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1.发明授权Correlation sample for scanning probe microscope and method of processing the correlation sample 失效扫描探针显微镜相关样品及相关样品处理方法公开(公告)号：US06405583B1
公开(公告)日：2002-06-18
申请号：US09296081
申请日：1999-04-21
IPC分类号： G01B528
CPC分类号： G01Q40/02
摘要： A correlation sample of scanning probe microscope enable to detect correctly each force performing as a standard without influence of irregular data of surface of the sample. Photo-resist film is applied on surface of a silicon substrate, and the resist mask is patterned. Hollow portions having vertical wall face are formed at the silicon substrate by carrying out anisotropic etching using the resist mask for etching mask. After that, metal is deposited from upper side of resist mask by deposition method, the metal upper than the resist mask by lift off process is removed, and a correlation sample in which the metal is buried in the hollow portions of the silicon substrate is formed. Surface of the sample can be flattened by coating DLC film on surface of the correlation sample.
摘要翻译： 扫描探针显微镜的相关样本能够正确地检测作为标准执行的每个力而不影响样品表面的不规则数据。 将光刻胶膜施加在硅衬底的表面上，并对抗蚀剂掩模进行图案化。 通过使用蚀刻掩模用抗蚀剂掩模进行各向异性蚀刻，在硅基板上形成具有垂直壁面的中空部分。 之后，通过沉积法从抗蚀剂掩模的上侧沉积金属，去除通过剥离处理而比抗蚀剂掩模上方的金属，并且形成金属被埋在硅衬底的中空部分中的相关样品 。 样品的表面可以通过在相关样品的表面上涂覆DLC膜而变平。
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公开(公告)号：US06388252B1
公开(公告)日：2002-05-14
申请号：US09197584
申请日：1998-11-19
IPC分类号： G01N2300
CPC分类号： G01Q60/38 , G01Q20/04 , G01Q70/06 , Y10S977/873
摘要： A self-detecting type of SPM probe can eliminate influences of a leak current between piezo-resistors each other, between another piezo-resistors opposite to each other, or between the piezo-resistor and the other one, or of a carrier generated by irradiation of light thereto over the piezo-resistors by forming impurity diffusion layers each consisting of a conductive type (n− well regions) reverse to a conductive type of a semiconductor substrate (p-type silicon substrate) on each interface between each of the piezo-resistors and the semiconductor substrate respectively to insulate the elements from one another.
摘要翻译： SPM探头的自检型可以消除压电电阻之间，彼此相对的另一个压电电阻之间或压敏电阻与另一压电电阻之间的泄漏电流的影响，或消除由辐射产生的载体 通过在每个压电元件之间的每个界面上形成杂质扩散层，每个杂质扩散层由与导电类型的半导体衬底（p型硅衬底）的导电类型相反的导电类型（n-阱区）构成， 电阻器和半导体衬底，以使元件彼此绝缘。
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3.发明授权Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor 有权半导体应变传感器和扫描探针显微镜使用半导体应变传感器公开(公告)号：US06211540B1
公开(公告)日：2001-04-03
申请号：US09173035
申请日：1998-10-15
申请人： Hiroshi Takahashi , Nobuhiro Shimizu , Yoshiharu Shirakawabe , Susumu Ichihara , Michel Despont
发明人： Hiroshi Takahashi , Nobuhiro Shimizu , Yoshiharu Shirakawabe , Susumu Ichihara , Michel Despont
IPC分类号： H01L2982
CPC分类号： G01Q20/04 , G01Q70/16 , Y10S977/873
摘要： A semiconductor strain sensor comprises a semiconductor cantilever probe having a free end and a surface portion for undergoing deformation due to a displacement of the free end. A Schottky junction is disposed on the surface portion of the semiconductor cantilever probe and is positioned to undergo a change in electrical characteristic in response to the deformation of the surface portion. The amount of displacement of the free end of the cantilever probe is detected on the basis of a change in the electrical characteristic of the Schottky junction.
