公开(公告)日：2015-04-28

    申请号：US13231734

    申请日：2011-09-13

    申请人： Yoshiaki Tomari

    发明人： Yoshiaki Tomari

    IPC分类号： C23F1/00 ,  H01L21/67 ,  C25D5/08 ,  C25D21/10 ,  H01L21/288 ,  H01L21/306 ,  C25D7/12 ,  C25D17/00 ,  C25D17/02 ,  C25D17/08 ,  C25D21/12

    CPC分类号： H01L21/67086 ,  C25D5/08 ,  C25D7/123 ,  C25D17/001 ,  C25D17/02 ,  C25D17/08 ,  C25D21/10 ,  C25D21/12 ,  H01L21/2885 ,  H01L21/30608 ,  H01L21/6708

    摘要： A chemical treatment apparatus and a method for performing a chemical treatment of a wafer, etc., by supplying a chemical via a cell. The apparatus includes a cylindrical inner cell and a cylindrical outer cell with open ends disposed at an outer circumference of the inner cell. The outer cell is axially movable to vary the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding means by the axial movement, thereby adjusting the discharge rate of the chemical and varying the pressure of the chemical.

    摘要翻译： 一种通过经由电池供给化学品来进行晶片等的化学处理的化学处理装置和方法。 该装置包括圆柱形内电池和圆柱形外电池，其开口端设置在内电池的外圆周。 外部单元可轴向移动以通过轴向移动来改变在外部单元的底端和基板保持装置的顶部表面之间形成的狭缝的宽度，从而调节化学品的排出速率并改变其压力 化学品。

    Chemical treatment method
    10.
    发明授权
    Chemical treatment method 有权
    化学处理方法

    公开(公告)号：US08075791B2

    公开(公告)日：2011-12-13

    申请号：US12239191

    申请日：2008-09-26

    申请人： Yoshiaki Tomari

    发明人： Yoshiaki Tomari

    IPC分类号： C03C15/00

    CPC分类号： H01L21/67086 ,  C25D5/08 ,  C25D7/123 ,  C25D17/001 ,  C25D17/02 ,  C25D17/08 ,  C25D21/10 ,  C25D21/12 ,  H01L21/2885 ,  H01L21/30608 ,  H01L21/6708

    摘要： A chemical treatment apparatus and a method for performing a chemical treatment of a wafer, etc., by supplying a chemical via a cell. The apparatus includes a cylindrical inner cell and a cylindrical outer cell with open ends disposed at an outer circumference of the inner cell. The outer cell is axially movable to vary the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding means by the axial movement, thereby adjusting the discharge rate of the chemical and varying the pressure of the chemical.

    摘要翻译： 一种通过经由电池供给化学品来进行晶片等的化学处理的化学处理装置和方法。 该装置包括圆柱形内电池和圆柱形外电池，其开口端设置在内电池的外圆周。 外部单元可轴向移动以通过轴向移动来改变在外部单元的底端和基板保持装置的顶部表面之间形成的狭缝的宽度，从而调节化学品的排出速率并改变 化学品。