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公开(公告)号：US20090078200A1
公开(公告)日：2009-03-26
申请号：US12324256
申请日：2008-11-26
申请人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23C16/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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公开(公告)号：US08821642B2
公开(公告)日：2014-09-02
申请号：US12324202
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US20090084316A1
公开(公告)日：2009-04-02
申请号：US12324297
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23C16/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US08758516B2
公开(公告)日：2014-06-24
申请号：US12324297
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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公开(公告)号：US07879181B2
公开(公告)日：2011-02-01
申请号：US12324256
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US20090078373A1
公开(公告)日：2009-03-26
申请号：US12324202
申请日：2008-11-26
申请人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23F1/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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公开(公告)号：US08506711B2
公开(公告)日：2013-08-13
申请号：US12358752
申请日：2009-01-23
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
IPC分类号： C23C16/44 , C23F1/00 , H01L21/306 , C23C16/22 , C23C16/06
CPC分类号： H01L21/67126 , H01L21/67196 , H01L21/67201 , H01L21/67236 , H01L51/56
摘要： An flat-panel display (FPD) manufacturing apparatus is provided. The apparatus is flexibly configured so that it is capable of easily processing large-size substrates while also simplifying manufacturing, transporting, operating, and repair processes.
摘要翻译： 提供了一种平板显示器（FPD）制造装置。 该装置灵活地构造成能够容易地处理大尺寸基板，同时也简化了制造，运输，操作和修理过程。
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公开(公告)号：US07886687B2
公开(公告)日：2011-02-15
申请号：US11313022
申请日：2005-12-20
IPC分类号： C23C16/50 , C23C16/503 , C23C16/505 , C23C16/509 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： H01L21/67069 , H01J37/3244 , H01J37/32522 , H01J37/32724
摘要： A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.
摘要翻译： 一种等离子体处理装置，用于在保持真空状态的室中产生等离子体，并使用等离子体处理衬底。 等离子体处理装置包括用于使形成在喷淋头中的制冷剂循环的制冷剂通道，从而容易地控制淋浴头的温度并提高等离子体处理的再现性。
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公开(公告)号：US20090133837A1
公开(公告)日：2009-05-28
申请号：US12358752
申请日：2009-01-23
申请人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
发明人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
IPC分类号： C23F1/08
CPC分类号： H01L21/67126 , H01L21/67196 , H01L21/67201 , H01L21/67236 , H01L51/56
摘要： An flat-panel display (FPD) manufacturing apparatus is provided. The apparatus is flexibly configured so that it is capable of easily processing large-size substrates while also simplifying manufacturing, transporting, operating, and repair processes.
摘要翻译： 提供了一种平板显示器（FPD）制造装置。 该装置灵活地构造成能够容易地处理大尺寸基板，同时也简化了制造，运输，操作和修理过程。
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