摘要翻译： 半导体应变传感器包括具有自由端的半导体悬臂探针和由于自由端位移而发生变形的表面部分。 肖特基结设置在半导体悬臂探针的表面部分上并且被定位成响应于表面部分的变形而经历电特性的变化。 基于肖特基结的电特性的变化来检测悬臂探头的自由端的位移量。
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公开(公告)号：US06664540B2
公开(公告)日：2003-12-16
申请号：US09778459
申请日：2001-02-07
IPC分类号： G01N2300
CPC分类号： G01Q10/045 , G01N23/046 , G01N2223/419 , G01Q20/04 , G01Q60/38 , Y10S977/873
摘要： A microprobe has a cantilever having a first lever portion having a free end portion, a second lever portion having a front end portion from which the first lever portion projects, and a support portion for supporting the second lever portion. A piezoresistive element is disposed on the second lever portion for bending the second lever portion.
摘要翻译： 微探针具有悬臂，其具有具有自由端部的第一杆部分，具有第一杆部分突出的前端部的第二杆部分和用于支撑第二杆部分的支撑部分。 压阻元件设置在第二杆部分上，用于弯曲第二杆部分。
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5.发明授权Cantilever probe and scanning type probe microscope utilizing the cantilever probe 失效悬臂式探头和扫描型探针显微镜利用悬臂式探头
公开(公告)号：US5992225A
公开(公告)日：1999-11-30
申请号：US987734
申请日：1997-12-09
CPC分类号： G01Q60/38 , B81C1/0015 , B82Y35/00 , B81B2201/12 , B81B2203/019 , Y10S977/873
摘要： A cantilever probe for scanning a sample surface comprises a cantilever having a free end and a fixed end. A first support section is disposed at the free end and extends along a first plane. A probe is formed on the first support section for scanning movement relative to the sample surface. A second support section is disposed at the fixed end and extends along a second plane different from the first plane. A beam section interconnects the first support member and the second support member to one another and extends along a third plane different from the first and second planes.
摘要翻译： 用于扫描样品表面的悬臂探头包括具有自由端和固定端的悬臂。 第一支撑部分设置在自由端并沿第一平面延伸。 探针形成在第一支撑部分上，用于扫描相对于样品表面的运动。 第二支撑部分设置在固定端并沿着与第一平面不同的第二平面延伸。 梁部分将第一支撑构件和第二支撑构件彼此互连并且沿着不同于第一和第二平面的第三平面延伸。
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公开(公告)号：US06469293B1
公开(公告)日：2002-10-22
申请号：US09514096
申请日：2000-02-28
IPC分类号： H01J516
CPC分类号： G01Q60/38 , G01Q20/04 , G01Q70/06 , Y10S977/874
摘要： A multiprobe device is provided for a scanning probe instrument and has a plurality of individually-selectable probe members for conducting scanning probe operations. The multiprobe has a plurality of cantilever probes supported by a support member. Each of the cantilevers is individually-selectable for use in conducting scanning probe operations, and each has a different resonance frequency from the others. In a preferred embodiment, portions of the respective cantilevers that are brought into contact with a sample to conduct scanning probe operations are arranged in a substantially linear configuration. A given one of the cantilevers is selected by vibrating the multiprobe at the resonance frequency of the given cantilever.
摘要翻译： 提供了一种用于扫描探针仪器的多探头装置，并具有用于进行扫描探针操作的多个可单独选择的探针部件。 多功能探头具有由支撑构件支撑的多个悬臂探针。 每个悬臂可单独选择用于进行扫描探针操作，并且每个具有与其他谐振频率不同的谐振频率。 在优选实施例中，与样品接触以进行扫描探针操作的各个悬臂的部分被布置成基本线性的构造。 通过在给定悬臂的共振频率下振动多重探针来选择给定的一个悬臂。
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公开(公告)号：US06422069B1
公开(公告)日：2002-07-23
申请号：US09526148
申请日：2000-03-15
IPC分类号： G01B528
CPC分类号： G01Q10/045 , G01Q20/04 , Y10S977/873
摘要： A scanning probe apparatus and a self-exciting cantilever probe therefor are provided for measuring a characteristic of a sample by scanning a lever of the probe across the sample surface. The probe has a deflectable lever extending from a base and formed integrally therewith, and a resistive body provided on the lever to excite the lever in response to a periodic bias signal applied to the resistive body. In addition, the resistive body has a resistance value that varies in response to deflection of the lever so that the resistance of the resistive body may be monitored to detect deflection of the lever.
摘要翻译： 提供扫描探针装置和自激式悬臂探针，用于通过将探针的杆扫过样品表面来测量样品的特性。 探针具有从基座延伸并与其一体形成的可偏转杆，以及设置在杠杆上的电阻体，以响应于施加到电阻体的周期性偏置信号来激励杠杆。 此外，电阻体具有响应于杠杆的偏转而变化的电阻值，使得可以监视电阻体的电阻以检测杠杆的偏转。
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公开(公告)号：US06667467B2
公开(公告)日：2003-12-23
申请号：US09803862
申请日：2001-03-12
申请人： Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Jurgen P. Brugger , Walter Häberle , Gerd K. Binnig , Peter Vettiger
发明人： Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Jurgen P. Brugger , Walter Häberle , Gerd K. Binnig , Peter Vettiger
IPC分类号： G02B2740
CPC分类号： G01Q20/04 , G01Q60/38 , Y10S977/874
摘要： The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.
摘要翻译： 本发明提供了一种能够简化结构的微探针，能够提高样品面的测量精度并能够在每次测量时分配对准调整和使用其的扫描型探针装置。本发明包括一个低分辨率悬臂部分， 支撑部分和加热器层压部分一体形成，形成在加热器层压部分的加热器部分，设置在弯曲部分处的压阻元件和具有低分辨率触针的可移动部分和由支撑部分支撑并且一体形成压阻的高分辨率悬臂部分 设置在弯曲部分的元件和具有高分辨率触针的可移动部分。
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公开(公告)号：US06383823B1
公开(公告)日：2002-05-07
申请号：US09328139
申请日：1999-06-08
IPC分类号： H01L3126
CPC分类号： G01Q60/30 , G01Q20/04 , G01Q60/38 , Y10S977/873
摘要： To provide an SPM probe comprising an SPM probe having a piezoresistor and enable to measure surface voltage of a sample. An SPM probe forming a piezoresistor 20 has conductivity covering metal film 22 on a tip surface 12, and conductive layer 24 is wired from the metal film 22 so as to be one side of an electrode. By that, it is possible to measure interaction between the sample surface by detecting bending quantity of the SPM probe by the piezoresistor and the tip, and to measure voltage of the sample surface without using a detector needing complicated adjustment.
摘要翻译： 提供一种包括具有压敏电阻的SPM探针的SPM探针，并且能够测量样品的表面电压。 形成压电电阻20的SPM探针具有覆盖在前表面12上的金属膜22的导电性，导电层24从金属膜22配线成电极的一侧。 由此，可以通过利用压敏电阻和尖端检测SPM探针的弯曲量来测量样品表面之间的相互作用，并且可以在不使用需要复杂调节的检测器的情况下测量样品表面的电压。
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10.发明授权Scanning probe microscope, and semiconductor distortion sensor for use therein 失效扫描探针显微镜和半导体失真传感器用于其中
公开(公告)号：US6049115A
公开(公告)日：2000-04-11
申请号：US842845
申请日：1997-04-17
CPC分类号： G01Q20/04 , B82Y35/00 , G01B7/18 , G01Q60/38 , Y10S977/873
摘要： A semiconductor distortion sensor comprises a flexible cantilever having a free end portion and a fixed end portion. A p-type region and an n-type region define a pn junction formed in a preselected region of the cantilever where stress-caused distortion occurs due to flexure of the cantilever upon displacement of the free end portion of the cantilever. When the free end portion of the cantilever is subjected to displacement, the cantilever is flexed and the amount of displacement of the free end portion of the cantilever is detected on the basis of a change in an electrical characteristic of the pn junction.
摘要翻译： 半导体失真传感器包括具有自由端部和固定端部的柔性悬臂。 p型区域和n型区域限定形成在悬臂的预选区域中的pn结，其中由于在悬臂的自由端部分移位时由于悬臂的挠曲而发生应力引起的变形。 当悬臂的自由端部进行位移时，基于pn结的电气特性的变化来检测悬臂，并且检测悬臂的自由端部的位移量。
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